Ochungechungeni olunembile lokukhiqiza i-semiconductor, isistimu yokudlulisa i-wafer ifana "nomugqa wempilo womugqa wokukhiqiza ama-chip", futhi ukuzinza nokunemba kwawo kunquma ngokuqondile izinga lokukhiqiza lama-chips. Isizukulwane esisha sezinhlelo zokudluliswa kwe-wafer sihlanganisa ngokushintshashintsha amamotho alayini anezisekelo zegwadle, futhi izinzuzo eziyingqayizivele zezinto ze-granite ziyikhodi eyisisekelo yokuvula ukudluliswa kokusebenza okuphezulu.
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Isisekelo se-Granite: Ukwakha "isisekelo esiqinile edwaleni" sokudlulisela okuzinzile
I-Granite, eseyenziwe eminyakeni engamakhulu ezigidi zeminyaka yokuthuthukiswa kwe-geological, ifaka ukucwebezela kwamaminerali aminyene futhi afanayo. Lesi sici esingokwemvelo sikwenza kube yisisekelo esikahle sezinhlelo zokudlulisa ama-wafer. Endaweni eyinkimbinkimbi yama-semiconductor cleanrooms, i-granite, ne-ultra-low coefficient yokwandisa okushisayo (kuphela 5-7 × 10⁻⁶/℃), ingamelana nokushisa okukhiqizwa ngesikhathi sokusebenza kwemishini kanye nomthelela wokushintsha kwezinga lokushisa kwemvelo, iqinisekise ukuzinza kosayizi wesisekelo nokugwema ukuchezuka kwendlela yokudlulisela okubangelwa ukuchezuka. Ukusebenza kwayo okuvelele kokudambisa ukudlidliza kungamunca ngokushesha ukudlidliza kwemishini okukhiqizwa ngesikhathi sokuqala, ukuvala shaqa kanye nokusheshisa kwamamotho alayini, kanye nokuphazamiseka kwangaphandle okulethwe ukusebenza kwezinye izinto zokusebenza endaweni yokusebenzela, okuhlinzeka inkundla ezinzile "eno-zero shake" yokudluliselwa kwe-wafer. .
Ngaleso sikhathi, ukuzinza kwamakhemikhali egwadle kuqinisekisa ukuthi ayigqwali noma ayigqwali kuma-workshops we-semiconductor lapho ama-acid kanye nama-alkali reagents eguquguqukayo futhi kudingeka ukuhlanzeka okuphezulu, ngaleyo ndlela kugwenywe umthelela ekunembeni kokudlulisela ngenxa yokuguga kwezinto ezibonakalayo noma ukukhangisa okungcolile. Izici ezibushelelezi neziminyene zendawo zinganciphisa ngempumelelo ukunamathela kothuli, zihlangabezane nezindinganiso eziqinile zokungenalo izintuli zamagumbi ahlanzekile futhi zisuse ubungozi bokungcoliswa kwe-wafer kusuka empandeni. .
Umphumela "wobambiswano lwegolide" wamamotho emigqa kanye negwadle
Ama-Linear motors, anezici zawo zokungabi namvume yokudlulisa ngomshini, ukusheshisa okuphezulu kanye nesivinini sokuphendula esikhulu, ukuhanjiswa kwe-wafer ngezinzuzo "zokushesha, kunembile futhi kuzinzile". Isisekelo se-granite sinikeza inkundla yokusekela eqinile nethembekile. Laba bobabili basebenza ndawonye ukuze bafinyelele izinga eliphezulu ekusebenzeni. Lapho i-linear motor ishayela isithwali esilucwecwana ukuze sisebenze kuthrekhi yesisekelo segwadle, ukuqina okuqinile kanye nokuzinza kwesisekelo kuqinisekisa ukudluliswa okuphumelelayo kwamandla okushayela kwemoto, ukugwema ukulahleka kwamandla noma ukuleleka kokudlulisela okubangelwa ukuwohloka kwesisekelo. .
Iqhutshwa isidingo sokunemba kwe-nanoscale, ama-linear motors angakwazi ukufinyelela ukulawulwa kokufuduka kweleveli engaphansi kwe-micron. Izici zokucubungula ezinembayo eziphezulu zezisekelo zegwadle (ezinamaphutha okucaba alawulwa ngaphakathi ±1μm) zifanelana ngokuphelele nokulawula okunembe kwamamotho aqondile, ngokuhlanganyela ukuqinisekisa ukuthi iphutha lokuma ngesikhathi sokudluliswa kwe-wafer lingaphansi kuka-±5μm. Kungakhathaliseki ukuthi ukuhamba ngesivinini esikhulu phakathi kwemishini ehlukahlukene yenqubo noma indawo yokupaka enembile yokunikezwa kwe-wafer, inhlanganisela yamamotho alayini kanye nezisekelo zegranite zingaqinisekisa "ukuchezuka okuyiziro kanye ne-zero jitter" ekudluliselweni kwe-wafer. .
Ukuqinisekisa ukuzijwayeza komkhakha: Ukuthuthukiswa okukabili ekusebenzeni kahle nezinga lesivuno
Ngemuva kokuthuthukisa uhlelo lwayo lokudluliswa kwama-wafer, ibhizinisi elihamba phambili emhlabeni jikelele le-semiconductor lamukele isisombululo se-linear motor + granite base, esikhulise ukusebenza kahle kokudluliselwa kwe-wafer ngo-40%, sanciphisa izinga lokuvela kwamaphutha anjengokushayisana nokunciphisa ngesikhathi senqubo yokudlulisa ngo-85%, futhi lathuthukisa izinga lokukhiqiza lama-chips ngo-6%. Ngemuva kwedatha kukhona isiqinisekiso sokuzinza kokudlulisela esinikezwa isisekelo se-granite kanye nomphumela wesivinini esiphezulu nonembile we-linear motor, okunciphisa kakhulu ukulahlekelwa kanye nephutha kunqubo yokudlulisa i-wafer. .
Kusukela kuzinto ezibonakalayo kuya ekukhiqizeni okunembayo, kusukela ezinhlelweni zokusebenza kuye kokuqinisekisa okungokoqobo, inhlanganisela yamamotho aqondile nezisekelo zegwadle kuchaze kabusha amazinga wezinhlelo zokudlulisa amawafa. Ngokuzayo lapho ubuchwepheshe be-semiconductor buthuthukela ezinqubweni ze-3nm kanye ne-2nm, izinto ze-granite zizoqhubeka nokufaka umfutho oqinile ekuthuthukisweni kwemboni ngezinzuzo zazo ezingenakubuyiseleka.
Isikhathi sokuthumela: May-14-2025