Iyini i-Granite esetshenziswa emishinini yokucubungula i-wafer?

I-Granite iyinto ethandwayo embonini yokucubungula ama-wafer ngenxa yezakhiwo zayo eziyingqayizivele zomshini kanye nokuqina kwayo. Iyitshe lemvelo elimbiwa ezinkwalini emhlabeni wonke futhi selisetshenziswe amakhulu eminyaka ngezinjongo ezahlukene zokwakha, okuhlanganisa nokukhiqizwa kwemishini ye-semiconductor. Kulesi sihloko, sizoxoxa ngezakhiwo ze-granite kanye nezinhlelo zayo ezahlukene zokucubungula ama-wafer.

Izakhiwo zeGranite

I-Granite iyidwala eliyi-igneous elakhiwe yi-mica, i-feldspar, ne-quartz. Yaziwa ngamandla ayo angavamile, ubulukhuni, nokuqina, okwenza ibe yinto efanelekile yokusetshenziswa edinga ukunemba okuphezulu nokunemba. I-Granite ine-coefficient ephansi yokwanda kokushisa, okusho ukuthi ayinwebi noma ayinciphi ngenxa yokushintsha kwezinga lokushisa, okwenza iqine kakhulu. Ngaphezu kwalokho, i-granite imelana nokugqwala namakhemikhali, okwenza ibe yinto efanelekile yokusetshenziswa ezindaweni ezinzima.

Ukusetshenziswa kweGranite ku-Wafer Processing Equipment

I-Granite iyinto esetshenziswa kabanzi embonini yokucubungula ama-wafer ngenxa yenhlanganisela yayo eyingqayizivele yezakhiwo. Lokhu okulandelayo ezinye zezindlela zokusebenzisa i-granite emishinini yokucubungula ama-wafer:

1. Amathuluzi e-Metrology

I-granite ivame ukusetshenziswa ekukhiqizweni kwamathuluzi okukala, njengemishini yokulinganisa ehlanganisiwe (ama-CMM) kanye nezinhlelo zokulinganisa ezibonakalayo. Lawa mathuluzi adinga izindawo ezizinzile ezingamelana nokudlidliza nokushisa. Ukuqina okuphezulu kanye nokwanda okuphansi kokushisa kwe-granite kwenza kube yinto efanelekile yezinhlelo ezinjalo.

2. Ama-Wafer Chucks

Ama-wafer chuck asetshenziselwa ukubamba ama-wafer ngesikhathi senqubo yokukhiqiza. Lawa ma-chuck adinga indawo eyisicaba nezinzile ukuvimbela i-wafer ukuthi ingagobi noma igobe. I-Granite inikeza indawo eyisicaba ezinzile kakhulu futhi emelana nokugoba, okwenza kube yinto enhle kakhulu yama-wafer chuck.

3. Amathuluzi Okupholisha Omshini Wekhemikhali (i-CMP)

Amathuluzi e-CMP asetshenziselwa ukupholisha ama-wafer ngesikhathi senqubo yokukhiqiza. Lawa mathuluzi adinga ipulatifomu ezinzile engamelana nokudlidliza nokushisa. Ukuqina okuhle kakhulu kanye nokwanda okuphansi kokushisa kwe-granite kwenza kube yinto efanelekile yamathuluzi e-CMP.

4. Imishini Yokuhlola I-Wafer

Imishini yokuhlola i-wafer isetshenziselwa ukuhlola ama-wafer ukuze ithole amaphutha namaphutha. Lawa mathuluzi adinga indawo ezinzile neyisicaba ukuqinisekisa ukulinganiswa okunembile. I-Granite inikeza indawo ezinzile neyisicaba engamelani nokugoba, okwenza kube yinto efanelekile yemishini yokuhlola i-wafer.

Isiphetho

Ekuphetheni, i-granite iyinto esetshenziswa kabanzi embonini yokucubungula i-wafer ngenxa yezakhiwo zayo eziyingqayizivele zomshini kanye nokuqina kwayo. Ivame ukusetshenziswa ekukhiqizeni amathuluzi okukala, ama-wafer chucks, amathuluzi e-CMP, kanye nemishini yokuhlola i-wafer. Inhlanganisela eyingqayizivele yezakhiwo iyenza ibe yinto efanelekile yezinhlelo zokusebenza ezidinga ukunemba okuphezulu nokunemba. Ngezinzuzo zayo eziningi, i-granite ihlala iyisinqumo esithandwayo semishini yokucubungula i-wafer, futhi ukusetshenziswa kwayo kungenzeka kuqhubeke nokukhula esikhathini esizayo.