Emakamelweni okuhlanza e-semiconductor, ukuhlolwa kokukhanya kanye nokuhlanganiswa kwezingxenye ezinembile, kuqiniswa ukulawulwa okuqinile phezu kokungcola kwezinhlayiya, ukuphazamiseka kokudlidliza kanye nokushintshashintsha kwezinga lokushisa kanye nomswakama. Amatafula okuhlola i-granite asebenza njengezindawo zokubhekisela ze-metrology eziyinhloko kulezi zindawo. Ngesikhathi sokukhethwa kwephrojekthi, abathengi abaningi bagxila kuphela ekuthambekeni kwetafula uqobo ngenkathi bebheka imingcele eyingqayizivele ebangelwa izindawo ezihlanzekile. Igumbi lokuhlanza akuyona nje igumbi elihlanziwe kahle. Izinhlayiya zothuli, ukuxokozela komoya, ukuphuma kwegesi ezintweni kanye nezakhiwo zokufaka zihlangana namatafula e-granite. Ukukhetha noma ukufakwa okungalungile ngeke nje kuphazamise ukuhlukaniswa kwegumbi lokuhlanza kodwa futhi kuzonciphisa kancane kancane ukunemba kwetafula futhi kunciphise isivuno somkhiqizo. Ukuze kuvunyelwe amatafula okuhlola i-granite ukuthi alethe ukusebenza okuzinzile kwezinga le-nano-level ezimakamelweni okuhlanza, izidingo ezikhethekile ezihlanganisa ukuhlanzeka kwezinto, ukwelashwa kwendawo, ukwakheka kwesakhiwo okumelana nothuli, ukuhambisana kwemvelo kanye nokuphathwa kokusebenza nokugcinwa kumele kwaneliswe.
Okokuqala izidingo zokwelashwa kwezinto zokwakha kanye nobuso ezihambisana nezimo zegumbi lokuhlanza. Ama-granite slabs ajwayelekile anezimbobo ezincane zangaphakathi ezibamba uthuli lwamaminerali kanye nemfucumfucu. Lezi zinhlayiya zingase zikhishwe njalo ngaphansi kokuphazamiseka komoya, zingcolise izinto zokusebenza ezizwelayo njenge-wafers nezinto ezibonakalayo. Amatafula okuhlola i-granite afakwe emakamelweni okuhlanza enziwe ngezimbobo ze-granite ezimnyama eziminyene ezinezimbobo eziphansi kakhulu. Adlula ekwelashweni okukhethekile kokuvala izimbobo ezincane zangaphakathi nokucindezela ukukhishwa kwezinhlayiya okuqhubekayo. Inqubo yokugaya itafula akufanele ishiye okusanhlamvu okusanhlamvu okusalile, futhi indawo eqediwe kufanele ingabi nemigodi eqoqa uthuli. Kusetshenziswa ukuqeda okuhlanzekile, okuphansi kokuvikela esikhundleni sopende noma ama-resin akhipha i-VOC ukuze kugwenywe ukungcoliswa kwemvelo kwendawo ehlanzekile. Ama-chamfer abushelelezi afakwa kuzo zonke izinqe nasemakhoneni ukuze kuncishiswe ukuqongelela kothuli futhi kube lula ukusula njalo.
Okwesibili yimiklamo engangeni uthuli kanye nengangeni ukudlidliza okuncane kwezisekelo nezisekelo. Amagumbi okuhlanza avame ukuba nokudlidliza okubuthakathaka okubangelwa ukuhamba komoya opholile ojikelezayo, imishini yokudlulisa kanye namapulatifomu azenzakalelayo. Izikhala zemicu ezinyaweni ezijwayelekile zokulinganisa zivame ukuqoqa uthuli futhi zichithe izinhlayiya ezincane. Izinhlangano zokusekela zamatafula e-granite e-cleanroom zenziwe ngezinto zensimbi ezikhipha izinhlayiya ezincane, ezinezakhiwo ezivalekile ngokuphelele ezingangeni uthuli kanye nemikhono yokuvikela efakwe phezu kwezintambo eziveziwe. Lonke uhlelo lokusekela lufeza izinjongo ezimbili: ukulinganisa okuncane ukugcina indiza yokubhekisela kanye nokuhlukanisa okusebenzayo kokudlidliza ukuvimba ukudlidliza okuncane okuvela kubalandeli kanye nabaphathi berobhothi. Izitezi ze-cleanroom ngokuvamile ziyizitezi ezilwa ne-epoxy anti-static, ezingakwazi ukwamukela imisele yokuhlukanisa ukudlidliza esindayo njengaleyo esezindlini ezivamile ze-metrology. Ngakho-ke ama-vibration pads asetshenziswa ezinhlelweni zokusekela ukunciphisa ukudluliswa kokudlidliza nokuvimbela ukugeleza kokunemba okubangelwa ukuhlanganiswa kokudlidliza. Indawo engaphansi kohlaka lwetafula kufanele ihlale ifinyeleleka ukuze ihlanzwe ngaphandle kwamakhona afile, ukuvumela ukusula ngama-cleanroom mops kanye nezihlanzi ze-vacuum.
Okwesithathu ukulawula ukuqina kwezinga lokushisa nomswakama kanye nokuguquguquka kokushisa. Nakuba amakamelo okuhlanza afakwe izinhlelo zokushisa ezihlala njalo, ukunikezwa komoya oqondiswayo okuvela kuma-air conditioner kungaphephula ngqo ezindaweni ze-granite futhi kudale umehluko wokushisa wendawo. I-Granite iqhuba ukushisa kancane, futhi ukufudumala okungalingani kwendawo kuzobangela ukuphambuka okuncane kokushisa okonakalisa indiza yokubhekisela. Amatafula okuhlola i-granite kumele abekwe kude nezindawo zomoya kanye nokugeleza komoya okuqondile. Ukuqina kokushisa okuhle kakhulu kwezinto ezibonakalayo kusetshenziswa ukuze kuncishiswe ukuhlukahluka kobukhulu ngaphakathi kobubanzi bokushisa nomswakama begumbi lokuhlanza. Umswakama kumele futhi uhlale ngaphakathi kwefasitela elifanele. Umswakama owedlulele ubangela ukugqwala kwezingxenye zokusekela zensimbi, futhi izinhlayiya zokugqwala ziba umthombo omkhulu wokungcola. Umswakama ophansi uholela kugesi ongashintshi odonsela uthuli phezu kwamatafula kanye nezinto zokusebenza. Kumapulatifomu athwala umoya we-granite, umoya ocindezelwe othunyelwa eziteshini zomoya udinga ukuhlungwa okuphelele ukuze kuvinjwe uthuli ukuthi lungaphephuki phezu kwetafula.
Okwesine izidingo zokulawula okuhlanzekile kwezingxenye zokuhlanganisa kanye nezisizayo. Amatafula okuhlola i-granite emakamelweni okuhlanza avame ukusetshenziselwa ukuhlanganisa izisekelo ze-granite, amamojula athwala umoya kanye nezindlela zokuhlola ze-optical, kanye nezigaba ze-motor eziqondile kanye nezinhlelo zokunyakaza ze-XY ezifakwe phezulu. Zonke ihadiwe kanye nezinamathiseli kumele zihlanzwe, zisuswe amafutha futhi zipakishwe emaphaketheni angenalo uthuli ngaphandle kwegumbi lokuhlanza ngaphambi kokungena. Amabhokisi nezikhwama zepulasitiki ezivamile azivunyelwe ngaphakathi kwezindawo ezihlanzekile. Umsebenzi wokuhlanganisa phezu kwetafula kumele usebenzise amathuluzi egumbi lokuhlanza. Abasebenzi bagqoka amasudi egumbi lokuhlanza kanye namagilavu ukuvimbela ukungcola okuvela ezinhlakeni zesikhumba kanye namafutha. Izimbobo zokuthola izikhonkwane kanye nezinto ezifakwe ngentambo ezifakwe ku-granite kumele zisuswe ngokuphelele kudoti wokucubungula futhi zivalwe ukuze kubanjwe ukungcola okufakiwe. Iziteshi zomoya ezisekelweni ze-granite ezithwala umoya zihlanzwa ngokuphindaphindiwe ngemva komshini wokuhlanza ukuze kususwe zonke izinhlayiya ezisele ngaphambi kokufakwa endaweni. 
Okwesihlanu yizinqubo zokusebenza okuhlanzekile nokugcinwa kwazo. Amalebhu ajwayelekile okukala izinga angasebenzisa ama-wipe avamile kakotini kanye nezihlanzi ezijwayelekile, kodwa ama-wipe akhethekile angenalo uthuli kanye nezinsipho ezingenazinhlayiya ezingathathi hlangothi kuphela ezingasetshenziswa emakamelweni okuhlanza. Amathuluzi okuklwebha aqinile awavunyelwe, njengoba imihuzuko ebusweni bomhlaba obunembile izobamba ukungcola unomphela. Ama-gauge nama-probe asetshenziselwa ukuhlola ukunemba kumele asuswe uthuli ngaphambi kokuthintana ne-tabletop. Ukulinganiswa kokunemba ngezikhathi ezithile kuhlelwe ngezikhathi zokukhiqiza okuphansi ukuze kuncishiswe ukuphazamiseka kwezinhlayiya kusukela ekuhambeni kwabasebenzi. Ama-tabletop e-granite akufanele athuthwe ngokunganaki ngaphakathi kwamakamelo okuhlanza, njengoba ukungqubuzana ngesikhathi sokufuduka kudala inani elikhulu lezinhlayiya futhi kwehlise ukuhlukaniswa kwe-cleanroom. Ukuqinisekiswa kokunemba okuphindaphindiwe kwenziwa ngama-interferometer e-laser kanye namazinga kagesi ukuze kugcinwe ukusebenza okuzinzile kokubhekisela. Abasebenzi bokulungisa bahlola njalo izakhiwo zokusekela ukuze kutholakale ukuchitheka kwezinhlayiya kanye nobuqotho besivalo. Izingqimba zokuvala ezonakele ziyalungiswa ngokushesha ukuze kumiswe ukukhishwa kwezinhlayiya okuqhubekayo kusuka ema-pores amatshe.
Ngamafuphi, kumatafula okuhlola i-granite asetshenziswa emakamelweni okuhlanza, ukunemba kumane kuyisidingo sokungena. Ukuhambisana okuhlanzekile, ukulawulwa kwezinhlayiya, ukumelana nokuphazamiseka komoya kanye nokuphuma kwegesi okuphansi yizidingo ezikhethekile eziyinhloko. Izinto zetafula, izakhiwo zokusekela, izinhlelo zokufaka kanye nemisebenzi yokulungisa kumele konke kuvumelane nezimo zekamelweni lokuhlanza. Kungale ndlela kuphela lapho kokubili ukuhlukaniswa kwekamelweni lokuhlanza kanye nokuzinza kwereferensi yokulinganisa i-nano / micron kungagcinwa khona, kusekela ukusebenza okuzinzile kwezinqubo zokuhlola ukunemba kwama-semiconductor, ama-optics kanye nezimboni zamandla amasha.
Isikhathi sokuthunyelwe: Septhemba-23-2026