Izingxenye zegranite zisetshenziswe kabanzi enqubweni yokukhiqiza i-semiconductor ngenxa yezici zazo ezinhle kakhulu njengokuqeda okuphezulu kwendawo, ukuqina okuphezulu, kanye nokunciphisa ukudlidliza okuhle kakhulu. Izingxenye zegranite zibalulekile emishinini yokukhiqiza i-semiconductor, kufaka phakathi imishini ye-lithography, imishini yokupholisha, kanye nezinhlelo ze-metrology njengoba zinikeza indawo enembile kanye nokuqina ngesikhathi senqubo yokukhiqiza. Naphezu kwazo zonke izinzuzo zokusebenzisa izingxenye zegranite, nazo zineziphambeko. Kulesi sihloko, sizoxoxa ngeziphambeko zezingxenye zegranite zemikhiqizo yenqubo yokukhiqiza i-semiconductor.
Okokuqala, izingxenye ze-granite zine-coefficient yokwandisa ukushisa ephezulu. Kusho ukuthi zanda kakhulu ngaphansi kokucindezeleka kokushisa, okungadala izinkinga ngesikhathi senqubo yokukhiqiza. Inqubo yokukhiqiza i-semiconductor idinga ukunemba okuphezulu kanye nokunemba kobukhulu okungase kuphazamiseke ngenxa yokucindezeleka kokushisa. Isibonelo, ukuguqulwa kwe-silicon wafer ngenxa yokwanda kokushisa kungabangela izinkinga zokuqondanisa ngesikhathi se-lithography, okungase kuphazamise ikhwalithi yedivayisi ye-semiconductor.
Okwesibili, izingxenye zegranite zinezinkinga zokubhoboza ezingabangela ukuvuza kwe-vacuum enqubweni yokukhiqiza i-semiconductor. Ukuba khona komoya noma enye igesi ohlelweni kungabangela ukungcola ebusweni be-wafer, okuholela ezinkingeni ezingathinta ukusebenza kwedivayisi ye-semiconductor. Amagesi angasebenzi njenge-argon ne-helium angangena ezingxenyeni zegranite ezinezimbobo futhi adale amabhamuza egesi angaphazamisa ubuqotho benqubo ye-vacuum.
Okwesithathu, izingxenye zegranite zinezimfantu ezincane ezingaphazamisa ukunemba kwenqubo yokukhiqiza. Igranite iyinto ebuthakathaka engakha izimfantu ezincane ngokuhamba kwesikhathi, ikakhulukazi uma ivezwa imijikelezo yokucindezeleka eqhubekayo. Ukuba khona kwezimfantu ezincane kungaholela ekungazinzini kobukhulu, okubangela izinkinga ezibalulekile ngesikhathi senqubo yokukhiqiza, njengokulungiswa kwe-lithography noma ukupholisha kwe-wafer.
Okwesine, izingxenye zegranite zinokuguquguquka okulinganiselwe. Inqubo yokukhiqiza i-semiconductor idinga imishini eguquguqukayo engamukela izinguquko zenqubo ezahlukene. Kodwa-ke, izingxenye zegranite ziqinile futhi azikwazi ukuzivumelanisa nezinguquko zenqubo ezahlukene. Ngakho-ke, noma yiziphi izinguquko enkambisweni yokukhiqiza zidinga ukususwa noma ukushintshwa kwezingxenye zegranite, okuholela ekungasebenzini kwesikhathi futhi kuthinte umkhiqizo.
Okwesihlanu, izingxenye zegranite zidinga ukuphathwa okukhethekile kanye nokuthuthwa ngenxa yesisindo sazo kanye nobuthakathaka bazo. Igranite iyinto eqinile futhi esindayo edinga imishini ekhethekile yokuphatha njengama-crane nama-lifter. Ngaphezu kwalokho, izingxenye zegranite zidinga ukupakishwa ngokucophelela kanye nokuthuthwa ukuze kuvinjelwe umonakalo ngesikhathi sokuthunyelwa, okuholela ezindlekweni ezengeziwe kanye nesikhathi.
Ekuphetheni, izingxenye zegranite zinezinkinga ezithile ezingathinta ikhwalithi kanye nokukhiqiza kwemikhiqizo yenqubo yokukhiqiza ye-semiconductor. Lezi ziphazamiso zingancishiswa ngokuphathwa ngokucophelela nokugcinwa kwezingxenye zegranite, okuhlanganisa ukuhlolwa njalo kwe-microfractures kanye neziphazamiso ze-porosity, ukuhlanza okufanele ukuvimbela ukungcola, kanye nokuphathwa ngokucophelela ngesikhathi sokuthuthwa. Naphezu kweziphazamiso, izingxenye zegranite zihlala ziyingxenye ebalulekile yenqubo yokukhiqiza i-semiconductor ngenxa yokuphela kwazo okuphezulu, ukuqina okuphezulu, kanye nokunciphisa ukudlidliza okuhle kakhulu.
Isikhathi sokuthunyelwe: Disemba-05-2023