Izingxenye ze-granite zisetshenziswe kakhulu enqubweni yokukhiqiza i-semiconductor ngenxa yezimpawu zazo ezinhle kakhulu njengokuqedwa kwengaphezulu, ukuqina okuphezulu, kanye nokuncibilika okuhle kakhulu kokudlidliza.Izingxenye ze-granite zibalulekile emishinini yokwenziwa kwe-semiconductor, okuhlanganisa nemishini ye-lithography, imishini yokupholisha, nezinhlelo ze-metrology njengoba zinikeza ukuma okunembayo nokuzinza phakathi nenqubo yokukhiqiza.Naphezu kwazo zonke izinzuzo zokusebenzisa izingxenye ze-granite, nazo zinamaphutha.Kulesi sihloko, sizoxoxa ngokukhubazeka kwezingxenye ze-granite zemikhiqizo yenqubo yokukhiqiza i-semiconductor.
Okokuqala, izingxenye ze-granite zine-coefficient ephezulu yokwandisa ukushisa.Kusho ukuthi banda kakhulu ngaphansi kwengcindezi yokushisa, engabangela izinkinga phakathi nenqubo yokukhiqiza.Inqubo yokukhiqiza i-semiconductor idinga ukunemba okuphezulu nokunemba kwe-dimensional okungase kube sengozini ngenxa yengcindezi yokushisa.Isibonelo, ukuguqulwa kwe-silicon wafer ngenxa yokwanda okushisayo kungabangela izinkinga zokuqondanisa phakathi ne-lithography, engase ibeke engcupheni ikhwalithi yedivayisi ye-semiconductor.
Okwesibili, izingxenye ze-granite zineziphambeko ze-porosity ezingabangela ukuvuza kwe-vacuum ohlelweni lokukhiqiza lwe-semiconductor.Ukuba khona komoya nanoma iyiphi enye igesi kusistimu kungabangela ukungcoliswa kwendawo ye-wafer, kubangele ukonakala okungase kuthinte ukusebenza kwedivayisi ye-semiconductor.Amagesi angasebenzi afana ne-argon ne-helium angangena ezingxenyeni ezimbotshana zegwadle futhi adale amabhamuza egesi angase aphazamise ubuqotho benqubo ye-vacuum.
Okwesithathu, izingxenye zegwadle zinama-microfractures angaphazamisa ukunemba kwenqubo yokukhiqiza.I-Granite iyinto ephukayo engathuthukisa ama-microfractures ngokuhamba kwesikhathi, ikakhulukazi lapho evezwe emijikelezweni yokucindezeleka eqhubekayo.Ukuba khona kwama-microfractures kungaholela ekungazinzini kobukhulu, kubangele izinkinga ezibalulekile phakathi nenqubo yokukhiqiza, njengokuqondanisa i-lithography noma ukupholisha i-wafer.
Okwesine, izingxenye zegwadle zinokuguquguquka okulinganiselwe.Inqubo yokukhiqiza i-semiconductor idinga okokusebenza okuguquguqukayo okungamukela izinguquko zenqubo ehlukene.Kodwa-ke, izingxenye ze-granite ziqinile futhi azikwazi ukuzivumelanisa nezinguquko zezinqubo ezahlukene.Ngakho-ke, noma yiziphi izinguquko enqubweni yokukhiqiza zidinga ukususwa noma ukushintshwa kwezingxenye ze-granite, okuholela ekunciphiseni kwesikhathi futhi kuthinte ukukhiqiza.
Okwesihlanu, izingxenye ze-granite zidinga ukuphathwa okukhethekile nokuthutha ngenxa yesisindo sabo kanye nobuthaka.I-Granite iyimpahla eminyene futhi esindayo edinga imishini yokuphatha ekhethekile njengama-cranes nama-lifters.Ukwengeza, izingxenye ze-granite zidinga ukupakishwa nokuthuthwa ngokucophelela ukuze kuvinjelwe ukulimala ngesikhathi sokuthunyelwa, okuholela ezindlekweni ezengeziwe nesikhathi.
Sengiphetha, izingxenye zegwadle zinezihibe ezithile ezingase zithinte ikhwalithi nokukhiqiza kwemikhiqizo ye-semiconductor yokukhiqiza.Lezi zinkinga zingancishiswa ngokuphathwa ngokucophelela nokunakekelwa kwezingxenye zegwadle, okuhlanganisa nokuhlolwa ngezikhathi ezithile ama-microfractures kanye nokukhubazeka kwe-porosity, ukuhlanzwa okufanele ukuze kuvinjelwe ukungcola, nokuphatha ngokucophelela ngesikhathi sokuthutha.Naphezu kokukhubazeka, izingxenye ze-granite zihlala ziyingxenye ebalulekile yenqubo yokukhiqiza i-semiconductor ngenxa yokuqedwa kwazo okuphezulu, ukuqina kwazo okuphezulu, kanye nokuncibilika okuhle kakhulu kokudlidliza.
Isikhathi sokuthumela: Dec-05-2023