Izicelo Ezijwayelekile Eziyi-8 Zezingxenye Ze-Precision Granite Emishinini Ye-Semiconductor

Embonini ye-semiconductor, lapho "i-nanometer" iyiyunithi ejwayelekile yokulinganisa, ubuqotho besakhiwo semishini abuxoxiswana. Njengoba ama-chip node encipha abe ngu-5nm nangaphezulu, isidingo sokudambisa ukudlidliza kanye nokuqina kokushisa sifinyelela emazingeni aphezulu kakhulu. Izingxenye ze-granite eziqondile zishintshe kusukela ekubeni inketho ephezulu kuya ku-"DNA" ebalulekile yehadiwe yokukhiqiza ye-semiconductor.

Njengomhlinzeki ohamba phambili wezakhiwo zemishini ezizinzile kakhulu, i-ZHHIMG® ihlaziya izinhlelo zokusebenza eziyisishiyagalombili ezibaluleke kakhulu lapho i-granite iyiqhawe elithule lale mpahla.

1. Izisekelo Zomshini We-Lithography

Umshini we-lithography uwumshini oyinkimbinkimbi kakhulu ku-semiconductor chain. Isisekelo kumele sisekele izinhlelo ezinkulu ze-optical ngenkathi sihlala sithule ngokuphelele. Ubuningi obukhulu be-Granite kanye nomswakama wangaphakathi kuyivumela ukuthi imunce ukudlidliza okuncane okuvela endaweni ezungezile, okuqinisekisa ukuthi umthombo wokukhanya uhlala uqondile ezingeni le-athomu.

2. Izigaba Zokunyakaza Zokuthwala Umoya

Ukuthuthwa kwe-wafer esheshayo kudinga ukunyakaza okungenazingxabano. Ngenxa yokuthi i-granite ingaxhunywa ibe yi-sub-micron flatness, isebenza njengomlingani ofanele ubuchwepheshe bokuthwala umoya. “Umcamelo womoya” ushelela phezu kobuso be-granite ngaphandle kokuguga, okunikeza ukunyakaza okubushelelezi kakhulu okudingekayo ukuze kuskenwe futhi kubekwe endaweni.

3. Amapulatifomu Okuhlola Ama-Wafer kanye ne-Metrology

Ngemva kokuqopha, ama-wafer kumele ahlolwe ukuthi awanamaphutha. Noma yikuphi ukwanda kokushisa kufreyimu yomshini kungaholela "ekubeni namaphutha" noma ekuphutheni kwephutha.Izingxenye ze-granite eziqondileukuhlinzeka ngendawo engangenisi ukushisa, ukuqinisekisa ukuthi idatha yokuhlola iwukubonakaliswa kwangempela kobuso be-wafer, hhayi ukuphambuka komshini.

4. Izinhlelo Zokunyakaza Kwe-Gantry (Izakhiwo Zebhuloho)

Ekuhlanganiseni ngesivinini esikhulu noma ngokubopha ngentambo, “ibhuloho” noma i-gantry kumele ihambe ngokushesha ngaphandle kokunyakazisa. I-gantry ye-granite inikeza isilinganiso sokuqina okuphezulu uma kuqhathaniswa nensimbi ephonswe, okunciphisa kakhulu “isikhathi sokuthula”—isikhathi umshini okumele ulinde ngaso ukuthi ukudlidliza kume ngaphambi kokuba wenze umsebenzi wawo olandelayo.

5. Amafreyimu Emishini Yokulungisa Nge-Laser

Uma kutholakala iphutha kumaski noma ku-wafer, ama-laser asetshenziselwa ukulungisa ngokunembile. Lokhu kudinga isisekelo sesakhiwo esingenawo nhlobo amandla kazibuthe futhi esingahambisi ugesi. I-Granite ivikela ngokwemvelo, ivimbela ukuphazamiseka kwe-electromagnetic ukuthi kungathinti indlela ye-laser ebucayi.

6. I-CMM (Imishini Yokulinganisa Ehlanganisiwe) Yamagumbi Okuhlanza

Ukulawulwa kwekhwalithi ngaphakathi kwesikhungo se-semiconductor kudinga ama-CMM angamelana nezinqubo eziqinile zegumbi lokuhlanza. Ngokungafani nensimbi, engakhipha izinhlayiya noma i-oxidize, i-granite imelana ne-asidi futhi ayigqwali, igcina isakhiwo semishini esizinzile kakhulu ngaphandle kokungcolisa indawo ezungezile.

7. Izisekelo Zokupholisha Okwenziwa Ngemishini Yamakhemikhali (i-CMP)

Inqubo ye-CMP ihilela izinto eziludaka kanye namakhemikhali angcolisa kakhulu izinsimbi. Ukumelana kwamakhemikhali kwemvelo kwe-granite kwenza kube yinto efanelekile yesisekelo sesakhiwo samayunithi okupholisha, okuqinisekisa impilo ende yenkonzo ngisho nasezindaweni zamakhemikhali ezinzima.

8. Izinhlelo Zokufakelwa Ama-Ion

Izindawo ezinama-voltage aphezulu kuma-ion implanters zidinga izingxenye ezingeke ziphazamise imisebe ye-ion noma zidale i-arcing kagesi. Izakhiwo ze-dielectric ze-Granite zenza kube ukukhetha okuphephile nokuzinzile kokufaka izingxenye zikagesi ne-vacuum ezizwelayo.

Kungani i-ZHHIMG® Yengqalasizinda Ye-Semiconductor?

Kwa-ZHHIMG®, siyaqonda ukuthi isisekelo semishini ye-semiconductor singaphezu nje kwengcezu yetshe—siyithuluzi elilinganisiwe. I-granite yethu emnyama ekhethekile, ehlanganiswe neminyaka engaphezu kwengu-30 yobuchwepheshe bethu bokugaya ngesandla, isenza sikwazi ukufeza amazinga okusicaba kanye nokulinganisa ahlangabezana nezidingo ezinzima zesikhathi se-sub-micron.

• Izinto: I-granite emnyama ye-ZHHIMG® enobukhulu obuphezulu, ecolekile kakhulu.

• Ukunemba: Amabanga okunemba ngokwe-DIN 876 Grade 00 noma imininingwane ye-JIS/ASME eyenziwe ngokwezifiso.

• Ukwenza ngokwezifiso: Izinto zokufaka ezihlanganisiwe, izindawo zokufaka ze-T, kanye nemizila yomoya efakwe kusengaphambili ezindaweni zethu zokusebenzela zokushisa ezingaguquki ezingama-10,000m².