Ensimini ebaluleke kakhulu yokukhiqiza ngezinga le-nanometer, ukulinganiselwa okungokwenyama kwemishini esekelwe ekuthinteni sekuyinkinga enkulu. Njengoba abaholi bemboni befuna ukusheshisa kanye nesinqumo esiphezulu ku-lithography ye-semiconductor kanye nokuhlolwa kwezindiza, ukuthembela kubuchwepheshe obuthuthukisiwe bokuthwala umoya kushintshe kusuka ekubeni yinto yokunethezeka kuya ekubeni nesidingo sezimboni. Ukuqonda izinhlobo ezahlukene zama-air bearings kanye nesici esibalulekile sokuqina komhlahlandlela wokuthwala umoya kubalulekile kunoma yimuphi unjiniyela oklama isizukulwane esilandelayo sezinhlelo zomhlahlandlela wokuhamba eziqondile.
Ukuqonda Izinhlobo Eziyinhloko Zama-Air Bearings
Ubuchwepheshe bokuthwala umoya busebenza ngesimiso sefilimu encane kakhulu yomoya ocindezelwe esekela umthwalo, iqeda ngempumelelo ukungqubuzana, ukuguguleka, kanye nokukhiqizwa kokushisa okuhlobene nama-bearings omshini. Kodwa-ke, indlela yokusatshalaliswa komoya ichaza izici zokusebenza kwe-bearings.
Ama-Porous Media Air Bearings avame ukubhekwa njengendinganiso yegolide yokusatshalaliswa kwengcindezi efanayo. Ngokusebenzisa izinto ezinezimbobo—ngokuvamile i-carbon noma i-ceramics ekhethekile—umoya uphoqeleka ukungena ezigidini zemigodi engaphansi kwe-micron. Lokhu kuphumela kufilimu yomoya eqinile kakhulu engathandi ukudlidliza futhi enikeza ukudambisa okungcono.
Ama-Orifice Air Bearings asebenzisa imigodi noma imigoqo efakwe ngomshini ngqo ukusabalalisa umoya. Nakuba lokhu kuvame ukuba lula kakhulu ukukukhiqiza, kudinga ubunjiniyela bochwepheshe ukuphatha "isinxephezelo sokucindezela" esidingekayo ukuvimbela ukungazinzi ngesivinini esiphezulu.
Ama-Flat Pad Air Bearings ayizinsika ezisebenza kakhulu zezinhlelo zokuqondisa ukunyakaza eziqondile. Lawa avame ukufakwa ngamabili aphikisanayo ukuze "alayishe kusengaphambili" isitimela se-granite, anikeze ukuqina okulinganiselwe okuphezulu ngezindlela eziningi.
Ama-Rotary Air Bearings ahlinzeka ngokunyakaza kwamaphutha okungenaziro kwezinhlelo zokusebenza ezifana ne-goniometry noma ukuhlolwa kwe-spindle. Amandla awo okugcina i-axis ejikelezayo engaguquki ngaphandle "kokuduma" kwama-ball bearings awenza abaluleke kakhulu ekugxilweni kwe-optical.
Isilinganiso Sobunjiniyela Sempumelelo: Umhlahlandlela Wokuthwala Umoya Ukuqina
Enye yemibono eyiphutha evame kakhulu ku-metrology ukuthi ama-air bearing “athambile” uma kuqhathaniswa nama-mechanical rollers. Eqinisweni, ukuqina kwesiqondiso sesimanje se-air bearing kungadlula okwezinhlelo ze-mechanical uma kuklanywe kahle.
Ukuqina ohlelweni lokuthwala umoya kubhekisela ekushintsheni kobukhulu befilimu yomoya ngenxa yoshintsho lomthwalo. Lokhu kufezwa “ngokulayisha kusengaphambili.” Ngokusebenzisa omakethi noma ingcindezi ye-vacuum—noma ngokubamba isitimela se-granite esinama-air pad aphikisanayo—onjiniyela bangacindezela ifilimu yomoya. Njengoba ifilimu iba mncane, ukumelana kwayo nokucindezelwa okuqhubekayo kuyanda kakhulu.
Ukuqina okuphezulu kubalulekile ngoba kunquma imvamisa yemvelo yesistimu kanye nekhono layo lokumelana nokuphazamiseka kwangaphandle, njengamandla akhiqizwa yinjini eqondile eshesha kakhulu. Kwa-ZHHIMG, sisebenzisa i-computational fluid dynamics (CFD) ukuze sithuthukise igebe phakathi kwe-bearing kanye ne-umhlahlandlela we-granite, ukuqinisekisa ukuthi ukuqina kwandiswa ngaphandle kokubeka engcupheni isimo sokunyakaza esingenakho ukungqubuzana.
Ukuvela Kwezinhlelo Zomhlahlandlela Wokuhamba Okuqondile
Ukuhlanganiswa kwama-air bearings ezinhlelweni zomhlahlandlela wokunyakaza okuqondile kuchaze kabusha ukwakheka kwemishini yesimanje. Ngokwesiko, umhlahlandlela oqondile wawuhlanganisa isitimela sensimbi kanye nenqola yebhola ejikelezayo. Nakuba ziqinile, lezi zinhlelo zihlushwa “ukugoba” kanye nokwanda kokushisa.
Uhlelo lwesimanje, olunembe kakhulu lokuqondisa oluqondile manje luvame ukuba nogongolo lwe-granite, oluhlinzeka ngokuthamba okudingekayo kanye ne-inertia yokushisa, oluhambisana nenqola yokuthwala umoya. Le nhlanganisela ivumela:
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Akukho ukungqubuzana okungaguquki (ukuqina), okuvumela ukunyakaza okukhuphukayo okuncane kakhulu.
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Ukuphila okungenamkhawulo, njengoba kungekho ukuguguleka komshini phakathi kwezingxenye.
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Izakhiwo zokuzihlanza, njengoba ukuphuma komoya njalo kuvimbela uthuli ukuthi lungene esikhaleni sokuthwala.
Indima Yabakhiqizi Bobuchwepheshe Bokuthwala Umoya Embonini 4.0
Ukukhetha phakathi kwabakhiqizi bobuchwepheshe bokuthwala umoya kuhilela ukuhlola okungaphezu nje kwe-bearing uqobo. Ukuqaliswa okuphumelelayo kakhulu yilabo abaphatha i-bearing, i-guide rail, kanye nesakhiwo sokusekela njengohlelo olulodwa, oluhlanganisiwe.
Njengomkhiqizi okhethekile, i-ZHHIMG Group ihlanganisa igebe phakathi kwesayensi yezinto ezibonakalayo kanye ne-fluid dynamics. Singochwepheshe ekwakhiweni kwezingxenye ze-granite ezisebenza "njengomzila" walezi zithombe zomoya. Ngenxa yokuthi i-air bearing inembe njengobuso obundiza phezu kwayo, ikhono lethu lokugoqa i-granite liye emazingeni okulala angaphansi kwe-micron yilokho okuvumela izinhlelo zethu zokunyakaza eziqondile ukuthi zifinyelele ukuphindaphindwa kwezinga le-nanometer.
Isidingo salezi zinhlelo siyanda emkhakheni wokuhlola we-semiconductor, lapho ukuthuthela kuma-node angu-2nm kanye no-1nm kudinga izigaba ezingahamba ngaphandle kokudlidliza nhlobo. Ngokufanayo, emkhakheni wezindiza, ukulinganiswa kwezingxenye ezinkulu ze-turbine kudinga umthamo we-granite osindayo kanye nokuthinta okubucayi kwama-probe asekelwa umoya.
Isiphetho: Ukubeka Indinganiso Yokuhamba Koketshezi
Ushintsho oluvela ekuxhumekeni komshini kuya ekusekelweni kwefilimu yoketshezi lumelela ushintsho oluyisisekelo kubunjiniyela bemishini. Ngokuqonda amandla athile ezinhlobo ezahlukene zama-air bearings nokugxila ekubalulekeni okubalulekileukuqina komhlahlandlela wokuthwala umoya, abakhiqizi bangafinyelela amazinga okunemba okwakucatshangwa ukuthi akunakwenzeka.
Kwa-ZHHIMG, sizibophezele ekubeni ngaphezu nje komhlinzeki wezingxenye. Singumlingani ekuqondeni, sinikeza izisekelo eziqinile kanye nobuchwepheshe obusezingeni eliphezulu bokuthwala umoya obudingekayo ukuze kuqhutshwe ikusasa lokusungula izinto ezintsha emhlabeni wonke. Lapho ukunyakaza kungabi nokungqubuzana, amathuba okunemba aba angenamkhawulo.
Isikhathi sokuthunyelwe: Jan-22-2026