Iplathifomu yegwadle, njengethuluzi lereferensi lokulinganisa okunembile nokucubungula, ukugcinwa kwayo okunembayo kuthinta ngqo ikhwalithi yokukhiqiza. Okulandelayo kunikeza uhlelo lokunakekela oluhlelekile oluhlanganisa ukulawulwa kwemvelo, ukunakekelwa kwansuku zonke nokulinganisa okuphrofeshinali ukuze kuqinisekiswe ukuthi inkundla igcina ukunemba kwezinga le-nanometer isikhathi eside.
1. Ukulawulwa Kwemvelo: Yakha umgoqo wokuvikela onembayo
Ukulawulwa kwezinga lokushisa nomswakama
Izinga lokushisa lendawo yokusebenza lidinga ukuzinza libe ngu-20±1℃. Konke ukushintshashintsha okungu-1℃ kuzodala ukuwohloka kokushisa kweplathifomu yegwadle kokuthi 0.5-1μm/m. Isistimu yokushisa engaguquki ingafakwa endaweni yokusebenzela ukuze kuvinjwe izindawo zokupholisa umoya ukuba ziphephethe ngqo endaweni yesikhulumi.
Umswakama kufanele ulawulwe phakathi kuka-40% no-60%. Umswakama owedlulele ungabangela kalula ukugqwala ezingxenyeni zensimbi, kuyilapho umswakama ophansi kakhulu ungase ubangele ukuphazamiseka kukagesi omile esilinganisweni.
Ukwehlukaniswa kokudlidliza
Ipulatifomu kufanele igcinwe kude nemithombo yokudlidliza njengemishini yokugxiviza nemishini yokugaya. Kunconywa ukugcina ibanga elingaphezu kwamamitha ama-3 ukusuka kumishini yokudlidliza.
Uma ukudlidliza kungenakugwenywa, ama-absorber okwethuka kwe-air spring angafakwa phansi kweplathifomu ukuze kuncishiswe umthelela wokudlidliza kwemvelo endaweni flatness yesikhulumi (okunganciphisa ukudlidliza kwangaphandle ngaphezu kuka-80%).
2. Isondlo sansuku zonke: Ukulawula ngokucophelela ukusuka ekuhlanzeni kuya ekuvikelweni
Ukucaciswa kokuhlanza ubuso
Ukususa uthuli: Sula indawo engaphezulu ngesikhumba senyamazane noma ngendwangu engenalutho endaweni efanayo nsuku zonke ukuze uvimbele izinhlayiya zothuli (≥5μm) ukuthi zingaklwebheli iplatifomu. Amabala anenkani angasulwa ngobumnene nge-ethanol engenamanzi (ubumsulwa ≥99.7%). Izinyibilikisi ezinamandla njenge-acetone akufanele zisetshenziswe.
Ukwehlisa amafutha: Uma ihlangana namabala kawoyela, isule ngesihlanzi esihlanjululwe esingathathi hlangothi, bese ugeza ngamanzi angcolile futhi wome ngomoya ukuze uvimbele uwoyela wamaminerali ukuthi ungangeni ezimbotsheni ezincane zeplatifomu.
Ukuvikelwa komthwalo nokushayisana
Umthamo wokuthwala umthwalo weplatifomu kufanele ulawulwe ngaphakathi kwe-70% yomthwalo olinganiselwe (isibonelo, yesikhulumi se-1000kg, kunconywa ukuthi umthwalo ube ≤700kg) ukuze ugweme ukuguqulwa okuhlala njalo okubangelwa ukugcwala kwendawo.
Akuvunyelwe ngokuphelele ukushaya ama-workpieces endaweni yesikhulumi. Lapho uphatha amathuluzi, gqoka amagilavu athambile ukuze uvimbele izinto ezicijile ukuthi zinganwaya indawo engaphezulu (ukuklwebheka okunokujula okungaphezu kuka-20μm kuzothinta ukukalwa kwendlela yokukhanya ebonisiwe).
3. Ukulinganisa Okuphrofeshinali: Umongo wokugcina ukunemba ngokwesayensi
Ukulungiselelwa komjikelezo wokulinganisa
Izimo zokusetshenziswa ezivamile: Linganisa kanye ngekota futhi usebenzise i-laser interferometer ukuze uthole ukucaba (ngokunemba okungu-±0.5μm/m).
Ukusetshenziswa kwemvamisa ephezulu noma izindawo ezinokhahlo: Ukulinganisa kwanyanga zonke, ngokugxila ekuqapheni izindawo ezizwelayo kukushisa (njengomphetho weplatifomu eduze nemithombo yokushisa).
Ukucubungula kwangemuva kokulinganisa
Uma ukuchezuka kokucaba kutholakala (okufana > ±1μm/m), kufanele kugaywe futhi kulungiswe uchwepheshe ochwepheshile osebenzisa i-W1.5 micro-powder. Ukuzigaya nge-sandpaper akuvunyelwe ngokuphelele.
Ngemva kokulinganisa, idatha kufanele irekhodwe futhi ifakwe kungobo yomlando, futhi kufanele kusungulwe ijika lokunemba lenkundla ukuze libikezele izidingo zokunakekela kusenesikhathi.
4. Isitoreji Nezokuthutha: Gwema ukulahlekelwa ukunemba okufihliwe
Amaphuzu abalulekile okugcina isikhathi eside
Lapho uyigcina, kufanele imbozwe ngesembozo esivikela umswakama futhi singangeni uthuli. Okuphansi kufanele kusekelwe amaphuzu amathathu (iphoyinti lokusekela litholakala ku-2/9 wobude beplathifomu) ukuvimbela ukugoba kokugoba okubangelwa amandla adonsela phansi (iplathifomu engamamitha angu-1 ingase ihlehle ngo-0.3μm ngenxa yokusekelwa kwephuzu elilodwa lesikhathi eside).
Hambisa indawo yamaphoyinti okusekela yesikhulumi njalo (nyanga zonke) ukuze ugweme ingcindezi yendawo yesikhathi eside.
Uhlelo lokuvikela ezokuthutha
Izinto zokuhamba ezihamba ibanga elifushane: Goqa ngegwebu elimunca ukushaqeka, lungisa ngaphakathi kohlaka oluqinile, futhi ugcine ukusheshisa ngaphakathi kuka-2g.
Ukuhamba ngebanga elide: Kudingeka kufakwe i-vacuum futhi igcwaliswe nge-nitrogen eyomile. Ngemva kokufika, kufanele iyekwe ime amahora angu-24 kuze kube yilapho izinga lokushisa lifinyelela esilinganisweni ngaphambi kokuqaqa ukuze kuvinjwe amanzi okujiya angathinti ukunemba.
5. Ukubikezela Iphutha: Amasu Okubona Izinkinga Zakuqala
Ukuhlola okubonakalayo: Hlala ubheka indawo engaphezulu ngengilazi yokukhulisa engu-40x. Uma imihuzuko eqhubekayo noma ukwehla okuphawulekayo kwe-gloss kutholakala, kungase kubonise ukwehla kokunemba.
Ukutholwa komsindo: Thepha inkundla kahle. Uma umsindo uba nomsindo (ngokuvamile kufanele kube umsindo ocacile), kungase kube nokuqhekeka okuncane ngaphakathi. Yeka ukuyisebenzisela ukutholwa ngokushesha.
Ngalolu hlelo lokulungisa, iplatifomu ye-granite ye-ZHHIMG® ingagcina isicaba esingu-±1μm/m iminyaka engu-10, okungaphezu kokuphindwe kathathu kunesikhathi sokunemba sempilo yamapulatifomu anganakekelwa kahle. Ukuzijwayeza kufakazele ukuthi ngemuva kwefekthri ethile ye-semiconductor yamukele lesi sixazululo, imvamisa yokulinganisa yesikhulumi sehliswe ngo-50%, futhi izindleko zonyaka zokulungisa zongiwe ngamayuan angaphezu kuka-150,000.
Isikhathi sokuthumela: Jun-18-2025