Ezweni elincintisana kakhulu lokukhiqiza izibonisi ezithuthukisiwe, umehluko phakathi kobuholi bemakethe kanye nokuphelelwa yisikhathi uvame ukwehla ngesici esisodwa: ukunemba. Ukwenziwa nokuhlolwa kwama-array e-Low-Temperature Polycrystalline Silicon (LTPS)—isisekelo sezikrini ze-OLED ne-LCD ezinesinqumo esiphezulu, ezisebenza kahle kakhulu—kudinga ukubekezelelana okusunduza imingcele yobunjiniyela. Ukufeza leli zinga eliphakeme kakhulu lokunemba kuqala ngesisekelo esibonakalayo semishini uqobo. Yingakho ukukhethwa kwesisekelo somshini we-granite semishini ye-LTPS Array kungeyona nje ukukhetha kokuklama, kodwa kuyimfuneko eyisisekelo.
Izinqubo ezihilelekile ekwakhiweni kwe-LTPS array, ikakhulukazi i-laser crystallization kanye nezinyathelo ezilandelayo ze-photolithography kanye ne-deposition, zizwela kakhulu umsindo wezemvelo, okuhlanganisa ukudlidliza okucashile kanye nokushintsha kokushisa. Ngisho nasendaweni yokuhlanza elawulwa ngokucophelela kakhulu, izinguquko ezincane zingathinta kakhulu ukukhiqizwa kanye nokufana kwe-array. Isigaba sokuhlola—esenziwa imishini eyinkimbinkimbi kakhulu ukuqinisekisa ukuthi yonke i-transistor yakheke kahle—sidinga izinga elikhulu kakhulu lobuqotho besakhiwo. Lesi yisizinda lapho isisekelo somshini we-Granite se-Flat panel display low-temperature polysilicon array yokuhlola imishini iphumelela ngempela.
Ukubaluleka Kokushisa Nokuguquguquka Kokuhlolwa kwe-LTPS
Ubuchwepheshe be-LTPS buvumela ukuhamba kwama-electron okusheshayo, okwenza kube lula ama-transistors amancane, asebenza kahle futhi kuholele ekubonisweni ngamazinga okuvuselela amangalisayo kanye nokusetshenziswa kwamandla okuphansi. Kodwa-ke, izakhiwo ezihilelekile zincane kakhulu, zilinganiswa ngama-micron. Ukuze imishini yokuhlola eyinkimbinkimbi ithole, ilinganise, futhi ihlaziye amaphutha ngokunembile, ipulatifomu yayo yokusebenza kumele ingabi nakunyakaza futhi ingaguquguquki ngosayizi.
Izinto zendabuko ezifana nensimbi ephothiwe noma insimbi, yize ziqinile, zisengozini yokwanda kokushisa ngokwemvelo. I-coefficient of thermal expansion (CTE) yensimbi evamile iphakeme kakhulu kuneye-granite emnyama. Lokhu kusho ukuthi ukwenyuka okuncane kokushisa okuzungezile, mhlawumbe idigri elilodwa noma amabili, kuzokwenza isakhiwo somshini wensimbi sande futhi sinciphe kakhulu. Emongweni wokuhlolwa kwe-array, lokhu kushintshashintsha kokushisa kubangela amaphutha endawo, ukungalungi kahle endleleni yokukhanya, kanye nokufundwa okungase kube okungalungile okungaholela ekwenqatshweni kwamaphaneli amahle noma ukwamukelwa kwalawo anephutha.
Ngakolunye uhlangothi, ukusetshenziswa kombhede womshini we-granite okhethekile wemishini ye-LTPS Array kunikeza ipulatifomu ene-CTE ephansi kakhulu. Lokhu kuzinza kokushisa kuqinisekisa ukuthi i-geometry ebalulekile yomshini—ibanga eliphakathi kwenzwa yokulinganisa kanye ne-substrate ye-LTPS—ihlala ingaguquki, okuvumela ukulinganiswa kwe-sub-micron okuhambisanayo nokuphindaphindekayo okubalulekile ekulawulweni kwekhwalithi.
Ukunciphisa Nokuqina Kokudlidliza Okungalingani
Ngale kokuqina kokushisa, izakhiwo zezinto ezibonakalayo ze-granite zinikeza inzuzo enkulu ekuphatheni amandla aguquguqukayo nokudlidliza. Izinhlelo zokuhlola ezithuthukisiwe zisebenzisa izigaba zesivinini esikhulu kanye nezindlela zokuskena eziyinkimbinkimbi ezikhiqiza ukunyakaza okuncane kwemishini nokudlidliza. Lawa mandla angaphakathi, ahlanganiswe nomsindo wangaphandle ovela kubaphathi bomoya noma imishini eseduze, kumele asuswe ngokushesha ukuze kuvinjelwe ukufiphala kokunyakaza noma ukungahlaliseki kokufunda.
Umthamo ophezulu wokunciphisa umswakama wangaphakathi we-Granite, okuyisici esivumela ukuthi ichithe amandla okudlidliza ngokushesha kakhulu kunezinsimbi, ubalulekile lapha. Isebenza njengesivimbeli sokushaqeka esingasebenzi, iqinisekisa ukuthi umshini ubuyela esimweni sokuthula okuphelele ngemva kokunyakaza ngakunye. I-modulus ephezulu yokuguquguquka kanye nobuningi betshe nayo inegalelo esakhiweni esiqinile kakhulu, inciphisa ukuphambuka okungaguquki ngaphansi kwesisindo sezinhlelo ze-gantry ezisindayo, izinhlangano ze-optical, kanye namakamelo okuhlanza.
Empeleni, ngokukhetha isisekelo somshini we-granite esiqediwe kahle sezinhlelo zokusebenza ze-LTPS Array, onjiniyela basungula isisekelo esizinzile ngokushisa, esithule ngomsindo, futhi esiqinile ngokwesakhiwo. Lokhu kuhlukaniswa kwezakhiwo ezintathu akunakuxoxiswana ngakho ukuze kufezwe imigomo yokukhiqiza kanye neyokukhiqiza edingekayo ekukhiqizweni kwezibonisi ze-LTPS zanamuhla.
Ukuphelela Kobunjiniyela Okuvela Emvelweni
Umkhiqizo wokugcina—isisekelo somshini we-granite—uqhelelene kakhulu netshe eliyinkangala eliyinqaba. Ungumsebenzi wobuciko we-metrology, ovame ukuqedwa ngokulingana okulinganiselwe ku-low-micron range noma ngisho ne-sub-micron. Kusetshenziswa amasu akhethekile ukuqinisekisa ukuthi i-granite ikhululeka ekucindezelekeni futhi ithambile ngokuphelele. Le nto yemvelo ehlanjululwe kakhulu inikeza indawo yokugcina yokubhekisela lapho konke ukuvumelanisa kwemishini nokukhanya okulandelayo kulinganiswa khona.
Kubakhiqizi bemishini ye-LTPS array, ukuhlanganiswa kwe-granite enembile kakhulu kuqinisekisa ukuthi imishini yabo ingasebenza ngokuqhubekayo ekusebenzeni okuphezulu, okuhunyushwa ngqo ekukhiqizeni okuphezulu kanye nokuboniswa kwekhwalithi engcono emakethe yabathengi. Kuwubufakazi beqiniso lokuthi lapho ubunjiniyela bufuna ukuphelela okuphelele, ukubheka ezintweni zemvelo ezizinzile kakhulu emhlabeni kunikeza ikhambi elithembeke kakhulu.
Isikhathi sokuthunyelwe: Disemba-03-2025