Ingabe Amapulatifomu Okucacisa I-Granite Angaba Nezimpawu Zomphezulu?

Lapho kufakwa ipulatifomu yokunemba kwe-granite ye-metrology noma i-assembly esezingeni eliphezulu, amakhasimende avame ukubuza: singakwazi yini ukwenza ngokwezifiso ubuso ngezimpawu—njengemigqa yokuxhumanisa, amaphethini egridi, noma amaphuzu athile okubhekisela? Impendulo, evela kumkhiqizi onembile kakhulu njenge-ZHHIMG®, inguyebo oqinisekile, kodwa ukusetshenziswa kwalezi zimpawu kuyikhono elicashile elidinga ubuchwepheshe ukuqinisekisa ukuthi izimpawu zithuthukisa, kunokuba zinciphise, ukunemba okuyinhloko kwepulatifomu.

Inhloso Yokumaka Okuphezulu Okunembile

Kumapuleti amaningi ajwayelekile omhlaba we-granite noma izisekelo zomshini, umgomo oyinhloko ukufeza ukuthamba okuphezulu kakhulu kanye nokuqina kwejometri. Kodwa-ke, kuzinhlelo zokusebenza ezifana nama-jig okuhlanganisa amakhulu, iziteshi zokulinganisa, noma ukusethwa kokuhlola ngesandla, izinsiza ezibonakalayo nezingokwenyama ziyadingeka. Ukumaka kobuso kufeza imisebenzi eminingana ebalulekile:

1. Iziqondiso Zokuqondanisa: Ukunikeza imigqa yokubhekisela esheshayo nebonakalayo yokubeka kahle izinto noma izingxenye ngaphambi kokufaka izigaba zokulungisa okuncane.
2. Izinhlelo Zokuhlanganisa: Ukusungula igridi yokuhlanganisa ecacile, yokuqala (isb., ama-axes e-XY) angalandeleka endaweni ephakathi noma kudatha yomkhawulo.
3. Izindawo Ezingadingi Ukusetshenzwa: Ukumaka izindawo lapho imishini kungafanele ibekwe khona ukuze kulondolozwe ibhalansi noma kuvinjelwe ukuphazamiseka kwezinhlelo ezihlanganisiwe.

Inselele Yokunemba: Ukumaka Ngaphandle Kokulimaza

Ubunzima obukhona buseqinisweni lokuthi noma iyiphi inqubo esetshenziswa ukufaka izimpawu—ukuqopha, ukupenda, noma ukukhanda—akumelwe iphazamise ukuthamba kwe-sub-micron noma i-nanometer osekufezwe yinqubo eqinile yokugoqa nokulinganisa.

Izindlela zendabuko, njengokuqopha okujulile noma ukubhala, zingaletha ukucindezeleka kwendawo noma ukuphambuka kobuso, okwehlisa ukunemba okuklanyelwe ukuletha i-granite. Ngakho-ke, inqubo ekhethekile esetshenziswa yi-ZHHIMG® isebenzisa izindlela eziklanywe ukunciphisa umthelela:

• Ukuqopha/Ukuqopha Okungajulile: Izimpawu zivame ukusetshenziswa ngokuqopha okuqondile, okungajulile—ngokuvamile okungaphansi kuka-±0.1 mm ukujula. Lokhu kujula kubalulekile ngoba kuvumela umugqa ukuthi ubonakale futhi uthinteke ngaphandle kokunciphisa kakhulu ukuqina kwesakhiwo se-granite noma ukuphambukisa ukuthamba okuphelele.
• Ama-Filler Akhethekile: Imigqa eqoshiwe ivame ukugcwaliswa nge-epoxy noma upende ohlukile, one-viscosity ephansi. Lokhu kugcwalisa kwenzelwe ukupholisa ubuso be-granite, ukuvimbela ukumakwa ngokwako ekubeni yindawo ephezulu engaphazamisa ukulinganisa okulandelayo noma izindawo zokuthintana.

Ukunemba Kwezimpawu vs. I-Platform Flatness

Kubalulekile ukuthi onjiniyela baqonde umehluko phakathi kokunemba kokusicaba kwepulatifomu kanye nokunemba kokubekwa kwezimpawu:

• Ukuthamba Kweplatifomu (Ukunemba Kwejiyomethri): Lesi yisilinganiso sokugcina sokuthi ubuso buhlelwe kahle kangakanani, ngokuvamile siqinisekiswa ezingeni le-sub-micron, siqinisekiswa yi-laser interferometers. Lena yindinganiso yokubhekisela eyinhloko.
• Ukunemba Kokumaka (Ukunemba Kwesikhundla): Lokhu kubhekisela ekutheni umugqa othile noma iphuzu legridi libekwa ngokunembile kangakanani maqondana nemiphetho yedatha yesikhulumi noma iphuzu eliphakathi. Ngenxa yobubanzi obungokwemvelo bomugqa ngokwawo (ovame ukuba cishe ngu-±0.2mm ukuze kubonakale) kanye nenqubo yokukhiqiza, ukunemba kwesimo sokumakwa kuvame ukuqinisekiswa ekubekezeleleni okungu-± 0.1 mm kuya ku-± 0.2 mm.

Nakuba lokhu kunemba kwendawo kungase kubonakale kukhululekile uma kuqhathaniswa nokusicaba kwe-nanometer kwe-granite uqobo, izimpawu zenzelwe ukubhekisela nokusethwa okubonakalayo, hhayi ukulinganisa kokugcina kokunemba. Ubuso be-granite ngokwalo buhlala buyinkomba yokunemba eyinhloko, engaguquki, futhi ukulinganisa kokugcina kufanele kuthathwe njalo kusetshenziswa amathuluzi okukala abhekisela ku-flat plane eqinisekisiwe yepulatifomu.

Ekuphetheni, izimpawu zobuso ezenziwe ngokwezifiso epulatifomu yegranite ziyisici esibalulekile sokuthuthukisa ukuhamba komsebenzi kanye nokusetha, futhi zingenziwa ngaphandle kokuphazamisa ukusebenza kahle kwepulatifomu. Kodwa-ke, kumele zichazwe futhi zisetshenziswe ngumkhiqizi ochwepheshe, oqinisekisa ukuthi inqubo yokumaka ihlonipha ubuqotho obuyisisekelo besisekelo segranite esinobukhulu obuphezulu kakhulu.