Emkhakheni wokukhiqiza okunembayo nocwaningo lwesayensi, ukucaba kwezinkundla zegwadle kuyinkomba ebalulekile yokuqinisekisa ukunemba kwezinto zokusebenza. Okulandelayo yisingeniso esiningiliziwe sezindlela ezimbalwa zokuhlonza ezijwayelekile kanye nezinqubo zazo zokusebenza kuwe. .
I. Indlela yokutholwa kwe-laser interferometer
I-laser interferometer iyithuluzi elincanyelwayo lokuthola ukunemba okuphezulu. Thatha i-ZYGO GPI XP laser interferometer njengesibonelo, ukulungiswa kwayo kungafinyelela ku-0.1nm. Lapho uqhuba ukutholwa, qala ngokuqondanisa umthombo wokukhanya we-interferometer neplathifomu bese uhlukanisa indawo yesikhulumi ibe izindawo zegridi ezingu-50mm×50mm. Ngokulandelayo, idatha yokuphazamiseka kokuphazamiseka yaqoqwa iphoyinti nephoyinti, futhi idatha yafakwa futhi yahlaziywa kusetshenziswa i-Zernike polynomial ukuze kutholwe iphutha lokucaba. Le ndlela iyasebenza kumaplathifomu anembe kakhulu futhi ingathola amaphutha okucaba okungu-≤0.5μm/m². Ivamise ukusetshenziswa ekutholweni kwemishini ye-photolithography kanye namapulatifomu emishini yokulinganisa amathathu asezingeni eliphezulu. .
Ii. Indlela ye-Electronic Level Array
Ukutholwa kwezinga le-electronic array kulula ukuyisebenzisa futhi kusebenza kahle kakhulu. Izinga likagesi le-TESA A2 (elinokulungiswa okungu-0.01μm/m) likhethiwe futhi lahlelwa ngohlelo oluyi-9×9 ngokuhambisana nesiqondiso se-eksisi ye-X/Y yesikhulumi. Ngokuqoqa ngokuvumelanisa idatha yokuthambekela yezinga ngalinye bese usebenzisa indlela encane yesikwele ukuze kubalwe, inani lokucaba lingatholwa ngokunembile. Le ndlela ingakwazi ukukhomba ngokuphumelelayo izimo ze-concavity zendawo kanye ne-convexity yesikhulumi. Isibonelo, ukushintshashintsha okungu-0.2μm phakathi kwebanga elingu-50mm nakho kungatholwa, okufanele ukutholwa ngokushesha ekukhiqizweni okukhulu. .
Iii. Indlela ye-Optical Flat crystal
Indlela ye-crystal flat optical ifanele ukutholwa kwamapulatifomu wendawo encane. Namathisela i-optical flat crystal ngokuqinile endaweni ukuze ihlolwe endaweni futhi ubuke iziphazamiso ezikhona phakathi kwazo ngaphansi kokukhanya komthombo wokukhanya we-monochromatic (njengelambu le-sodium). Uma imithende inemigqa eqondile ehambisanayo, lokho kubonisa ukucaba okuhle. Uma kuvela imigqa egobile, bala iphutha lokucaba ngokususelwe kuzinga lokugoba komugqa. Umugqa ngamunye ogobile umele umehluko wobude ongu-0.316μm, futhi idatha yokucaba ingatholwa ngokuguqulwa okulula. .
Ezine. Indlela yokuhlola umshini wokulinganisa odidiyelwe kathathu
Umshini wokulinganisa wezixhumanisi ezintathu ungafinyelela ukunemba okuphezulu endaweni enezinhlangothi ezintathu. Beka iplatifomu yegwadle kuthebula lokusebenza lomshini wokulinganisa futhi usebenzise i-probe ukuze uqoqe idatha ngokulinganayo ezindaweni eziningi zokulinganisa endaweni yesikhulumi. Isistimu yomshini wokulinganisa icubungula futhi ihlaziye le datha ukuze ikhiqize umbiko wokucaba kwenkundla. Le ndlela ayikwazi nje ukubona isicaba, kodwa futhi ithole amanye amapharamitha we-geometric yesikhulumi ngesikhathi esisodwa, futhi ifanele ukutholwa okuphelele kwamapulatifomu amakhulu e-granite. .
Ukwenza lezi zindlela zokuhlonza kahle kungakusiza ukuthi uhlole ngokunembile ukunemba kweplathifomu yegwadle futhi unikeze isiqinisekiso esinokwethenjelwa sokusebenza okuzinzile kwemishini enembayo.
Isikhathi sokuthumela: May-29-2025