Emikhakheni yokukhiqiza ngokunemba kanye nocwaningo lwesayensi, ukuba yisicaba kwamapulatifomu okunemba kwe-granite kuyisibonakaliso esibalulekile sokuqinisekisa ukunemba kwemishini. Okulandelayo isingeniso esinemininingwane yezindlela eziningana zokuthola ezivamile kanye nezinqubo zazo zokusebenza kuwe.
I. Indlela yokuthola i-interferometer ye-laser
I-laser interferometer iyithuluzi elithandwayo lokuthola ukuthambeka okunembe kakhulu. Thatha i-ZYGO GPI XP laser interferometer njengesibonelo, isinqumo sayo singafinyelela ku-0.1nm. Uma uqhuba ukutholwa, qala uvumelanise umthombo wokukhanya we-interferometer neplatifomu bese uhlukanisa ubuso beplatifomu ezindaweni zegridi ezingama-50mm×50mm. Ngemva kwalokho, idatha ye-interference fringe yaqoqwa iphuzu ngephuzu, futhi idatha yafakwa futhi yahlaziywa kusetshenziswa i-Zernike polynomial ukuthola iphutha lokuthambeka. Le ndlela isebenza kumapulatifomu anembe kakhulu futhi ingathola amaphutha okuthambeka angama-≤0.5μm/m². Ivame ukusetshenziswa ekutholeni imishini ye-photolithography kanye namapulatifomu omshini wokulinganisa ama-three-coordinate aphezulu.
Ii. Indlela ye-Electronic Level Array
Ukutholwa kwe-array yezinga le-elekthronikhi kulula ukuyisebenzisa futhi kusebenza kahle kakhulu. Izinga le-elekthronikhi le-TESA A2 (elinokulungiswa okungu-0.01μm/m) likhethiwe futhi lahlelwa ku-array engu-9×9 eceleni kokuqondisa kwe-X/Y axis yepulatifomu. Ngokuqoqa idatha yokuthambekela yezinga ngalinye bese kusetshenziswa indlela yesikwele esincane kakhulu yokubala, inani lokuthamba lingatholakala ngokunembile. Le ndlela ingahlonza ngempumelelo izimo zokuqina kwendawo kanye nokuqina kwepulatifomu. Isibonelo, ukuguquguquka okungu-0.2μm ngaphakathi kobubanzi obungu-50mm nakho kungatholakala, okufanele ukutholwa okusheshayo ekukhiqizweni okukhulu.
Iii. Indlela yekristalu ecwebezelayo
Indlela yekristalu eyisicaba ekhanyayo ifaneleka ekutholeni amapulatifomu endawo amancane. Namathisela ikristalu eyisicaba ekhanyayo ngokuqinile ebusweni ukuze ihlolwe epulatifomu bese ubona imiphetho yokuphazamiseka eyakhiwe phakathi kwayo ngaphansi kokukhanya komthombo wokukhanya we-monochromatic (njengesibani se-sodium). Uma imivimbo iyimigqa eqondile ehambisanayo, ikhombisa ukuthamba okuhle. Uma kuvela imivimbo egobile, bala iphutha lokuthamba ngokusekelwe ezingeni lokugoba kwemivimbo. Imivimbo ngayinye egobile imele umehluko wokuphakama ongu-0.316μm, futhi idatha yokuthamba ingatholakala ngokuguqulwa okulula.
Indlela yokuhlola yomshini wokulinganisa ohlanganisa izinhlangothi ezintathu.
Umshini wokulinganisa ohlanganisa izinto ezintathu ungafinyelela ukulinganisa okunembe kakhulu esikhaleni esinezinhlangothi ezintathu. Beka ipulatifomu yegranite etafuleni lokusebenza lomshini wokulinganisa bese usebenzisa i-probe ukuqoqa idatha ngokulinganayo kusuka ezindaweni eziningi zokulinganisa ebusweni bepulatifomu. Uhlelo lomshini wokulinganisa lucubungula futhi luhlaziye le datha ukuze lukhiqize umbiko wokuba yisicaba wepulatifomu. Le ndlela ayikwazi ukubona kuphela ukuba yisicaba, kodwa futhi ithole nezinye izilinganiso zejometri zepulatifomu ngesikhathi esisodwa, futhi ifanele ukutholwa okuphelele kwamapulatifomu amakhulu egranite.
Ukwazi lezi zindlela zokuthola kungakusiza ukuthi uhlole ngokunembile ukuthi ipulatifomu yokucacisa ye-granite ithambile futhi ikunikeze isiqinisekiso esithembekile sokusebenza okuzinzile kwemishini yokucacisa.
Isikhathi sokuthunyelwe: Meyi-29-2025