Emkhakheni wokukhiqiza okusezingeni eliphezulu kanye nocwaningo lwesayensi olusezingeni eliphezulu, imojuli yokunyakaza yokunemba kwe-ultra-precision ye-air float isibe isisetshenziswa esibalulekile sokusebenza kahle nokulinganisa ngokusebenza kwayo okunembayo okuhle kakhulu. Isisekelo se-granite sokunemba, njengesisekelo sokusekela, sinezidingo eziqinile zendawo yokusebenza, futhi izimo zemvelo ezifanele ziyisisekelo sokuqinisekisa ukusebenza kwayo okuzinzile kanye nomphumela omuhle kakhulu.
Okokuqala, ukulawula izinga lokushisa: ukunemba "i-stabilizer"
Nakuba i-granite yaziwa ngokuzinza kwayo, ayivikelekile ngokuphelele ekushintsheni kwezinga lokushisa. Nakuba i-coefficient yayo yokunwetshwa kwe-thermal iphansi, ngokuvamile i-5-7 × 10⁻⁶/℃, kuzimo zokulawula ukunyakaza okunembe kakhulu, ukuguquka kwezinga lokushisa okucashile kusengadala izinguquko zobukhulu futhi kuthinte ukunemba kwemojuli. Endaweni yokusebenzela yokwenziwa kwe-semiconductor chip, inqubo ye-lithography idinga ukunemba kokuma kweleveli ye-danami, futhi izinga lokushisa lendawo lishintshashintsha ngo-1 ° C, futhi isisekelo segwadle esinobude obuseceleni bemitha elingu-1 singakhiqiza ukunwetshwa komugqa noma ukufinyezwa kwama-microns angu-5-7. Lolu shintsho oluncane ludluliselwa imojula yokunyakaza yokunemba kwe-ultra-precision yokuntanta emoyeni, okwanele ukwenza ukuphambuka kwephethini ye-chip lithography futhi kunciphise kakhulu isivuno. Ngakho-ke, ifakwe isisekelo se-granite esinembayo semodyuli yokunyakaza ye-ultra-precision entantayo, izinga lokushisa elifanele lendawo yokusebenza kufanele lilawulwe ku-20 ° C ± 1 ° C, ngosizo lwemishini yokushisa enembayo ephezulu, efana nokushisa okungaguquki kanye nesistimu ye-air conditioning system, ukuqapha okuqhubekayo kanye nokulungiswa kwezinga lokushisa elizungezile, ukuqinisekisa ukuthi izinga lokushisa eliphansi kakhulu, ukuqinisekisa ukuthi izinga lokushisa lincane kakhulu, liqinisekisa izinga lokushisa elincane kakhulu, ukuqinisekisa ukuthi izinga lokushisa lincane kakhulu, ukusebenza ngokunemba okuphezulu.
Okwesibili, ukuphathwa komswakama: isihluthulelo sokuvikela umswakama "itshe"
Ukuswakama kungenye into ebalulekile ethinta ukusebenza kwesisekelo segwadle esinembayo. Endaweni enomswakama ophezulu, i-granite ilula ukumunca umhwamuko wamanzi, okungase kuholele ekujikeni ebusweni, okungathinti nje kuphela ukuzinza kokuxhumeka kwe-granite kanye ne-ultra-precision motion module ye-air float, kodwa futhi ingabangela ukuguguleka komhlaba futhi kunciphise ukucwebezela nokunemba ngokuhamba kwesikhathi. Ku-workshop ye-optical lens yokugaya, uma umswakama ungaphezu kuka-60% RH isikhathi eside, umhwamuko wamanzi okhangiswa ebusweni besisekelo segwadle uzophazamisa ukunyakaza kwesilayidi sokuntanta kwegesi, ukuze ukunemba kokugaya kwelensi kunciphe, futhi indawo engaphezulu inephutha. Ngakho-ke, umswakama ohlobene wendawo yokusebenza kufanele ulawulwe ngokuqinile phakathi kuka-40% -60% RH, ongagadwa futhi ulungiswe ngesikhathi sangempela ngokufaka ama-dehumidifiers, izinzwa zomswakama nezinye izinto zokusebenza ukuze kugwenywe ukulimala kwesisekelo se-granite ngenxa yomswakama ophezulu, futhi kuqinisekiswe ukusebenza okushelelayo kwe-ultra-precision motion module yokuntanta komoya.
Okwesithathu, isiqinisekiso sokuhlanzeka: "umqaphi" wokunemba
Ukulimala kwezinhlayiya zothuli kusisekelo segwadle esinembayo semojula yokunyakaza yokunemba okuphezulu kakhulu kokuntanta komoya akukwazi ukubukelwa phansi. Uma izinhlayiya ezincane zingena esikhaleni sefilimu yegesi phakathi kwesilayidi segesi esintantayo kanye nesisekelo segranite, zingase zicekele phansi ukufana kwefilimu yegesi, zandise ukungqubuzana, futhi zinwaye ngisho nangaphezulu kwesisekelo, okuholela ekunciphiseni kokunemba kokunyakaza. Kundawo yokusebenzela yemishini enembe kakhulu yezingxenye ze-aerospace, uma izinhlayiya zothuli ezisemoyeni ziwela kusisekelo segwadle, umzila wokunyakaza wethuluzi lomshini ungase uchezuke, kuthinte ukunemba komshini kwezingxenye. Ngakho-ke, indawo yokusebenza kufanele igcinwe ihlanzekile kakhulu, ifinyelele ku-10,000 noma ngisho naphezulu amazinga okuhlanzeka, ngokufakwa kwemishini yokuhlanza umoya, njengezihlungi zomoya ezisebenza kahle kakhulu (HEPA), zihlunge izinhlayiya zothuli emoyeni, ngesikhathi esifanayo, abasebenzi badinga ukugqoka izingubo ezingenalo uthuli, izembozo zezicathulo, njll., ukuze banciphise uthuli olulethwa abantu. Gcina indawo yokusebenza enembayo ephezulu yesisekelo se-granite kanye nemojula yokunyakaza ye-air float ultra-precision motion.
Okwesine, ukuhlukaniswa kokudlidliza: ukusebenza kahle kwe "shock pad"
Ukudlidliza kwangaphandle kuyisitha sokunemba kwemojula yokunyakaza okunembe kakhulu kokuntanta komoya. Nakuba isisekelo se-granite esinembayo sinekhono elithile lokunciphisa ukudlidliza, ukudlidliza okunamandla aphezulu kusengase kwephule umkhawulo webhafa. Ukudlidliza okukhiqizwa ukugcwala kwefekthri kanye nokusebenza kwemishini emikhulu kudluliselwa kusisekelo segwadle emhlabathini, okuzophazamisa ukunemba kokunyakaza kwemojula yokunyakaza okunembe kakhulu kokuntanta komoya. Ku-CMM ephezulu, ukudlidliza kungase kubangele ukuthintana phakathi kwe-probe yokulinganisa kanye nendawo yokusebenza ukuze kulinganiswe ukuthi kungazinzi, okuholela ekuphambukeni kwedatha yokulinganisa. Ukuze kuxazululwe le nkinga, kuyadingeka ukuthatha izinyathelo ezisebenzayo zokuhlukanisa ukudlidliza, njengokubeka amaphedi okuvezela okuhlukanisayo okudlidliza endaweni yokufaka imishini, isisekelo sokuhlukanisa sokudlidliza, noma ukusebenzisa uhlelo olusebenzayo lokudlidliza lokuhlukanisa ukuze kususwe ukudlidliza kwangaphandle ngenkuthalo, nokudala indawo yokusebenza ethule futhi ezinzile yesisekelo sokunemba segwadle kanye nemojuli ye-air float ultra-precision motion motion.
Kuphela ngokuhlangabezana ngokugcwele nezidingo zemvelo zokushisa, umswakama, ukuhlanzeka nokulawula ukudlidliza, isisekelo sokunemba se-granite semojula yokunyakaza yokunemba kwe-ultra-nemba ye-air float inganikeza ukudlala okugcwele kuzinzuzo zayo zokusebenza, inikeze isiqinisekiso esinokwethenjelwa sokusebenza okunembe kakhulu emikhakheni ehlukahlukene, futhi isize imboni ukuthi iqhubekele phambili ekukhiqizeni ngokunemba okuphezulu nezinga locwaningo lwesayensi.
Isikhathi sokuthumela: Apr-08-2025