Emkhakheni wokukhiqiza okuphezulu kanye nocwaningo lwesayensi olusezingeni eliphezulu, imodyuli yokunyakaza enembile kakhulu ye-air float isibe yithuluzi elibalulekile lokusebenza kahle kanye nokulinganisa ngokusebenza kwayo okuhle kakhulu kokunemba. Isisekelo sokunemba kwe-granite, njengesisekelo sokusekela, sinezidingo eziqinile zendawo yokusebenza, futhi izimo zemvelo ezifanele ziyisisekelo sokuqinisekisa ukusebenza kwayo okuzinzile kanye nomphumela omuhle kakhulu.
Okokuqala, ukulawula izinga lokushisa: "isizinzisi" sokunemba
Nakuba i-granite yaziwa ngokuzinza kwayo, ayivikelekile ngokuphelele ezinguqukweni zokushisa. Nakuba i-coefficient yayo yokwanda kokushisa iphansi, ngokuvamile i-5-7 ×10⁻⁶/℃, ezimweni zokulawula ukunyakaza okunembile kakhulu, ukushintshashintsha kwezinga lokushisa okucashile kungabangela izinguquko zobukhulu futhi kuthinte ukunemba kwemodyuli. Emsebenzini wokukhiqiza ama-chip e-semiconductor, inqubo ye-lithography idinga ukunemba kokubeka izinga le-danami, futhi izinga lokushisa elizungezile liyashintshashintsha ngo-1 ° C, kanti isisekelo se-granite esinobude obuyimitha eli-1 singakhiqiza ukwanda okuqondile noma ukufinyela kwama-micron angu-5-7. Lolu shintsho oluncane ludluliselwa yi-module yokunyakaza okunembile kakhulu ye-air float, okwanele ukwenza ukuphambuka kwephethini ye-chip lithography futhi kunciphise kakhulu isivuno. Ngakho-ke, ifakwe isisekelo sokunemba kwe-granite semojuli yokunyakaza yomoya entantayo enembile kakhulu, izinga lokushisa elifanele lendawo yokusebenza kufanele lilawulwe ku-20 ° C ± 1 ° C, ngosizo lwemishini yokushisa enembile kakhulu, njengohlelo lokushisa oluqhubekayo kanye nomswakama, ukuqapha okuqhubekayo kanye nokulungiswa kwezinga lokushisa elizungezile, ukuqinisekisa ukuthi ukushintshashintsha kwezinga lokushisa kububanzi obuncane kakhulu, kugcina ukuzinza kosayizi wesisekelo, ukuqinisekisa ukuthi imojuli isebenza kahle kakhulu.
Okwesibili, ukuphathwa komswakama: isihluthulelo sokuvikela "itshe" elingangenisi umswakama
Umswakama ungenye into ebalulekile ethinta ukusebenza kwesisekelo se-granite esinembile. Endaweni enomswakama ophezulu, i-granite kulula ukuyimunca umusi wamanzi, okungaholela ekujiyeni ebusweni, okungagcini nje ngokuphazamisa ukuzinza kokuxhumana kwe-granite kanye ne-module yokunyakaza okunembile kakhulu kwe-air float, kodwa futhi kungabangela ukuguguleka kobuso futhi kunciphise ukukhanya nokunemba ngokuhamba kwesikhathi. Emsebenzini wokugaya ilensi ye-optical, uma umswakama ungaphezu kuka-60%RH isikhathi eside, umusi wamanzi ofakwe ebusweni besisekelo se-granite uzophazamisa ukunyakaza kwe-gas float slider, ukuze ukunemba kokugaya ilensi kuncishiswe, futhi ubuso bube namaphutha. Ngakho-ke, umswakama ohlobene wendawo yokusebenza kufanele ulawulwe ngokuqinile phakathi kuka-40%-60%RH, okungaqashwa futhi kulungiswe ngesikhathi sangempela ngokufaka ama-dehumidifier, izinzwa zomswakama kanye neminye imishini ukuze kugwenywe umonakalo esisekelweni se-granite ngenxa yomswakama ophezulu, futhi kuqinisekiswe ukusebenza kahle kwe-module yokunyakaza okunembile kakhulu kwe-air float.
Okwesithathu, isiqinisekiso sokuhlanzeka: "umqaphi" wokunemba
Ukulimala kwezinhlayiya zothuli esisekelweni se-granite esinembile se-module yokunyakaza okunembile kakhulu yokuntanta emoyeni akunakuthathwa kalula. Uma izinhlayiya ezincane zingena esikhaleni sefilimu yegesi phakathi kwe-gas float slider kanye nesisekelo se-granite, zingase zibhubhise ukufana kwefilimu yegesi, zandise ukungqubuzana, futhi ziklwebhe ngisho nobuso besisekelo, okuholela ekunciphiseni ukunemba kokunyakaza. Emsebenzini wokulungisa okunemba kakhulu wezingxenye zezindiza, uma izinhlayiya zothuli emoyeni ziwela esisekelweni se-granite, umzila wokunyakaza wethuluzi lokulungisa ungase uphambukiswe, okuthinta ukunemba kokulungisa kwezingxenye. Ngakho-ke, indawo yokusebenza kufanele igcinwe ihlanzekile kakhulu, ifinyelele amazinga okuhlanzeka ayi-10,000 noma ngaphezulu, ngokufaka imishini yokuhlanza umoya, njengezihlungi zomoya ezisebenzayo kakhulu (i-HEPA), ukuhlunga izinhlayiya zothuli emoyeni, ngesikhathi esifanayo, abasebenzi kudingeka bagqoke izingubo ezingenalo uthuli, izembozo zezicathulo, njll., ukuze kuncishiswe uthuli olulethwa ngabantu. Gcina indawo yokusebenza enembile kakhulu yesisekelo se-granite kanye ne-air float ultra-precision motion module.
Okwesine, ukuhlukaniswa kokudlidliza: ukusebenza kahle kwe-"shock pad"
Ukudlidliza kwangaphandle kuyisitha sokunemba kwemojuli yokunyakaza eqondile kakhulu ye-air float. Nakuba isisekelo se-granite esiqondile sinekhono elithile lokunciphisa ukudlidliza, ukudlidliza kwamandla aphezulu kungase kuphule umkhawulo waso we-buffer. Ukudlidliza okubangelwa yithrafikhi ezungeze ifektri kanye nokusebenza kwemishini emikhulu yemishini kudluliselwa esisekelweni se-granite emhlabathini, okuzophazamisa ukunemba kokunyakaza kwemojuli yokunyakaza eqondile kakhulu ye-air float. Ku-CMM ephezulu, ukudlidliza kungabangela ukuthi ukuxhumana phakathi kwe-probe yokulinganisa kanye ne-workpiece kulinganiswe kungazinzile, okuholela ekuphambukeni kwedatha yokulinganisa. Ukuze kuxazululwe le nkinga, kubalulekile ukusebenzisa izindlela ezisebenzayo zokuhlukanisa ukudlidliza, njengokubeka ama-vibration isolation pads endaweni yokufaka imishini, ukwakha isisekelo sokuhlukanisa ukudlidliza, noma ukusebenzisa uhlelo olusebenzayo lokuhlukanisa ukudlidliza ukuze kuqedwe ukudlidliza kwangaphandle, futhi kudalwe indawo yokusebenza ethule nezinzile yesisekelo sokunemba kwe-granite kanye nemojuli yokunyakaza eqondile kakhulu ye-air float.
Kuphela ngokuhlangabezana ngokugcwele nezidingo zemvelo zokushisa, umswakama, ukuhlanzeka kanye nokulawula ukudlidliza, isisekelo sokunemba kwe-granite se-module yokunyakaza okunembile kakhulu kwe-air float singanikeza ukusebenza okugcwele ezinzuzweni zayo zokusebenza, sinikeze isiqinisekiso esithembekile semisebenzi yokunembile kakhulu emikhakheni eyahlukahlukene, futhi sisize imboni ukuthi iqhubekele ezingeni eliphezulu lokukhiqiza okunembile kanye nocwaningo lwesayensi.
Isikhathi sokuthunyelwe: Ephreli-08-2025