Ekwenziweni kwe-semiconductor, umshini we-photolithography uyithuluzi elibalulekile elinquma ukunemba kwama-chips, kanti isisekelo se-granite, esinezici eziningi, sesibe yingxenye ebalulekile yomshini we-photolithography.
Ukuzinza kokushisa: "Isivikelo" ngokumelene nokushintsha kwezinga lokushisa
Uma umshini we-photolithography usebenza, ukhiqiza ukushisa okukhulu. Ngisho nokushintshashintsha kwezinga lokushisa okungu-0.1℃ kuphela kungabangela ukuguquka kwezingxenye zemishini futhi kuthinte ukunemba kwe-photolithography. I-coefficient yokwanda kokushisa kwe-granite iphansi kakhulu, ingu-4-8 ×10⁻⁶/℃ kuphela, okucishe kube yi-1/3 yensimbi kanye ne-1/5 ye-aluminium alloy. Lokhu kwenza isisekelo se-granite silondoloze ukuzinza kobukhulu lapho umshini we-photolithography usebenza isikhathi eside noma lapho izinga lokushisa lemvelo lishintsha, okuqinisekisa indawo eqondile yezingxenye ezibonakalayo kanye nezakhiwo zemishini.
Ukusebenza kahle kakhulu kokulwa nokudlidliza: "Isiponji" esimunca ukudlidliza
Embonini ye-semiconductor, ukusebenza kwemishini ezungezile kanye nokuhamba kwabantu konke kungadala ukudlidliza. I-Granite inobukhulu obukhulu kanye nokuthungwa okuqinile, futhi inezakhiwo ezinhle kakhulu zokudambisa, ngesilinganiso sokudambisa esiphindwe kabili kuya kahlanu kunesezinsimbi. Lapho ukudlidliza kwangaphandle kudluliselwa esisekelweni se-granite, ukungqubuzana phakathi kwamakristalu amaminerali angaphakathi kuguqula amandla okudlidliza abe amandla okushisa okusatshalaliswa, okunganciphisa kakhulu ukudlidliza ngesikhathi esifushane, okuvumela umshini we-photolithography ukuthi ubuyisele ngokushesha ukuzinza futhi ugweme ukufiphaza noma ukungalungi kahle kwephethini ye-photolithography ngenxa yokudlidliza.
Ukuzinza kwamakhemikhali: "Umqaphi" Wendawo Ehlanzekile
Ingaphakathi lomshini we-photolithography lihlangana nezinhlobo ezahlukene zamakhemikhali, futhi izinto zensimbi ezivamile zivame ukugqwala noma ukukhishwa kwezinhlayiya. I-granite yakhiwe ngamaminerali afana ne-quartz ne-feldspar. Inezakhiwo zamakhemikhali ezizinzile kanye nokumelana okuqinile kokugqwala. Ngemva kokucwiliswa ezixazululweni ze-asidi ne-alkali, ukugqwala kobuso kuncane kakhulu. Okwamanje, isakhiwo sayo esiminyene asikhiqizi cishe udoti noma uthuli, sihlangabezana nezidingo zezindinganiso eziphakeme kakhulu zegumbi lokuhlanza futhi sinciphisa ingozi yokungcola kwe-wafer.
Ukuzivumelanisa nezimo kokucubungula: "Izinto ezifanele" zokudala amabhentshimakhi anembile
Izingxenye eziyinhloko zomshini we-photolithography zidinga ukufakwa endaweni enembile kakhulu. Isakhiwo sangaphakathi se-granite siyafana futhi kulula ukusicubungula ngokunemba okuphezulu kakhulu ngokugaya, ukupholisha kanye nezinye izindlela. Ukuthamba kwayo kungafinyelela ku-≤0.5μm/m, kanti ukugoba kobuso i-Ra kungu-≤0.05μm, okunikeza isisekelo sokufakwa okunembile kwezingxenye ezifana namalensi okukhanya.
Isikhathi eside sokuphila kanye nokungabi nokugcinwa: "Amathuluzi abukhali" okunciphisa izindleko
Uma kuqhathaniswa nezinto zensimbi ezivame ukukhathala nokuqhekeka ngenxa yokusetshenziswa isikhathi eside, i-granite ayiguquki noma iqhekeke ngaphansi kwemithwalo evamile, futhi ayidingi ukwelashwa kwendawo, ngaleyo ndlela igwema ingozi yokuqhekeka nokungcoliswa kwengubo. Ezisetshenzisweni ezisebenzayo, ngemva kokusetshenziswa iminyaka eminingi, izinkomba zokusebenza ezibalulekile zesisekelo se-granite zisengahlala zizinzile, zinciphise izindleko zokusebenza nokugcinwa kwemishini.
Kusukela ekuzinzeni kokushisa, ukumelana nokudlidliza kokungangeni kwamakhemikhali, izici eziningi zesisekelo se-granite zihlangabezana kahle nezidingo zomshini we-photolithography. Njengoba inqubo yokukhiqiza ama-chip iqhubeka nokuthuthuka ibe nokunemba okuphezulu, izisekelo ze-granite zizoqhubeka nokudlala indima engenakuphikwa emkhakheni wokukhiqiza ama-semiconductor.
Isikhathi sokuthunyelwe: Meyi-20-2025