Ekwenziweni kwe-semiconductor, umshini we-photolithography uyithuluzi elibalulekile elinquma ukunemba kwama-chips, futhi isisekelo se-granite, esinezici zayo eziningi, isibe ingxenye ebalulekile yomshini we-photolithography.
Ukuzinza kokushisa: "Isivikelo" ngokumelene noshintsho lwezinga lokushisa
Uma umshini we-photolithography usebenza, ukhiqiza ukushisa okukhulu. Ngisho nokuguquguquka kwezinga lokushisa okungu-0.1℃ kuphela kungabangela ukuguqulwa kwezingxenye zemishini futhi kuthinte ukunemba kwe-photolithography. I-coefficient yokunwetshwa okushisayo kwegwadle iphansi kakhulu, kuphela 4-8 ×10⁻⁶/℃, ecishe ibe ngu-1/3 waleyo yensimbi kanye no-1/5 waleyo yealloy ye-aluminium. Lokhu kuvumela isisekelo se-granite ukuthi sigcine ukuqina kobukhulu lapho umshini we-photolithography usebenza isikhathi eside noma lapho izinga lokushisa lemvelo lishintsha, okuqinisekisa ukuma okunembile kwezingxenye zokubona kanye nezakhiwo zemishini.
Ukusebenza okuphezulu kokumelana nokudlidliza: "Isipontshi" esimunca ukudlidliza
Embonini ye-semiconductor, ukusebenza kwemishini ezungezile kanye nokunyakaza kwabantu konke kungenza ukudlidliza. I-Granite inokuminyana okuphezulu kanye nokuthungwa okuqinile, futhi inezinto ezinhle kakhulu zokuthambisa, ngesilinganiso sokuswakama izikhathi ezi-2 kuya kwezi-5 kunezinsimbi. Uma ukudlidliza kwangaphandle kudluliselwa kusisekelo se-granite, ukungqubuzana phakathi kwamakristalu amaminerali angaphakathi kuguqula amandla okudlidliza abe amandla okushisa ukuze ahlakazeke, okunganciphisa kakhulu ukudlidliza ngesikhathi esifushane, okuvumela umshini we-photolithography ukuthi ubuyisele ngokushesha ukuzinza futhi ugweme ukufiphala noma ukungahambi kahle kwephethini ye-photolithography ngenxa yokudlidliza.
Ukuzinza kwamakhemikhali: "Umqaphi" Wendawo Ehlanzekile
Ingaphakathi lomshini we-photolithography lihlangana nemidiya ehlukahlukene yamakhemikhali, futhi izinto ezijwayelekile zensimbi zijwayele ukugqwala noma ukukhishwa kwezinhlayiya. I-Granite yakhiwe ngamaminerali afana ne-quartz ne-feldspar. Inezici zamakhemikhali ezizinzile kanye nokumelana nokugqwala okuqinile. Ngemva kokucwiliswa ezixazululweni ze-asidi ne-alkali, ukugqwala okungaphezulu kuncane kakhulu. Ngaleso sikhathi, ukwakheka kwayo okuminyene akukhiqizi imfucumfucu noma uthuli, okuhlangabezana nezidingo zamazinga aphakeme kakhulu wegumbi lokuhlanza futhi kunciphisa ubungozi bokungcoliswa kwe-wafer.
Ukucubungula ukuzivumelanisa nezimo: "Into efanelekile" yokwakha amabhentshimakhi anembile
Izingxenye eziyinhloko zomshini we-photolithography zidinga ukufakwa endaweni eyinkomba enembe kakhulu. Isakhiwo sangaphakathi se-granite siyafana futhi kulula ukucutshungulwa ngokunemba okuphezulu kakhulu ngokugaya, ukupholisha namanye amasu. Ukucaba kwayo kungafinyelela ku-≤0.5μm/m, kanti ubulukhuni bendawo i-Ra ingu-≤0.05μm, ihlinzeka ngesisekelo esinembile sokufakwa sezingxenye ezifana namalensi optical.
Ukuphila okude nokungakhathalelwa: "Amathuluzi abukhali" okunciphisa izindleko
Uma kuqhathaniswa nezinto zensimbi ezijwayele ukukhathala nokuqhekeka ngenxa yokusetshenziswa isikhathi eside, i-granite ayitholi neze ukuwohloka kwepulasitiki noma ukuphuka ngaphansi kwemithwalo evamile, futhi ayidingi ukwelashwa okungaphezulu, ngaleyo ndlela igwema ingozi yokuxebuka kwe-coating kanye nokungcola. Ezisetshenziswa ezingokoqobo, ngemva kokusetshenziswa iminyaka eminingi, izinkomba zokusebenza ezibalulekile zesisekelo se-granite zisengahlala zizinzile, zinciphisa izindleko zokusebenza nokugcinwa kwempahla.
Kusukela ekuzinzeni kokushisa, ukumelana nokudlidliza kuya ku-inertness yamakhemikhali, izici eziningi zesisekelo se-granite zihlangabezana ngokuphelele nezidingo zomshini we-photolithography. Njengoba inqubo yokukhiqiza ama-chip iqhubeka nokuthuthuka ngokunemba okuphezulu, izisekelo ze-granite zizoqhubeka nokudlala indima engenakushintshwa emkhakheni wokukhiqiza ama-semiconductor.
Isikhathi sokuthumela: May-20-2025