Njengoba ukukhiqizwa okunembe kakhulu, ukwenziwa kwe-semiconductor, kanye ne-metrology ethuthukisiwe kuqhubeka nokuqhubekela phambili ekubekezeleleni okuqinile kanye nomthamo ophezulu, isisekelo somshini wezinhlelo zokunyakaza nokulinganisa sesibe yisici esibalulekile sokusebenza. Kulesi simo, izakhiwo ezisekelwe ku-granite—kusukela kumatafula e-granite XY kanye nezigaba eziqondile zokunemba kuya kumapuleti obuso be-granite kanyeIzisekelo ze-granite ze-CMM—idlala indima ebalulekile ekuqinisekiseni ukuzinza, ukunemba, kanye nokuthembeka kwesikhathi eside.
Kuma-OEM, abahlanganisi bezinhlelo, kanye nabasebenzisi bokugcina eYurophu naseNyakatho Melika, ukukhetha ipulatifomu yokunyakaza efanele noma isisekelo se-metrology akuseyona isinqumo somshini kuphela. Kudinga ukuhlolwa okuphelele kokuziphatha okuguqukayo, ukusebenza kokushisa, ukuhlukaniswa kokudlidliza, izidingo zokugcinwa, kanye nezindleko eziphelele zobunikazi. Lesi sihloko sinikeza ukuqhathanisa okuhlelekile phakathi kwamatafula e-granite XY kanye nezigaba zokuthwala umoya, ngenkathi futhi sihlola indima ebanzi yamapuleti obuso be-granite kanye nezisekelo ze-granite ze-CMM ezinhlelweni zokunemba. Ngokusebenzisa imikhuba yemboni kanye nobuchwepheshe bokukhiqiza be-ZHHIMG, ingxoxo ihlose ukusekela izinqumo zobunjiniyela ezinolwazi kanye nokuthengwa kwempahla.
I-Granite njengezinto eziyisisekelo kubunjiniyela bokucacisa
Ngaphambi kokuqhathanisa izakhiwo ezithile zesistimu, kubalulekile ukuqonda ukuthi kungani i-granite isibe yinto ekhethwayo yamapulatifomu okunyakaza okunembile kanye nokulinganisa.
I-granite emnyama yemvelo, uma ikhethwe kahle futhi icutshungulwa, inikeza inhlanganisela eyingqayizivele yezakhiwo zomzimba okunzima ukuziphinda ngezinsimbi noma izinto ezihlanganisiwe. Ubuningi bayo obukhulu bunegalelo ekucindezelweni okuhle kakhulu kokudlidliza, kuyilapho i-coefficient yayo ephansi yokwanda kokushisa iqinisekisa ukuzinza kobukhulu phakathi nokushintshashintsha okuvamile kokushisa kwefektri. Ngokungafani nensimbi noma insimbi ephonswe, i-granite ayigqwali, ayidingi izembozo zokuvikela, futhi igcina ubuqotho bayo bejometri phakathi namashumi eminyaka yenkonzo.
Ukuze uthole izigaba eziqondile eziqondile, amatafula e-granite XY, kanyeIzisekelo ze-CMM, lezi zakhiwo zihumusha ekusebenzeni okubikezelwayo, ukuzwela kwemvelo okuncishisiwe, kanye nezindleko zokulungisa eziphansi zesikhathi eside. Ngenxa yalokho, i-granite isibe yinto ejwayelekile yokukhetha izinto kumathuluzi okuhlola ama-semiconductor, izinhlelo zokuqondanisa ze-optical, imishini yokulinganisa edidiyelwe, kanye nemishini yokwenza izinto ngokuzenzakalela ephezulu.
Ithebula le-Granite XY: Isakhiwo, Amandla, kanye Nezicelo
Itafula le-granite XY liyipulatifomu yokunyakaza lapho kufakwe khona ama-axe amabili aqondile aqondile esisekelweni se-granite esinomshini oqondile. Umzimba we-granite unikeza indiza yokubhekisela eqinile, eqinile ekushiseni, kuyilapho ama-axes okunyakaza ngokuvamile eqhutshwa yizikulufo zebhola, ama-motor aqondile, noma izindlela eziqhutshwa yibhande, kuye ngokunemba nezidingo zesivinini.
Izici Zesakhiwo
Amatafula e-Granite XY abonakala ngomklamo wawo wesisekelo se-monolithic. Indawo yokusebenza kanye nezindawo zokufaka zihlanganiswe ngendlela yokuthi zibushelelezi futhi zilingane, okuqinisekisa ukuhambisana okulinganayo phakathi kwama-axes. Ubunzima be-isisekelo se-granitekuvimbela ngempumelelo ukudlidliza kwangaphandle, okubaluleke kakhulu ezindaweni lapho ukuhlukaniswa okusebenzayo kulinganiselwe noma kungadingi izindleko eziningi.
Iziqondiso eziqondile kanye nezinhlelo zokushayela ziqiniswe ngomshini ku-granite kusetshenziswa izifakelo ezinembile noma izixhumi eziboshiwe. Le ndlela inciphisa ukuguquguquka ngaphansi komthwalo futhi iqinisekisa ukuziphatha kokunyakaza okuphindaphindwayo phakathi nemijikelezo emide yomsebenzi.
Iphrofayela Yokusebenza
Ngokuphathelene nokunemba kokubeka kanye nokuphindaphinda, amatafula e-granite XY afaneleka kahle ekusetshenzisweni kwezinga le-micron. Ngama-encoder aqondile afanele kanye nokulawulwa kwe-servo, ukuphindaphindwa kwe-sub-micron kuyatholakala ezinhlelweni eziningi zezimboni kanye nelebhu. Ngenkathi impendulo yawo enamandla ngokuvamile iphansi kuneyezigaba zokuthwala umoya, amatafula e-granite XY anikeza ibhalansi enhle phakathi kokunemba, umthamo womthwalo, kanye nezindleko.
Amacala Okusetshenziswa Okuvamile
Amatafula e-Granite XY asetshenziswa kabanzi ku:
- Ukuhlolwa kwe-semiconductor back-end kanye nemishini yokuhlola
- Ukuqondanisa izingxenye ezibonakalayo kanye nezinhlelo zokuhlanganisa
- Amapulatifomu okusabalalisa ngokunemba kanye nokucubungula nge-laser
- Ukulungiswa kokulinganisa kanye nezinhlelo zokubeka izinkomba
Ezinhlelweni lapho imithwalo ephakathi kuya kwephezulu kufanele ithuthwe ngokunemba okuzinzile nokuphindaphindekayo, amatafula e-granite XY ahlala eyisisombululo esisebenzayo nesiqinisekisiwe.
Isigaba Sokuthwala Umoya: Ifilosofi Yokuklama kanye Nezinzuzo Zokusebenza
Isigaba esithwala umoya simelela ifilosofi yokuklama ehlukile. Esikhundleni sokuthembela ekuthinteni komshini phakathi kwemigwaqo, izigaba ezithwala umoya zisebenzisa ifilimu encane yomoya ocindezelwe ukudala ukunyakaza okungenakuphikiswana. Uma kuhlanganiswa ne-isisekelo se-granite, lo mklamo uletha ukushelela okumangalisayo kanye nesisombululo sokuma esiphezulu kakhulu.
Izinto Eziyinhloko Zokuklama
Esigabeni esithwala umoya, isisekelo segranite sisebenza njengendawo yokubhekisela enembile lapho inqola ehambayo intanta khona. Ama-air bearings asabalalisa umthwalo ngokulinganayo kuyo yonke indawo yegranite, esusa ukuguguleka komshini kanye nemiphumela yokunamathela. Ukunyakaza kuvame ukuqhutshwa yizinjini eziqondile, futhi impendulo yesikhundla inikezwa ngama-encoder optical noma ama-interferometric anesinqumo esiphezulu.
Ukuthamba kanye nekhwalithi yobuso begranite kubaluleke kakhulu, njengoba kuthinta ngqo ukusebenza kwamabhere. Lokhu kubeka izidingo eziqinile ekukhethweni kwezinto zegranite, ekushiseni nasekuhlanganiseni.
Ukuziphatha Okuqondile Nokuguquguquka
Izigaba ezithwala umoya ziyaphumelela ezinhlelweni zokusebenza ezidinga ukulungiswa kokubekwa kwezinga le-nanometer, ukuqondeka okuphezulu, kanye nokushelela kwejubane okumangalisayo. Ukungabikho kokuthintana komshini kwenza amaphrofayili okunyakaza aphindaphindeke kakhulu futhi kunciphisa i-hysteresis.
Kodwa-ke, lezi zinzuzo ziza nokushintshana. Izigaba zomoya zidinga ukuhlinzekwa komoya okuhlanzekile nokuzinzile kanye nokulawulwa okucophelelayo kwemvelo. Ziphinde zizwele kakhulu ekungcoleni futhi ngokuvamile zisekela amandla omthwalo aphansi uma kuqhathaniswa namatafula e-granite XY aqondiswa ngomshini.
Izimo Zohlelo Lokusebenza
Izigaba zokuthwala umoya zivame ukusetshenziswa ku:
- Izinhlelo zokuhlola ama-wafer kanye ne-metrology
- Imishini yokulungisa imaski kanye ne-lithography
- Amapulatifomu okulinganisa okubonakalayo aphezulu
- Izindawo zocwaningo nentuthuko ezidinga ukunemba okukhulu
Ezimweni ezinjalo, izinzuzo zokusebenza ziqinisekisa ukutshalwa kwezimali kokuqala okuphezulu kanye nobunzima bokusebenza.
Ithebula le-Granite XY vs. Isigaba Sokuthwala Umoya: Ukuhlaziywa Kokuqhathanisa
Uma kuqhathaniswa itafula le-granite XY nesigaba esinomoya, isinqumo kufanele siqondiswe yizinto eziza kuqala eziqondene nohlelo lokusebenza kunezibalo zokunemba eziqondile zodwa.
Ngokombono womshini, amatafula e-granite XY anikeza ukuqina okuphezulu kwesakhiwo kanye nomthamo womthwalo. Abekezelela kakhulu izindawo zezimboni futhi adinga ingqalasizinda encane yokusiza. Izigaba ezithwala umoya, ngokuphambene, zibeka phambili ubumsulwa bokunyakaza kanye nesisombululo, ngokuvamile ngaphandle kokuqina kwemvelo kanye nobulula besistimu.
Ngokuphathelene nezindleko zomjikelezo wokuphila, amatafula e-granite XY ngokuvamile ahlinzeka ngezindleko eziphansi zobunikazi. Izidingo zawo zokugcinwa zincane, futhi ukusebenza kwawo kuhlala kuzinzile phakathi nezikhathi zesevisi ende. Izigaba zokuthwala umoya zingase zithole izindleko ezengeziwe ezihlobene nezinhlelo zokuphakelwa komoya, ukuhlunga, kanye nokulawula imvelo.
Kubasebenzisi abaningi bezimboni, ukukhetha akuyona into ehambisana ne-binary. Ukwakheka kwesistimu ye-hybrid kuya ngokuya kuvama, lapho izisekelo ze-granite zisekela inhlanganisela yezingqimba eziqondiswa ngomshini kanye nezigaba ezithwala umoya, okwenza ngcono ukusebenza lapho kubaluleke kakhulu.
Amapuleti Omphezulu Wegranite: Izinga Lokubhekisela
Amapuleti ongaphezulu kwe-granite ahlala eyisisekelo sokuhlolwa kobukhulu kanye nokulinganiswa ekukhiqizeni ngokunemba. Nakuba engafaki ukunyakaza okusebenzayo, indima yawo njengezindiza zokubhekisela ibalulekile ekuqinisekiseni ukulandeleka kokulinganisa kanye nokunemba kohlelo.
Indima Yokusebenza
Ipuleti lobuso le-granite linikeza i-datum ezinzile, eyisicaba lapho izingxenye, izinto zokwakha, kanye nezinsimbi kungalinganiswa noma kuhlanganiswe khona. Ukuqina kwayo okungokwemvelo kuyenza ifaneleke ukusetshenziswa ezindaweni ezishintshashintshayo zokushisa ngaphandle kokuphazamiseka okukhulu.
Ukuhlanganiswa Nezinhlelo Zokucacisa
Ezindaweni zokukhiqiza zanamuhla, amapuleti obuso be-granite avame ukuhlanganiswa nama-height gauges, izigaba eziqondile, kanye nezinhlelo zokulinganisa ezibonakalayo. Asebenza futhi njengezinkomba zokulinganisa izigaba eziqondile eziqondile kanye namapulatifomu okunyakaza, okuqinisa ukubaluleka kwawo ngale kwamakamelo okuhlola avamile.
Isisekelo se-CMM Granite: Umgogodla we-Coordinate Metrology
Emishinini yokulinganisa ehlanganisiwe, isisekelo se-granite singaphezu nje kwesakhiwo esingenzi lutho—siwumgogodla wesistimu yonke yokulinganisa.
Izidingo Zesakhiwo Nezobume Bezwe
Isisekelo se-granite se-CMM kumele sinikeze ukuthamba okumangalisayo, ukuqina, kanye nokuzinza kobukhulu besikhathi eside. Noma yikuphi ukuguquka noma ukukhukhuleka kokushisa kuthinta ngqo ukungaqiniseki kokulinganisa. Ngenxa yalesi sizathu, ukukhethwa kwe-granite, ukukhululeka ekucindezelekeni, kanye nokucubungula ngokunemba kuyizinyathelo ezibalulekile ekukhiqizweni kwesisekelo se-CMM.
Umthelela Ekulinganisweni Okunembile
Ukusebenza kwe-CMM kuhlobene kakhulu nekhwalithi yesisekelo sayo se-granite. Isisekelo esiklanywe kahle siqinisekisa i-axis geometry ehambisanayo, sinciphisa imithombo yamaphutha, futhi sisekela ukulinganiswa okuthembekile phakathi nesikhathi senkonzo yomshini.
I-ZHHIMG isebenzisana eduze nabakhiqizi bezinhlelo ze-metrology ukuletha izisekelo ze-granite ezihlangabezana nezindinganiso zomhlaba wonke eziqinile, zisekela ukuhlolwa okunembe kakhulu emikhakheni yokukhiqiza yezindiza, yezimoto, kanye neyokunemba.
Izinto Okucatshangelwayo Zokukhiqiza Nokulawulwa Kwekhwalithi
Ukukhiqiza amapulatifomu okunyakaza kwe-granite kanye nezisekelo ze-metrology kudinga inhlanganisela yobuchwepheshe besayensi yezinto ezibonakalayo kanye nekhono lokukhiqiza elithuthukisiwe. I-granite eluhlaza kumele ihlolwe ngokucophelela ukuze kutholakale amaphutha angaphakathi, ukulingana, kanye nesakhiwo sezinhlamvu. Umshini wokulungisa, ukugoqa, kanye nokuhlola ngokunemba kwenziwa ezindaweni ezilawulwayo ukuqinisekisa ukuhambisana nezidingo zokuthamba, ukulingana, kanye nokuma.
Ezihlanganisweni eziyinkimbinkimbi ezifana namatafula e-granite XY kanye nezigaba ezithwala umoya, ukunemba kwesixhumi kanye nokuqondaniswa kwendibano kubaluleke kakhulu. Izinqubo zokukhiqiza ze-ZHHIMG zigcizelela ukulinganisa okulandelekayo, ubuciko obuphindaphindwayo, kanye nokubambisana okuseduze namakhasimende ngesikhathi sezigaba zokuklama nokuqinisekisa.
Isiphetho
Amatafula e-Granite XY, izigaba ezithwala umoya, amapuleti obuso be-granite, kanye nezisekelo ze-granite ze-CMM ngazinye zisebenza izindima ezihlukile kodwa ezihambisanayo kubunjiniyela bokunemba besimanje. Ukuqonda izici zazo zesakhiwo, amaphrofayili okusebenza, kanye nezimo zokusetshenziswa kubalulekile ekukhetheni ikhambi elifanele.
Kubasebenzisi bezimboni abafuna ukunemba okuqinile nokungabizi kakhulu, amatafula e-granite XY ahlala eyisinqumo esithembekile. Ukuze kube nokunyakaza okuphezulu kakhulu kanye ne-metrology, izigaba zomoya ezisekelwa yizisekelo ze-granite ezinembile zinikeza ukusebenza okungenakuqhathaniswa. Amapuleti obuso be-granite kanye nezisekelo ze-granite ze-CMM ziyaqhubeka nokusekela ukunemba nokuzinza kuyo yonke indawo yokukhiqiza ngokunemba.
Ngokusebenzisa ulwazi olujulile ekucutshungulweni kwe-granite kanye nokukhiqizwa kokunemba, i-ZHHIMG isekela amakhasimende omhlaba wonke ngezixazululo eziklanywe ngendlela ehlelekile ezihambisana nezidingo zokunemba ezishintshashintshayo kanye nemigomo yokusebenza yesikhathi eside.
Isikhathi sokuthunyelwe: Jan-23-2026