Isiteji se-Granite esinikezelwe emakamelweni ahlanzekile: Ukukhishwa kwe-ion yensimbi engu-Zero, ukukhetha okuhle kwemishini yokuhlola i-wafer.

Emkhakheni wokuhlolwa kwe-wafer ye-semiconductor, ukuhlanzeka kwendawo ehlanzekile yegumbi kuhlobene ngokuqondile nesivuno somkhiqizo. Njengoba ukunemba kwezinqubo zokukhiqiza ama-chip kuqhubeka nokuba ngcono, izidingo zezinkundla zokuphatha zemishini yokuhlonza ziya ngokuya ziba lukhuni. Amapulatifomu e-granite, anezici zawo zokukhishwa kwe-ion yensimbi eyiziro kanye nokungcoliswa kwezinhlayiyana eziphansi, adlule izinto ezivamile zensimbi engagqwali futhi abe yisixazululo esithandwayo semishini yokuhlola i-wafer.

I-Granite idwala lemvelo elivuthayo ikakhulukazi elakhiwe ngamaminerali angewona ezensimbi njenge-quartz, i-feldspar ne-mica. Lesi sici sinikeza inzuzo yokukhululwa kwe-ion yensimbi ye-zero. Ngokuphambene, insimbi engagqwali, njengengxubevange yensimbi efana ne-iron, i-chromium ne-nickel, ijwayele ukugqwala ngenxa ye-electrochemical corrosion endaweni yayo ngenxa yokuguguleka komhwamuko wamanzi namagesi ane-asidi noma ane-alkaline endaweni yegumbi elihlanzekile, okuholela ekunameni kwama-ion ensimbi njenge-Fe²⁺ ne-Cr³⁺. Uma la ma-ion amancanyana enamathela ebusweni bewafa, azoshintsha izici zikagesi ze-semiconductor impahla ezinqubweni ezilandelayo ezifana ne-photolithography ne-etching, abangele ukukhukhuleka kagesi we-threshold we-transistor, futhi aze aholele kumasekhethi amafushane kusekethe. Idatha yokuhlolwa kwesikhungo sochwepheshe ibonisa ukuthi ngemva kokuba iplatifomu yegwadle iye yavezwa ngokuqhubekayo endaweni yokulingisa yegumbi elihlanzekile kanye nomswakamo (23±0.5℃, 45%±5% RH) amahora angu-1000, ukukhishwa kwama-ion ensimbi kwakungaphansi komkhawulo wokutholwa (<0.1ppb). Izinga lesici lama-wafers elibangelwa ukungcoliswa kwe-ion yensimbi uma usebenzisa amapulatifomu ensimbi engagqwali lingaba phezulu ku-15% kuya ku-20%.

Mayelana nokulawulwa kokungcoliswa kwezinhlayiyana, amapulatifomu egwadle nawo asebenza kahle kakhulu. Amakamelo okuhlanza anezidingo eziphakeme kakhulu zokuhlangana kwezinhlayiya ezimisiwe emoyeni. Isibonelo, ezindlini zokuhlanza ze-ISO Class 1, inani lezinhlayiya ezingu-0.1μm ezivunyelwe nge-cubic meter ngayinye aweqi ku-10. Ngisho noma isiteji sensimbi engagqwali senziwe ukwelashwa kokupholisha, singase sikhiqize udoti wensimbi noma isikali se-oxide esixebuka ngenxa yamandla angaphandle njengokudlidliza kwemishini nokusebenza kwabasebenzi, okungaphazamisa indlela yokubona yewashi noma indawo yokukhanya. Amapulatifomu egwadle, anesakhiwo sawo samaminerali aminyene (ukuminyana ≥2.7g/cm³) nokuqina okuphezulu (6-7 esikalini se-Mohs), awajwayele ukuguga noma ukuphuka ngesikhathi sokusetshenziswa isikhathi eside. Izilinganiso ezilinganiselwe zibonisa ukuthi zinganciphisa ukugxiliswa kwezinhlayiya ezimisiwe emoyeni wendawo yemishini yokuthola ngaphezu kuka-40% uma kuqhathaniswa namapulatifomu ensimbi engagqwali, kugcinwe ngempumelelo izindinganiso zebanga legumbi lokuhlanza.

Ngaphezu kwezici zayo ezihlanzekile, ukusebenza okuphelele kwamapulatifomu e-granite nakho kukudlula kude lokho kwensimbi engagqwali. Mayelana nokuzinza kwe-thermal, i-coefficient yayo yokunwetshwa kwe-thermal kuphela (4-8) × 10⁻⁶/℃, ingaphansi kwengxenye yensimbi engagqwali (cishe 17×10⁻⁶/℃), engagcina kangcono ukunemba kokuma kwemishini yokuthola lapho izinga lokushisa ekamelweni elihlanzekile lishintshashintsha. Isici sokudambisa okuphezulu (isilinganiso sokudambisa > 0.05) singanciphisa ngokushesha ukudlidliza kwesisetshenziswa futhi sivimbele uphenyo lokuhlonza ukuthi lunganyakazi. Ukumelana nokugqwala kwayo kwemvelo kuyenza ikwazi ukuhlala izinzile ngisho nalapho ibhekene nezincibilikisi ze-photoresist, amagesi etching namanye amakhemikhali ngaphandle kwesidingo sokuvikela okwengeziwe.

Njengamanje, amapulatifomu e-granite asetshenziswa kabanzi ezitshalweni ezithuthukisiwe zokukhiqiza ama-wafer. Idatha ibonisa ukuthi ngemva kokwamukela iplatifomu yegwadle, izinga lokungahluleli kahle kokutholwa kwezinhlayiya eziwucwecwe lehle ngo-60%, umjikelezo wokulinganisa izinto zokusebenza unwetshwe izikhathi ezintathu, futhi izindleko zokukhiqiza zizonke zehle ngo-25%. Njengoba imboni ye-semiconductor iqhubekela ekunembeni okuphezulu, amapulatifomu egwadle, anezinzuzo zawo eziyinhloko njengokukhululwa kwe-ion yensimbi eyiziro kanye nokungcoliswa kwezinhlayiyana eziphansi, izoqhubeka nokuhlinzeka ngokusekela okuzinzile nokuthembekile kokuhlolwa kwe-wafer, ibe amandla abalulekile aqhuba inqubekelaphambili yomkhakha.