Ipulatifomu yegranite enikezelwe emakamelweni ahlanzekile: Akukho ukukhishwa kwe-ion yensimbi, ukukhetha okuhle kwemishini yokuhlola i-wafer.

Emkhakheni wokuhlolwa kwe-semiconductor wafer, ubumsulwa bendawo yokuhlanza buhlobene ngqo nomkhiqizo okhiqizwayo. Njengoba ukunemba kwezinqubo zokukhiqiza ama-chip kuqhubeka nokuthuthuka, izidingo zamapulatifomu okuphatha imishini yokuthola ziya ngokuya ziba nzima kakhulu. Amapulatifomu e-granite, anezimpawu zawo zokukhululwa kwe-ion yensimbi kanye nokungcola okuphansi kwezinhlayiya, adlule izinto zensimbi engagqwali zendabuko futhi aba yisisombululo esithandwayo semishini yokuhlola i-wafer.

I-Granite iyidwala lemvelo eliyi-igneous elakhiwe kakhulu ngamaminerali angewona awensimbi njenge-quartz, i-feldspar kanye ne-mica. Lesi sici siyinika inzuzo yokukhululwa kwe-ion yensimbi engenalutho. Ngokuphambene nalokho, insimbi engagqwali, njenge-alloy yezinsimbi ezifana ne-iron, i-chromium kanye ne-nickel, ithambekele ekugqwaleni kwe-electrochemical ebusweni bayo ngenxa yokuguguleka komhwamuko wamanzi kanye namagesi ane-acidic noma e-alkaline endaweni ehlanzekile, okuholela ekuweni kwama-ion ensimbi afana ne-Fe²⁺ kanye ne-Cr³⁺. Uma lawa ma-ion amancane enamathele ebusweni be-wafer, azoshintsha izakhiwo zikagesi zezinto ze-semiconductor ezinqubweni ezilandelayo ezifana ne-photolithography kanye nokusika, abangele ukukhukhuleka kwe-threshold voltage ye-transistor, futhi aholela ngisho nasezifundeni ezimfushane esifundeni. Idatha yokuhlolwa kwesikhungo sobungcweti ikhombisa ukuthi ngemuva kokuba ipulatifomu ye-granite ivezwe njalo endaweni yokushisa kwegumbi elihlanzekile kanye nendawo yomswakama (23±0.5℃, 45%±5% RH) amahora ayi-1000, ukukhishwa kwama-ion ensimbi kwakuphansi kunomkhawulo wokuthola (< 0.1ppb). Izinga lokukhubazeka kwama-wafers okubangelwa ukungcoliswa kwama-ion ensimbi lapho kusetshenziswa amapulatifomu ensimbi engagqwali lingafinyelela ku-15% kuya ku-20%.

Ngokuphathelene nokulawulwa kokungcola kwezinhlayiya, amapulatifomu e-granite nawo asebenza kahle kakhulu. Amagumbi okuhlanza anezidingo eziphakeme kakhulu zokugcwala kwezinhlayiya ezilenga emoyeni. Isibonelo, emagumbini okuhlanza e-ISO Class 1, inani lezinhlayiya ezingu-0.1μm ezivunyelwe ngemitha eyi-cubic alidluli ku-10. Ngisho noma ipulatifomu yensimbi engagqwali iye yaphathwa ngokupholisha, ingase isakhiqiza imfucumfucu yensimbi noma isikali se-oxide esiqhekeka ngenxa yamandla angaphandle njengokudlidliza kwemishini kanye nokusebenza kwabasebenzi, okungaphazamisa indlela yokukhanya yokuthola noma ukuklwebha ubuso be-wafer. Amapulatifomu e-granite, anesakhiwo sawo esiminyene samaminerali (ubuningi ≥2.7g/cm³) kanye nobunzima obuphezulu (6-7 esikalini se-Mohs), awavamile ukuguguleka noma ukuphuka ngesikhathi sokusetshenziswa isikhathi eside. Izilinganiso ezilinganisiwe zibonisa ukuthi zinganciphisa ukugcwala kwezinhlayiya ezilenga emoyeni wendawo yemishini yokuthola ngaphezu kuka-40% uma kuqhathaniswa namapulatifomu ensimbi engagqwali, okugcina amazinga ebanga legumbi lokuhlanza ngempumelelo.

Ngaphezu kwezici zayo ezihlanzekile, ukusebenza okuphelele kwamapulatifomu e-granite nakho kudlula kakhulu okwensimbi engagqwali. Ngokuphathelene nokuzinza kokushisa, i-coefficient yayo yokwanda kokushisa ingu-(4-8) ×10⁻⁶/℃ kuphela, engaphansi kwengxenye yensimbi engagqwali (cishe i-17×10⁻⁶/℃), okungagcina kangcono ukunemba kokubekwa kwemishini yokuthola lapho izinga lokushisa egumbini elihlanzekile lishintshashintsha. Isici esiphezulu sokudambisa (isilinganiso sokudambisa > 0.05) singanciphisa ngokushesha ukudlidliza kwemishini futhi sivimbele i-probe yokuthola ukuthi inganyakaziswa. Ukumelana kwayo nokugqwala kwemvelo kuyenza ihlale izinzile ngisho noma ivezwe ezincibilikisini ze-photoresist, amagesi okubhoboza kanye namanye amakhemikhali ngaphandle kwesidingo sokuvikelwa okwengeziwe kokumboza.

Njengamanje, amapulatifomu e-granite asetshenziswa kabanzi ezitshalweni zokukhiqiza ama-wafer athuthukile. Idatha ikhombisa ukuthi ngemuva kokusebenzisa ipulatifomu ye-granite, izinga lokwahlulela okungalungile kokutholwa kwezinhlayiya zomphezulu we-wafer lehle ngo-60%, umjikelezo wokulinganisa imishini welulwe kathathu, kanti izindleko zokukhiqiza sezizonke zehle ngo-25%. Njengoba imboni ye-semiconductor iqhubekela phambili ekuqondeni okuphezulu, amapulatifomu e-granite, anezinzuzo zawo eziyinhloko njengokukhishwa kwe-ion yensimbi okungenayo kanye nokungcola kwezinhlayiya okuphansi, azoqhubeka nokunikeza ukwesekwa okuzinzile nokuthembekile kokuhlolwa kwe-wafer, abe amandla abalulekile aqhuba intuthuko yemboni.