Indlela Yokuhlukana Kwe-engeli Iqinisekisa Kanjani Ukunemba Kumapulatifomu Wokuhlola I-Granite?

Emhlabeni wokukhiqiza okunembayo, lapho ukunemba kweleveli ye-nanometer kungenza noma kuphule umkhiqizo, ukucaba kwezinkundla zokuhlola kuma njengesisekelo esibalulekile sokulinganisa okuthembekile. Kwa-ZHHIMG, sichithe amashumi eminyaka sithuthukisa ubuciko nesayensi yokukhiqiza izingxenye zegwadle, sihlanganisa ubuciko bendabuko nobuchwepheshe obusezingeni eliphezulu ukuze silethe izindawo ezisebenza njengesithenjwa sokugcina sezimboni kusukela kokukhiqiza i-semiconductor kuya kubunjiniyela be-aerospace. Indlela yomehluko we-engeli, isisekelo senqubo yethu yokuqinisekisa ikhwalithi, imele umcondo walo msebenzi—ukuhlanganisa ukunemba kwezibalo nobuchwepheshe bokusebenza ukuze kuqinisekiswe ukucaba ngezindlela ezibekela inselele imikhawulo yobuchwepheshe bokulinganisa.

Isayensi Engemuva Kokuqinisekiswa Kwe-Flatness

Izinkundla zokuhlola igwadle, ezivamise ukubizwa ngephutha ngokuthi izinkundla “zemabula” ku-jargon yomkhakha, zakhiwe ngamadiphozithi egwadle akhethiwe akhethelwe ukwakheka kwawo kwekristalu okukhethekile kanye nokuzinza kokushisa. Ngokungafani nezindawo ezisansimbi ezingabonisa ukuwohloka kwepulasitiki ngaphansi kwengcindezi, igwadle lethu elimnyama le-ZHHIMG®—enesisindo esingaba ngu-3100 kg/m³—igcina ubuqotho bayo ngisho nasezimweni ezinzima zezimboni. Le nzuzo yemvelo yakha isisekelo sokunemba kwethu, kodwa ukunemba kweqiniso kudinga ukuqinisekiswa okuqinile kusetshenziswa izindlela ezifana nendlela yokuhlukanisa i-engeli.

Indlela yomehluko we-engeli isebenza ngomgomo olula ngokukhohlisayo: ngokulinganisa ama-engeli athambekele phakathi kwamaphoyinti aseduze endaweni, singakwazi ukwakha kabusha i-topography yayo ngokwezibalo ngokunemba okungavamile. Ochwepheshe bethu baqala ngokubeka ipuleti lebhuloho elinembayo elifakwe ama-inclinometer azwelayo endaweni yegwadle. Ihamba ngokuhlelekile ngamaphethini amise okwenkanyezi noma egridi, irekhoda ukuchezuka kwe-angular ngezikhathi ezichazwe ngaphambilini, idala imephu enemininingwane yokuhlanjululwa kwe-Microscopic yeplathifomu. Lezi zilinganiso ze-angular zibe seziguqulelwa ekuchezukeni komugqa kusetshenziswa izibalo ze-trigonometric, okuveza ukuhluka kwendawo evamise ukuwela ngaphansi kobude begagasi bokukhanya okubonakalayo.

Okwenza le ndlela ibe namandla ikakhulukazi ikhono layo lokusingatha amapulatifomu anefomethi enkulu—ezinye ezingaphezu kwamamitha angu-20 ubude—ngokunemba okungaguquki. Nakuba izindawo ezincane zingase zithembele kumathuluzi okulinganisa aqondile afana nama-laser interferometers, indlela yomehluko we-engeli ihamba phambili ekuthwebuleni ukungqubuzana okucashile okungenzeka kuzo zonke izakhiwo ezinwetshiwe zegwadle. “Sake sahlonza ukuchezuka okungu-0.002mm kuplathifomu engamamitha angu-4 obekungeke kubonakale ngezindlela ezivamile,” kukhumbula u-Wang Jian, udokotela wethu omkhulu we-metrologist onolwazi olungaphezu kweminyaka engama-35. "Lelo zinga lokunemba libalulekile uma wakha okokusebenza kokuhlola i-semiconductor ekala izici ze-nanoscale."

Okuhambisana nendlela yomehluko we-engeli yindlela ye-autocollimator, esebenzisa ukuqondanisa kwe-optical ukuzuza imiphumela efanayo. Ngokubonisa ukukhanya okuhlanganisiwe ezibukweni ezinembile ezifakwe ebhulohweni elinyakazayo, ochwepheshe bethu bangathola izinguquko ze-angular ezincane njengo-0.1 arcsecond—okulingana nokulinganisa ububanzi bezinwele zomuntu kusukela kumakhilomitha angu-2. Le ndlela yokuqinisekisa okukabili iqinisekisa ukuthi yonke inkundla ye-ZHHIMG ihlangabezana noma yeqa izindinganiso zamazwe ngamazwe, okuhlanganisa i-DIN 876 ne-ASME B89.3.7, enikeza amakhasimende ethu ukuzethemba kokusebenzisa izindawo zethu njengezithenjwa eziyinhloko ezinqubweni zawo zokulawula ikhwalithi.

Crafting Precision: Ukusuka Quarry kuya Quantum

Uhambo olusuka ku-granite block ukuya endaweni yokuhlola eqinisekisiwe luwubufakazi bomshado wokuphelela kwemvelo nobuhlakani bomuntu. Inqubo yethu iqala ngokukhetha izinto ezibonakalayo, lapho izazi zesayensi yokwakheka komhlaba zikhetha khona amabhlogo ezinkwalini ezikhethekile esifundazweni saseShandong, ezaziwa ngokukhiqiza igwadle ngendlela efanayo. Ibhulokhi ngayinye ihlolwa nge-ultrasonic ukuze kutholakale ukuphuka okucashile, futhi yilabo kuphela abanemifantu emincane engaphansi kwemithathu ku-cubic meter ngayinye abaqhubekela phambili ekukhiqizeni—okuyizinga elidlula kude izinkambiso zemboni.

Esikhungweni sethu sesimanjemanje eduze neJinan, lawa mabhulokhi aguqulwa ngohlelo lokukhiqiza olulawulwa ngokucophelela. Imishini yokulawula izinombolo zekhompiyutha (CNC) iqale isike igwadle libe phakathi kuka-0.5mm wobukhulu bokugcina, isebenzisa amathuluzi anesihloko sedayimane okufanele ashintshwe njalo emahoreni angu-8 ukuze kugcinwe ukunemba kokusika. Lokhu kubumba kokuqala kwenzeka emakamelweni azinzile izinga lokushisa lapho izimo ze-ambient zigcinwa khona njalo ku-20°C ± 0.5°C, okuvimbela ukwanda kokushisa ukuthi kuthinte izilinganiso.

Ubuciko bangempela buvela ezigabeni zokugcina zokugaya, lapho izingcweti zengcweti zisebenzisa amasu adluliselwa ezizukulwaneni ngezizukulwane. Isebenza ngama-abrasives e-iron oxide alengiswa emanzini, lezi zingcweti zichitha kufika emahoreni angu-120 ziqeda ngesandla imitha-skwele ngayinye yendawo, zisebenzisa umuzwa wazo wokuthinta oqeqeshiwe ukuze zibone ukuchezuka okuncane okungama-microns angu-2. “Kufana nokuzama ukuzwa umehluko phakathi kwamaphepha amabili ahlanganiswe ndawonye uma kuqhathaniswa namathathu,” kuchaza uLiu Wei, umshini wokugaya wesizukulwane sesithathu osize ekukhiqizeni izinkundla zeJet Propulsion Laboratory yeNASA. Ngemva kweminyaka engu-25, iminwe yakho iba nenkumbulo yokuphelela.

Le nqubo eyenziwa mathupha akuyona nje eyendabuko—ibalulekile ukuze kufinyelelwe isiphetho sezinga le-nanometer elidingwa amakhasimende ethu. Ngisho nezigayi ze-CNC ezithuthukisiwe, ukungahleliwe kwesakhiwo sekristalu segwadle kudala iziqongo nezigodi ezincane okungaba lula ukuzwisisa komuntu okungaguquguquki. Izingcweti zethu zisebenza ngababili, zishintshana phakathi kwezikhathi zokugaya nokulinganisa zisebenzisa i-German Mahr imitha yemizuzu eyizinkulungwane eziyishumi (ukulungiswa okungu-0.5μm) kanye namazinga kagesi e-Swiss WYLER, iqinisekisa ukuthi ayikho indawo edlula ukubekezelelana kwethu okuqinile kwe-flatness okungu-3μm/m kumapulatifomu avamile kanye no-1μm/m ukuze uthole amamaki anemba.

Ngale Kwendawo: Ukulawulwa Kwemvelo Nokuphila Isikhathi Eside

Inkundla yegwadle enembayo ithembekile kuphela njengendawo esebenza kuyo. Ngokubona lokhu, sithuthukise esikholelwa ukuthi enye yezindawo zokusebenzela ezithuthuke kakhulu zezinga lokushisa eliqhubekayo kanye nomswakamo (izinkundla zokusebenzela ezilawulwa izinga lokushisa nomswakama), ezithatha ngaphezu kuka-10,000 m² endaweni yethu enkulu. Lawa magumbi anokhonkolo oyimitha elingu-1 ubukhulu obugqinsi obuqinile obuhlukaniswe umsele ophikisana nokuzamazama komhlaba ongu-500mm-wide (imisele edambisa ukudlidliza) futhi asebenzisa okhreni abaphezulu abathulile abanciphisa ukuphazamiseka okuzungezile—izinto ezibalulekile uma kulinganiswa ukuchezuka kuncane kunegciwane.

Imingcele yezemvelo lapha ayifinyeleli ngokwedlulele: ukuhlukahluka kwezinga lokushisa kukhawulelwe ku-±0.1°C ngamahora angu-24, umswakama ophethwe ku-50% ± 2%, kanye nezibalo zezinhlayiya zomoya ezigcinwe kumazinga e-ISO 5 (izinhlayiya ezingaphansi kuka-3,520 zika-0.5μm noma ezinkulu nge-cubic meter ngayinye). Izimo ezinjalo aziqinisekisi kuphela izilinganiso ezinembile ngesikhathi sokukhiqiza kodwa futhi zilingisa izindawo ezilawulwayo lapho izinkundla zethu zizosetshenziswa ekugcineni. “Sivivinya yonke inkundla ngaphansi kwezimo ezinzima kunalokho amakhasimende amaningi azoke ahlangabezane nazo,” kuphawula uZhang Li, uchwepheshe wethu wobunjiniyela bezemvelo. "Uma inkundla igcina uzinzile lapha, izokwenza noma kuphi emhlabeni."

Lokhu kuzibophezela ekulawuleni imvelo kudlulela nasezinqubweni zethu zokupakisha nezokuthutha. Iplatifomu ngayinye isongwe ngogqinsi lwegwebu elingu-1cm ugqinsi futhi ivikelwe ngamakhreyithi enziwe ngokwezifiso enziwe ngokhuni ahlanganiswe nezinto ezidambisa ukudlidliza, bese ithuthwa ngezithwali ezikhethekile ezifakwe izinhlelo zokumisa ukugibela komoya. Siqapha ngisho nokushaqeka nezinga lokushisa ngesikhathi sokuthutha sisebenzisa izinzwa ze-IoT, sinikeza amaklayenti umlando ophelele wezemvelo womkhiqizo wawo ngaphambi kokuba uphume endaweni yethu.

Umphumela wale ndlela yokucophelela uwumkhiqizo onempilo yesevisi eyingqayizivele. Nakuba izilinganiso zomkhakha ziphakamisa ukuthi inkundla yegwadle ingase idinge ukulinganiswa kabusha ngemva kweminyaka engu-5–7, amakhasimende ethu ngokuvamile abika ukusebenza okuzinzile iminyaka engu-15 noma ngaphezulu. Lokhu kuphila isikhathi eside akuveli nje kuphela ekuzinzeni okungokwemvelo kwegwadle kodwa futhi kusukela ezinqubweni zethu zobunikazi zokukhulula ukucindezeleka, ezibandakanya amabhulokhi okuguga ngokwemvelo okungenani izinyanga ezingu-24 ngaphambi komshini. “Sibe nekhasimende elibuyisele inkundla ukuze ihlolwe ngemva kweminyaka engu-12,” kukhumbula umphathi wokulawula ikhwalithi u-Chen Tao. “Ukucaba kwayo kwase kushintshe ngo-0.8μm nje—ngokwencazelo yethu yasekuqaleni yokubekezelela. Lowo umehluko we-ZHHIMG.”

Ukusetha Izinga: Izitifiketi Nokuqashelwa Kwembulunga yonke

Embonini lapho izimangalo zokunemba zivamile, ukuqinisekiswa okuzimele kukhuluma kakhulu. I-ZHHIMG iyaziqhenya ngokuba ukuphela komkhiqizi emkhakheni wethu ophethe ngesikhathi esisodwa izitifiketi ze-ISO 9001, ISO 45001, ne-ISO 14001, umehluko obonisa ukuzibophezela kwethu kukhwalithi, ukuphepha kwendawo yokusebenza, nokuzibophezela kwezemvelo. Imishini yethu yokulinganisa, ehlanganisa i-German Mahr ne-Japanese Mitutoyo amathuluzi, ihlolwa minyaka yonke yi-Shandong Provincial Institute of Metrology, ngokulandeleka kumazinga kazwelonke agcinwa ngokucwaningwa kwamabhuku okuvamile.

Lezi zitifiketi zivule iminyango yokubambisana nezinye zezinhlangano ezifuna kakhulu emhlabeni. Kusukela ekunikezeni izisekelo zegwadle zemishini ye-Samsung's semiconductor lithography kuya ekunikezeni izindawo eziyisethenjwa ze-Germany's Physikalisch-Technische Bundesanstalt (PTB), izingxenye zethu zidlala indima ethule kodwa ebalulekile ekuthuthukiseni ubuchwepheshe bomhlaba wonke. “Ngesikhathi abakwa-Apple beza kithi ukuze bathole izinkundla ezinembayo ukuze bahlole izingxenye zabo zamahedisethi e-AR, bebengafuni nje umphakeli—babefuna umlingani ongaqonda izinselele zabo zokulinganisa ezihlukile,” kusho umqondisi wezentengiso wamazwe ngamazwe uMichael Zhang. "Ikhono lethu lokwenza ngokwezifiso inkundla ebonakalayo kanye nenqubo yokuqinisekisa kwenze umehluko."

Mhlawumbe okunenjongo kakhulu ukuqashelwa okuvela ezikhungweni zemfundo ephakeme ezihamba phambili ocwaningweni lwe-metrology. Ukusebenzisana nenyuvesi Kazwelonke yase-Singapore kanye neNyuvesi yase-Stockholm yase-Sweden kusisize ukuba silungise indlela yethu yokuhluka kwe-engeli, kuyilapho amaphrojekthi ahlangene neNyuvesi yase-China yase-Zhejiang eqhubeka nokuphusha imingcele yalokho okungakaleka. Lobu budlelwano buqinisekisa ukuthi amasu ethu ashintshashintsha ngokuhambisana nobuchwepheshe obusafufusa, ukusuka kukhompyutha ye-quantum kuya ekukhiqizeni amabhethri esizukulwaneni esilandelayo.

i-granite block yezinhlelo ezizenzakalelayo

Njengoba sibheke esikhathini esizayo, izimiso eziyisisekelo zomehluko we-engeli zihlala zibalulekile njengakuqala. Esikhathini sokwanda kokuzenzakalela, sithole ukuthi izilinganiso ezithembeke kakhulu zisavela ekuhlanganiseni ubuchwepheshe obuthuthukisiwe nolwazi lwabantu. Izigayi zethu eziyinhloko, ezinekhono “lokuzwa” ama-microns of deviation, zisebenza eduze kwesistimu yokuhlaziya idatha enikwe amandla e-AI acubungula izinkulungwane zamaphoyinti okulinganisa ngemizuzwana. Lokhu kusebenzisana—okudala nokusha, okomuntu kanye nomshini—kuchaza indlela yethu yokunemba.

Konjiniyela nochwepheshe bekhwalithi abanikezwe umsebenzi wokuqinisekisa ukunemba kwemikhiqizo yabo, ukukhetha kwenkundla yokuhlola kuyisisekelo. Akukhona nje mayelana nokucaciswa komhlangano kodwa mayelana nokusungula indawo eyinkomba abangalethemba ngokuphelele. Kwa-ZHHIMG, asakhi nje izinkundla zegwadle—sakha ukuzethemba. Futhi ezweni lapho ukulinganisa okuncane kakhulu kungaba nomthelela omkhulu, lokho kuqiniseka kuyikhona konke.


Isikhathi sokuthumela: Nov-03-2025