Ukuzinza nokunemba kwanoma imuphi umshini onemba kakhulu—kusuka eMishini Yokulinganisa emikhulu ye-Coordinate Measuring (CMMs) ukuya kumishini ethuthukisiwe ye-semiconductor lithography—ngokuyisisekelo kusekelwe phezu kwesisekelo sayo segwadle. Uma usebenzisana nezisekelo ze-monolithic zesikali esibalulekile, noma ama-Panel Flat Flat anezigaba eziningi ze-Granite, inqubo yokuhlanganisa nokufaka ibaluleke kakhulu njengokunemba kokukhiqiza ngokwayo. Ukubeka nje iphaneli eqediwe akwanele; izidingo ezithile zemvelo nesakhiwo kufanele kuhlangatshezwane nazo ukuze kulondolozwe futhi kusetshenziswe ukucaba kwe-micron sub-micron okuqinisekisiwe kwephaneli.
1. Isisekelo: I-Substrate Ezinzile, Yezinga
Umbono oyiphutha ovame kakhulu ukuthi iphaneli yegwadle enembayo, njengaleyo eyakhiwe nge-ZHHIMG® Black Granite yethu (3100 kg/m³), ingalungisa iphansi elingazinzile. Nakuba i-granite inikeza ukuqina okukhethekile, kufanele isekelwe isakhiwo esiklanyelwe ukuchezuka okuncane kwesikhathi eside.
Indawo yomhlangano kufanele ibe nesisekelo sikakhonkolo esingesona izinga kuphela kodwa esilulaphe ngendlela efanele, ngokuvamile esinqumweni sezinga lezempi ngokujiya nokuminyana—okufanekisela ugqinsi luka-$1000mm$, amaphansi kakhonkolo aqine kakhulu emahholo omhlangano e-ZHHIMG uqobo. Okubaluleke kakhulu, le substrate kufanele ihlukaniswe nemithombo yokudlidliza yangaphandle. Eklanyweni yezisekelo zethu ezinkulu zemishini, sihlanganisa imiqondo efana nomsele onqanda ukudlidliza ozungeze amagumbi ethu e-metrology ukuze siqinisekise ukuthi isisekelo ngokwaso simile futhi sihlukene.
2. Isendlalelo Sokuhlukaniswa: Ukugxusha nokubeka izinga
Ukuxhumana okuqondile phakathi kwephaneli ye-granite kanye nesisekelo sokhonkolo kugwenywe ngokuqinile. Isisekelo segwadle kufanele sisekelwe kumaphuzu athile, abalwe ngokwezibalo ukuze kungakhathaleki ukucindezeleka kwangaphakathi nokugcina ijometri yayo eqinisekisiwe. Lokhu kudinga isistimu yokulinganisa esezingeni eliphezulu kanye nongqimba lwe-grouting.
Uma iphaneli isibekwe kahle kusetshenziswa ojeke noma amaweji okulinganisa alungisekayo, i-grout enamandla amakhulu, enganciphisi, enembile iphonswa emgodini phakathi kwegwadle ne-substrate. Le grout eyisipesheli yelapha ukuze yakhe ukuminyana okuphezulu, ukusebenzelana okufanayo okusabalalisa unomphela isisindo sephaneli ngokulinganayo, ivimbele ukuntengantenga noma ukuhlanekezela okungase kwethule ukucindezelwa kwangaphakathi futhi konakalise ukuvuleka ngokuhamba kwesikhathi. Lesi sinyathelo siguqula ngempumelelo iphaneli yegwadle kanye nesisekelo sibe yisisindo esisodwa, esihlangene, nesiqinile.
3. I-Thermal and Temporal Equilibrium
Njengawo wonke umsebenzi we-metrology onembe kakhulu, ukubekezela kubalulekile. Iphaneli yegwadle, i-grouting, kanye ne-substrate ekhonkolo kufanele konke kufinyelele ukulingana okushisayo nendawo yokusebenza ezungezile ngaphambi kokuhlolwa kokugcina kokuqondanisa kokwenziwa. Le nqubo ingathatha izinsuku kumaphaneli amakhulu kakhulu.
Ngaphezu kwalokho, ukulungisa izinga—okwenziwa kusetshenziswa amathuluzi afana nama-laser interferometers namazinga kagesi—kufanele kwenziwe ngokunensa, ngokunyuka kwamaminithi, okuvumela isikhathi sokuzinza kwezinto. Ochwepheshe bethu abangochwepheshe, abathobela izindinganiso eziqinile ze-metrology yomhlaba (i-DIN, ASME), bayaqonda ukuthi ukusheshisa ukulinganisa kokugcina kungethula ingcindezi ecashile, ezovela ngokuhamba kwesikhathi njengokunemba kokunemba.
4. Ukuhlanganiswa Kwezingxenye kanye Nokuhlanganiswa Kwezifiso
Ezingxenyeni zeGranite zangokwezifiso ze-ZHHIMG noma Amaphaneli e-Granite Flat ahlanganisa amamotho aqondile, ama-air bearings, noma ama-CMM rails, umhlangano wokugcina udinga ukuhlanzeka okuphelele. Amakamelo ethu okuhlanganisa ahlanzekile, alingisa indawo yemishini ye-semiconductor, ayadingeka ngoba ngisho nezinhlayiya zothuli ezincane ezivaleleke phakathi kwegwadle nengxenye yensimbi zingadala ukuchezuka okuncane. Yonke i-interface kufanele ihlanzwe ngokucophelela futhi ihlolwe ngaphambi kokuqiniswa kokugcina, kuqinisekiswe ukuthi ukuqina kwengxenye kudluliselwa ngokungenasici ohlelweni lomshini ngokwalo.
Ngokuhlonipha lezi zidingo eziqinile, amakhasimende aqinisekisa ukuthi awagcini nje ngokufaka ingxenye ethile, kodwa achaza ngempumelelo i-Datum yokugcina imishini yawo enembe kakhulu—isisekelo esiqinisekiswa isayensi yezinto ezibonakalayo ye-ZHHIMG nobuchule bokukhiqiza.
Isikhathi sokuthumela: Oct-29-2025