Emasimini afana nokukhiqizwa kwe-semiconductor kanye namathuluzi okulinganisa ngokunemba, ukunemba kwamapulatifomu okunemba kwe-granite kunquma ngqo ikhwalithi yokusebenza kwemishini. Ukuqinisekisa ukuthi ukunemba kwepulatifomu kuhlangabezana nezindinganiso, imizamo kufanele yenziwe ngezici ezimbili: ukutholakala kwezinkomba ezibalulekile kanye nokuhambisana nezindinganiso ezijwayelekile.
Ukutholwa kwesikhombisi esiyinhloko: Ukulawulwa kokunemba okunezinhlangothi eziningi
Ukutholwa kokuthamba: Ukunquma "ukuthamba" kwendiza yokubhekisela
Ukuthamba kuyisibonakaliso esiyinhloko samapulatifomu okunemba kwe-granite, futhi ngokuvamile kulinganiswa ngama-interferometer e-laser noma amazinga e-elekthronikhi. I-interferometer ye-laser ingalinganisa ngokunembile ama-undulation amaminithi ebusweni bepulatifomu ngokukhipha umsebe we-laser nokusebenzisa isimiso sokuphazamiseka kokukhanya, ngokunemba okufinyelela ezingeni le-sub-micron. Izinga le-elekthronikhi lilinganisa ngokuhamba izikhathi eziningi futhi lidweba imephu ye-contour enezinhlangothi ezintathu ebusweni bepulatifomu ukuthola ukuthi kukhona yini ukuvela kwendawo noma ukugoba. Isibonelo, amapulatifomu e-granite asetshenziswa emishinini ye-semiconductor photolithography kudingeka abe nokuthamba okungu-±0.5μm/m, okusho ukuthi umehluko wokuphakama ngaphakathi kobude bemitha eli-1 akufanele udlule isigamu se-micrometer. Kuphela ngemishini yokuthola ngokunemba okuphezulu lapho le nqubo eqinile ingaqinisekiswa khona.
2. Ukutholwa kokuqonda: Qinisekisa "ukuqonda" kokunyakaza okuqondile
Kumapulatifomu aphethe izingxenye ezihambayo ngokunemba, ukunemba kubaluleke kakhulu. Izindlela ezivamile zokuthola indlela yocingo noma i-laser collimator. Indlela yocingo ihilela ukubopha izintambo zensimbi ezinemba kakhulu nokuqhathanisa igebe phakathi kobuso bepulatifomu nezintambo zensimbi ukuze kutholakale ukunemba. I-laser collimator isebenzisa izici zokusabalalisa eziqondile ze-laser ukuze ithole iphutha eliqondile lobuso bokufakwa kwesitimela somhlahlandlela wepulatifomu. Uma ukunemba kungahlangabezani nezindinganiso, kuzokwenza ukuthi imishini ishintshe ngesikhathi sokunyakaza, kuthinte ukunemba kokucubungula noma kokulinganisa.
3. Ukutholwa kobulukhuni bomphezulu: Qinisekisa ukuthi "ubuhle" bokuxhumana
Ubulukhuni bomphezulu wepulatifomu buthinta ukulingana kokufakwa kwezingxenye. Ngokuvamile, imitha yobulukhuni be-stylus noma i-microscope ebonakalayo isetshenziselwa ukuthola. Ithuluzi lohlobo lwe-stylus liqopha izinguquko zokuphakama kwephrofayili encane ngokuxhumana nobuso bepulatifomu nge-probe encane. Ama-microscope abonakalayo angabona ngqo ukuthungwa komphezulu. Ezisetshenzisweni ezinembe kakhulu, ubulukhuni bomphezulu wamapulatifomu e-granite kudinga ukulawulwa ku-Ra≤0.05μm, okulingana nomphumela ofana nesibuko, ukuqinisekisa ukuthi izingxenye ezinembe zilingana kahle ngesikhathi sokufakwa futhi kugwenywe ukudlidliza noma ukufuduka okubangelwa yizikhala.
Izindinganiso zokunemba ziyalandela: izindinganiso zomhlaba wonke kanye nokulawulwa kwangaphakathi kwebhizinisi
Njengamanje, emhlabeni jikelele, amazinga e-ISO 25178 kanye ne-GB/T 24632 avame ukusetshenziswa njengesisekelo sokunquma ukunemba kwamapulatifomu e-granite, futhi kunezigaba ezicacile zezinkomba ezifana nokuthamba kanye nokuqondile. Ngaphezu kwalokho, amabhizinisi okukhiqiza aphezulu avame ukubeka amazinga okulawula angaphakathi aqinile. Isibonelo, isidingo sokuthamba kwepulatifomu ye-granite yomshini we-photolithography siphakeme ngo-30% kunendinganiso yamazwe ngamazwe. Lapho kwenziwa izivivinyo, idatha elinganisiwe kufanele iqhathaniswe nezindinganiso ezihambisanayo. Amapulatifomu kuphela ahambisana ngokugcwele nezindinganiso angaqinisekisa ukusebenza okuzinzile emishinini yokunemba.
Ukuhlola ukunemba kwamapulatifomu okunemba kwe-granite kuyiphrojekthi ehlelekile. Kuphela ngokuhlola ngokuqinile izinkomba eziyinhloko ezifana nokuba yisicaba, ukunemba, kanye nokuba lukhuni kwendawo, kanye nokunamathela ezindinganisweni zomhlaba wonke nezebhizinisi, lapho ukunemba okuphezulu nokuthembeka kwepulatifomu kungaqinisekiswa, kubeke isisekelo esiqinile samasimu okukhiqiza aphezulu njenge-semiconductors kanye nezinsimbi zokunemba.
Isikhathi sokuthunyelwe: Meyi-21-2025