Kumadivayisi we-semiconductor, yiziphi izinhlelo ezingaphansi eziyinhloko ezisetshenziswa kakhulu i-granite?

I-Granite ingenye yezinto ezithandwa kakhulu ezisetshenziswa kumadivayisi we-semiconductor.Iwuhlobo lwamatshe aqinile, avuthayo afika ngemibala ehlukahlukene empunga, ebomvana, namhlophe.I-Granite yaziwa ngokuhlala kwayo isikhathi eside, i-coefficient ephansi yokwandisa ukushisa okushisayo, kanye ne-thermal conductivity enhle kakhulu, okuyenza ibe into efanelekile ukuthi isetshenziswe kumasistimu angaphansi wedivayisi ye-semiconductor.

Enye yezinhlelo ezingaphansi eziyinhloko ezisebenzisa i-granite kumadivayisi we-semiconductor wukuphatha ama-wafer kanye ne-subsystem yokucubungula.Lesi simiso esingaphansi sidlala indima ebalulekile enqubweni yokukhiqiza amadivaysi e-semiconductor.I-wafer iyindawo engaphansi yokuqala yocingo, futhi uhlelo olungaphansi lokusingatha nokucubungula lunesibopho sokudlulisa amawafa phakathi kwamagumbi ahlukene nezinto zokusebenza.I-Granite isetshenziselwa ukudala izindawo zokubamba eziyisicwecwana ezinembe kakhulu futhi inikeza inkundla ezinzile yokucutshungulwa kwe-wafer.

Olunye uhlelo olungaphansi olubalulekile olusebenzisa i-granite i-vacuum subsystem.Kumadivayisi we-semiconductor, amakamelo okugcoba asetshenziselwa ukugwema ukungcoliswa ngesikhathi sokukhiqiza.Ukuze lolu hlelo lusebenze ngokuphumelelayo, igumbi kufanele livalwe ngokuphelele, okuyilapho i-granite ingena khona. I-Granite iyinto efanelekile yamakamelo e-vacuum ngoba inamazinga aphansi kakhulu okukhipha umoya futhi ingagcina indawo ehlanzekile ye-vacuum ezinzile.Ukwengeza, ukunemba okuphezulu kwe-granite kuvumela ukwakhiwa kwesigxivizo esiphelele, okuhlinzeka ngendawo ethembekile ye-vacuum yokucubungula i-wafer.

Isistimu engaphansi yokuqondanisa ingenye isistimu ebucayi esebenzisa izakhiwo ezihlukile zegwadle.Lesi simiso esingaphansi sinesibopho sokuqondanisa izingxenye ezihlukene zamadivayisi we-semiconductor ngokunemba nokunemba.I-Granite isetshenziselwa ukuklama nokwakhiwa kwezigaba zokuqondanisa ukuze kuqinisekiswe ukuqina okuphezulu nokuzinza.Ukuqina okuphezulu kwe-granite kusiza ekufinyeleleni ukunemba okuphezulu kokuqondanisa, okuholela ekukhiqizeni amadivaysi e-semiconductor anembe kakhulu futhi anokwethenjelwa.

Okokugcina, i-subsystem ye-metrology ingenye isistimu ye-semiconductor yemishini esebenzisa igwadle.I-Metrology idlala indima ebalulekile ekucutshungulweni kwe-wafer, futhi ukunemba kwalolu hlelo oluncane lubalulekile ekuqinisekiseni ikhwalithi yedivayisi.I-Granite inikeza inkundla ezinzile futhi eqinile esiza ekwehliseni ukudlidliza kanye nokunciphisa umthelela wokushintshashintsha kwezinga lokushisa.Lokhu, nakho, kusiza ekuzuzeni izilinganiso ezinembe kakhulu kusistimu engaphansi ye-metrology, okuholela ekukhiqizweni kwamadivayisi wekhwalithi ephezulu we-semiconductor.

Sengiphetha, i-granite iyinto ebalulekile ekukhiqizeni amadivaysi e-semiconductor.Izakhiwo zayo ezihlukile ezinjengokuqina okuphezulu, ukunwetshwa kwe-thermal okuphansi, kanye nokuqhutshwa kokushisa okuhle kakhulu kuyenza ibe into enhle kakhulu yamasistimu angaphansi ambalwa kumadivayisi we-semiconductor, okuhlanganisa ukuphatha nokucutshungulwa kwe-wafer, i-vacuum subsystem, i-subsystem yokuqondanisa, kanye ne-subsystem ye-metrology.Ngaphezu kwalokho, ukusetshenziswa kwe-granite kumadivayisi we-semiconductor kuye kwasiza ekukhiqizeni amadivaysi anembe kakhulu, athembekile futhi asebenza kahle aguqule izimboni eziningi.