IGranite ingenye yezinto ezithandwa kakhulu ezisetshenziswa kumadivayisi we-semiconductor. Kuluhlobo lwedwala elinzima, elinenkinga eliza ngemithunzi ehlukene yempunga, epinki, futhi emhlophe. I-Granite yaziwa ngokuqina kwayo, ukunwebeka okuphansi kokunwebeka, nokusebenza kahle okushisayo okushisayo, okwenza kube yinto efanelekile yokusebenzisa in semiconductor device sysystems.
Enye yezindlela ezingaphansi kwama-subsystems asebenzisa i-granite kumadivayisi we-semiconductor ukuphathwa kwe-wafer nokucubungula okungaphansi. Le subsystem idlala indima ebalulekile enqubweni yokukhiqiza yamadivayisi we-semiconductor. I-wafer iyisigatshana sokuqala sedivayisi, futhi ukuphatha kanye nokusebenza okuphansi kanye nokusebenza okuhlosiwe kubhekele ukudlulisa ama-wafers phakathi kwamakamelo ahlukene nemishini yokucubungula. I-Granite isetshenziselwa ukudala indawo eqondile yokuphatha ye-wafer ethambile futhi inikezela ngeplatifomu ezinzile zokucubungula.
Enye into ebalulekile engaphansi esebenzisa i-granite yi-vacuum subsystem. Kumadivayisi we-semiconductor, kusetshenziselwa amakamelo we-vacuum ukugwema ukungcoliswa ngesikhathi sokukhiqiza. Kulolu hlelo ukusebenza ngempumelelo, iChamber kumele ivalwe ngokuphelele, okuyilapho i-Granite ingena khona. I-Granite ingukuqukethwe okuhle kwamakamelo we-vacuum ngoba inamazinga okuphuma aphansi kakhulu futhi angagcina imvelo eguqukayo ephansi kakhulu futhi ingagcina imvelo yezingubo ezizinzile. Ngokwengeziwe, ukucaciswa kwama-granite (ama-granite's Highling Ukucacisa kuvumela ukwakhiwa kwesilo esiphelele, ukuhlinzeka indawo ethembekile ye-vacuum ukuze icubungulwe.
I-alignment subsystem ngolunye uhlelo olubucayi olusebenzisa izakhiwo ezihlukile zikaGranite. Lesi sakhiwo esiphansi sinesibopho sokuvumelanisa izingxenye ezahlukahlukene zamadivayisi we-semiconductor ngokunemba nokunemba. IGranite isetshenziswa ekwakhiweni nasekwakhiweni kwezinye izigaba zokuqondanisa ukuqinisekisa ubulukhuni obukhulu nokuqina. Ukuqina okuphezulu kwe-granite kusiza ekufezeni ukunemba okuphezulu, okuholela ekukhiqizweni kwamadivayisi aqondile futhi athembekile we-semiconductor.
Ekugcineni, i-subsystem ye-metrology ingelinye uhlelo lwamadivayisi we-semiconductor asebenzisa i-granite. IMetrology idlala indima ebalulekile ekucutshungweni kwe-wafer, futhi ukunemba kwalesi sihloko esiphansi kubalulekile ekuqinisekiseni ikhwalithi yedivayisi. IGranite ihlinzeka ngeplanethi eqinile neqinile esisiza ekunciphiseni ukudlidliza futhi incishise umphumela wokushintshashintsha kwezinga lokushisa. Lokhu, nakho, kusiza ekufezeni izilinganiso ezinembe kakhulu ku-metrology subsystem, okuholela ekukhiqizweni kwamadivayisi we-semiconductor asezingeni eliphakeme.
Ekuphetheni, i-Granite iyisitayela esibalulekile ekwenziweni kwamadivayisi we-semiconductor. Izakhiwo ezihlukile njengokuqina okukhulu, ukunwebeka okuphansi okushisayo, futhi ukuqhutshwa okuhle kakhulu okushisayo kwenza kube yinto enhle kakhulu yezinto eziguqukayo eziningana kumadivayisi we-semiconductor, kufaka phakathi ukuphathwa okuhlosiwe kwe-semicenductor, kanye nokuqondanisa okuhlosiwe kwe-subsystem. Ngaphezu kwalokho, ukusetshenziswa kwe-granite kumadivayisi we-semiconductor kusizile ekukhiqizweni kwamadivayisi anembile kakhulu, athembekile futhi asebenza kahle aguqule izimboni eziningi.
Isikhathi Sokuthumela: Mar-19-2024