Amapulatifomu okunemba kwe-granite, anokuqina okuphezulu, i-coefficient yokukhulisa ephansi, ukusebenza kahle kokudambisa kanye nezakhiwo zemvelo zokulwa nogesi, anenani lokusetshenziswa elingenakuphikwa emikhakheni yokukhiqiza ephezulu kanye nocwaningo lwesayensi lapho ukunemba nokuzinza kudingwa khona kakhulu. Lokhu okulandelayo yizimo zokusetshenziswa kwayo eziyinhloko kanye nezinzuzo zobuchwepheshe:
I. Insimu yemishini yokucubungula enembile kakhulu
Imishini yokukhiqiza i-semiconductor
Izimo zokusetshenziswa: Itafula lomsebenzi womshini we-Lithography, isisekelo somshini wokusika i-wafer, ipulatifomu yokubeka imishini yokupakisha.
Inani lobuchwepheshe:
I-coefficient yokwanda kokushisa kwe-granite ingu-(0.5-1.0) ×10⁻⁶/℃ kuphela, engamelana nokushintshashintsha kwezinga lokushisa ngesikhathi sokuchayeka kwe-nanoscale komshini we-lithography (iphutha lokufuduka < 0.1nm endaweni engu-±0.1℃).
Isakhiwo sangaphakathi se-micro-pore sakha i-damping yemvelo (isilinganiso se-damping esingu-0.05 kuya ku-0.1), sicindezela ukudlidliza (i-amplitude < 2μm) ngesikhathi sokusika ngesivinini esikhulu ngomshini wokusika nokuqinisekisa ukuthi i-Ra enqenqemeni yokusika kwe-wafer ingaphansi kuka-1μm.
2. Imishini Yokugaya Ngokuqondile kanye Nemishini Yokulinganisa Ehlanganisiwe (i-CMM)
Icala lesicelo:
Isisekelo somshini wokulinganisa onama-coordinate amathathu sisebenzisa isakhiwo se-granite esihlanganisiwe, esinobucaba obungu-±0.5μm/m. Uma sihlanganiswe nesitimela sokuqondisa esintanta emoyeni, sifinyelela ukunemba kokunyakaza kwezinga elincane (ukunemba kokubeka okuphindaphindiwe okungu-±0.1μm).
Ithebula lokusebenza lomshini wokugaya we-optical lisebenzisa isakhiwo esihlanganisiwe se-granite nensimbi yesiliva. Uma kugaywa ingilazi ye-K9, ukujiya kobuso kungaphansi kuka-λ/20 (λ=632.8nm), okuhlangabezana nezidingo zokucubungula ezibushelelezi kakhulu zamalensi e-laser.
Ii. Insimu Yezokukhanya Nezithombe
Amatheleskopu ezinkanyezi kanye nezinhlelo ze-laser
Izinhlelo zokusebenza ezijwayelekile:
Ipulatifomu yokusekela yendawo yokubonakalisa yetheleskopu enkulu yomsakazo isebenzisa isakhiwo se-granite honeycomb, esilula ngesisindo saso (ubuningi obungu-2.7g/cm³) futhi sinokumelana okunamandla kokudlidliza komoya (ukuguquguquka < 50μm ngaphansi komoya osezingeni eli-10).
Ipulatifomu yokukhanya ye-laser interferometer isebenzisa i-granite enezimbobo ezincane. I-reflector iqiniswa yi-vacuum adsorption, enephutha lokuba flatness elingaphansi kuka-5nm, okuqinisekisa ukuzinza kokuhlolwa kokukhanya okunembile kakhulu njengokutholwa kwamagagasi adonsela phansi.
2. Ukucubungula izingxenye ezibonakalayo ngokunemba
Izinzuzo zobuchwepheshe:
Ukuvuleka kwamagnetic kanye nokuqhuba kukagesi kwepulatifomu yegranite kuseduze no-zero, kugwema ithonya lokuphazamiseka kwe-electromagnetic ezinqubweni zokunemba ezifana nokupholisha kwe-ion beam (IBF) kanye nokupholisha kwe-magnetorheological (MRF). Inani le-PV lokunemba komumo wobuso belensi ye-asphical ecutshunguliwe lingafinyelela ku-λ/100.
Iii. Ukuhlolwa Kwezindiza Nokucophelela
Ipulatifomu yokuhlola izingxenye zezindiza
Izimo zokusetshenziswa: Ukuhlolwa kwezinhlangothi ezintathu kwezinsika zezindiza, ukulinganiswa kokubekezelela ukuma kanye nesikhundla sezingxenye zesakhiwo se-aluminium alloy yezindiza.
Ukusebenza okubalulekile:
Ubuso beplatifomu yegranite buphathwa ngokugqwala kwe-electrolytic ukuze kwakhiwe amaphethini amancane (anobulukhuni be-Ra 0.4-0.8μm), afanelekela ama-trigger probes anokunemba okuphezulu, kanti iphutha lokuthola iphrofayili ye-blade lingaphansi kwama-5μm.
Ingamelana nomthwalo wezingxenye zezindiza ezingaphezu kuka-200kg, futhi ushintsho lokuba yisicaba ngemva kokusetshenziswa isikhathi eside lungaphansi kuka-2μm/m, okuhlangabezana nezidingo zokugcinwa ngokunemba kweBanga le-10 embonini yezindiza.
2. Ukulinganiswa kwezingxenye zokuzulazula ezingenayo i-inertial
Izidingo zobuchwepheshe: Ukulinganiswa okungaguquki kwamadivayisi angenawo amandla njenge-gyroscopes kanye ne-accelerometer kudinga ipulatifomu yokubhekisela eqinile kakhulu.
Isixazululo: Ipulatifomu ye-granite ihlanganiswe nesistimu yokuhlukanisa ukudlidliza esebenzayo (imvamisa yemvelo < 1Hz), ifinyelela ukulinganiswa okunembile okuphezulu kokuqina kwe-zero-offset kwezingxenye ze-inertial < 0.01°/h endaweni enokusheshisa kokudlidliza < 1×10⁻⁴g.
Iv. I-Nanotechnology kanye ne-Biomedicine
Ipulatifomu ye-scan probe microscope (SPM)
Umsebenzi oyinhloko: Njengesisekelo se-atomic force microscopy (AFM) kanye ne-scanning tunneling microscopy (STM), idinga ukuhlukaniswa nokudlidliza kwemvelo kanye nokukhukhuleka kokushisa.
Izinkomba zokusebenza:
Ipulatifomu yegranite, ihlanganiswe nemilenze yokuhlukanisa ukudlidliza komoya, inganciphisa izinga lokudlulisa ukudlidliza kwangaphandle (1-100Hz) libe ngaphansi kuka-5%, ifinyelele ekuthathweni kwezithombe ze-AFM ezingeni le-athomu endaweni ezungezile (isixazululo < 0.1nm).
Ukuzwela kwezinga lokushisa kungaphansi kuka-0.05μm/℃, okuhlangabezana nezidingo zokubuka amasampula ebhayoloji ngesilinganiso esincane endaweni yokushisa engaguquki (37℃±0.1℃).
2. Imishini yokupakisha ye-biochip
Icala Lokusebenza: Ipulatifomu yokuqondanisa enembile kakhulu yama-chip okulandelana kwe-DNA isebenzisa imigqa yokuqondisa entanta emoyeni ye-granite, enokunemba kokubeka okungu-±0.5μm, okuqinisekisa ukubopha kwe-sub-micron phakathi kwesiteshi se-microfluidic kanye ne-electrode yokuthola.
V. Izimo Zokusebenza Ezivelayo
Isisekelo semishini yekhompyutha ye-Quantum
Izinselele zobuchwepheshe: Ukuphathwa kwe-Qubit kudinga amazinga okushisa aphansi kakhulu (izinga le-mK) kanye nendawo yomshini eqinile kakhulu.
Isixazululo: Impahla yokukhulisa ukushisa ephansi kakhulu ye-granite (izinga lokukhulisa < 1ppm kusuka ku--200℃ kuya ekushiseni kwegumbi) ingahambisana nezici zokufinyela zama-magnets e-superconducting okushisa okuphansi kakhulu, okuqinisekisa ukunemba kokuqondanisa ngesikhathi sokupakisha ama-chip e-quantum.
2. Uhlelo lwe-Electron Beam Lithography (EBL)
Ukusebenza okubalulekile: Impahla yokuvikela yesikhulumi se-granite (ukumelana > 10¹³Ω · m) ivimbela ukusabalala kwemisebe ye-electron. Uma ihlanganiswe ne-electrostatic spindle drive, ifinyelela ukubhalwa kwephethini ye-lithography okunembe kakhulu ngobubanzi bomugqa we-nanoscale (< 10nm).
Isifinyezo
Ukusetshenziswa kwamapulatifomu okunemba kwe-granite kuye kwanda kusukela emishinini yokunemba yendabuko kuya emikhakheni esezingeni eliphezulu njenge-nanotechnology, i-quantum physics, kanye ne-biomedicine. Ukuncintisana kwayo okuyinhloko kusekuhlanganisweni okujulile kwezakhiwo zezinto kanye nezidingo zobunjiniyela. Esikhathini esizayo, ngokuhlanganiswa kobuchwepheshe bokuqinisa obuhlanganisiwe (njenge-graphene-granite nanocomposites) kanye nobuchwepheshe bokuzwa obuhlakaniphile, amapulatifomu e-granite azodlula eziqondisweni zokunemba kwezinga le-athomu, ukuzinza kwebanga lokushisa eligcwele, kanye nokuhlanganiswa kwemisebenzi eminingi, kube yizingxenye eziyisisekelo ezisekela isizukulwane esilandelayo sokukhiqiza okunembile kakhulu.
Isikhathi sokuthunyelwe: Meyi-28-2025