Izinto ze-granite zisetshenziswa kabanzi embonini ye-semiconductor ngenxa yezici zazo ezinhle kakhulu, njengokuqina okuphezulu, ukwanda okuphansi kokushisa, kanye nokumelana okuphezulu nokugqwala. Lezi zakhiwo zenza i-granite ibe yinto efanelekile yokwakha izingxenye ezinembe kakhulu ohlelweni lokudlulisa i-wafer.
Enqubweni yokukhiqiza ye-semiconductor, uhlelo lokudlulisa i-wafer ludlala indima ebalulekile ekuthuthweni kwama-wafer ezigabeni ezahlukene zenqubo yokukhiqiza. Ukunemba nokunemba yizidingo ezibalulekile zalezi zinhlelo njengoba ngisho nokuphambuka okuncane kungabeka yonke inqubo engcupheni. Ngakho-ke, izingxenye ohlelweni lokudlulisa i-wafer kumele zenziwe ngezinto ezisezingeni eliphezulu, futhi i-granite ihlangabezana nalezo zidingo.
Ezinye izingxenye zesistimu yokudlulisa i-wafer ezenziwe ngezinto ze-granite zifaka:
1. Ithebula Le-Vacuum Chuck
Itafula le-vacuum chuck lisetshenziselwa ukubamba i-wafer ngesikhathi senqubo, futhi kumele libe nobuso obuzinzile ukuqinisekisa ukuthi i-wafer ayonakaliswa. I-Granite iyinto efanelekile yokwenza leli tafula ngoba linobuso obuyisicaba, obungenazo izimbobo obunikeza ukuzinza okuphezulu nokunemba. Ngaphezu kwalokho, i-granite ine-coefficient ephansi yokwanda kokushisa, okwenza imelane nezinguquko zokushisa ezingabangela izinguquko zobukhulu ku-wafer.
2. Isigaba Sokuthwala Umoya
Isigaba esithwala umoya sisetshenziselwa ukuthutha i-wafer ngezigaba ezahlukene zenqubo yokukhiqiza. Isigaba senzelwe ukunikeza ukunyakaza okungenakuphikiswana, okudinga ukunemba okuphezulu kanye nokuqina. I-granite isetshenziswa kulolu hlelo lokusebenza ngoba iyitshe eliqinile neliqinile, futhi imelana nokuguquguquka kanye nokuguguleka ngokuhamba kwesikhathi.
3. Iziqondiso Zokuhamba Eziqondile
Iziqondiso zokunyakaza eziqondile zisetshenziselwa ukuqondisa isigaba sokuthwala umoya, futhi kumele zibekwe kahle ukuze kuncishiswe amaphutha. I-granite isetshenziselwa ukwakha lo mhlahlandlela ngoba inamandla amakhulu okusebenza kanye nokuzinza. Le nto futhi ayigqwali, okuqinisekisa ukuthi uhlelo lomhlahlandlela luhlala isikhathi eside.
4. Imishini ye-Metrology
Imishini ye-Metrology isetshenziselwa ukukala ubukhulu kanye nezakhiwo ze-wafer ngesikhathi senqubo yokukhiqiza. I-Granite iyinto efanelekile yokwakha le mishini ngoba inokuqina okuphezulu, ukunwebeka okuphansi, kanye nokuguquguquka okuncane ngaphansi komthwalo. Ngaphezu kwalokho, ukuzinza kokushisa kwe-granite kuqinisekisa ukuthi imishini ye-metrology ihlala izinzile futhi inembe ngokuhamba kwesikhathi.
Ekuphetheni, imboni ye-semiconductor ithembele ekuqondeni nasekuqondeni, futhi izinto ze-granite ziye zabonakala zithembekile kakhulu futhi zizinzile enqubweni yokukhiqiza. Njengoba kunezingxenye eziningi ezibalulekile ohlelweni lokudlulisa i-wafer ezidinga ukuzinza okuphezulu, ukunemba, kanye nokwanda okuphansi kokushisa, onjiniyela baphendukele ezintweni ze-granite ukuze bahlangabezane nalezi zidingo ezibalulekile.
Isikhathi sokuthunyelwe: Mashi-19-2024