Izinto ze-granite zisetshenziswa kakhulu embonini ye-semiconductor ngenxa yezimpawu zazo ezinhle kakhulu, njengokuzinza okuphezulu, ukunwetshwa okuphansi kokushisa, nokumelana okuphezulu nokugqwala.Lezi zakhiwo zenza i-granite ibe yimpahla efanelekile yokwakha izingxenye ezinemba okuphezulu ohlelweni lokudlulisa oluyisicwecwana.
Enqubweni yokukhiqiza i-semiconductor, isistimu yokudlulisa i-wafer idlala indima ebalulekile ekuthutheni amawafa ezigabeni ezahlukene zenqubo yokukhiqiza.Ukunemba nokunemba kuyizidingo ezibalulekile zalezi zinhlelo njengoba ukuchezuka okuncane kungase kubeke engozini yonke inqubo.Ngakho-ke, izingxenye zesistimu yokudlulisa i-wafer kumele zenziwe ngezinto ezisezingeni eliphezulu, futhi i-granite ihlangabezana nalezo zindlela.
Ezinye izingxenye zesistimu yokudlulisa i-wafer eyenziwe ngezinto ze-granite zifaka:
1. Ithebula le-Vacuum Chuck
Ithebula le-vacuum chuck lisetshenziselwa ukubamba iwafa phakathi nenqubo, futhi kufanele libe nendawo ezinzile ukuze kuqinisekiswe ukuthi i-wafer ayonakaliswa.I-Granite iyinto efanelekile yokwenza leli thebula ngoba linendawo eyisicaba, engenambobo enikeza ukuzinza okuphezulu nokunemba.Ukwengeza, i-granite ine-coefficient ephansi yokunwetshwa kokushisa, okuyenza imelane nokushintsha kwezinga lokushisa okungabangela izinguquko zobukhulu ku-wafer.
2. Isiteji Sokuthwala Umoya
Isiteji esithwala umoya sisetshenziselwa ukuthutha iwafa ngezigaba ezahlukene zenqubo yokukhiqiza.Isiteji sakhiwe ukuze sinikeze ukunyakaza okungaguquki, okudinga ukunemba okuphezulu nokuzinza.I-Granite isetshenziswa kulolu hlelo lokusebenza ngoba iyitshe eliqinile futhi eliqinile, futhi imelana nokuguqulwa nokuguga ngokuhamba kwesikhathi.
3. Linear Motion Guides
Iziqondiso zokunyakaza ezinomugqa zisetshenziselwa ukuqondisa isigaba esiphethe umoya, futhi kufanele zibekwe kahle ukuze kuncishiswe amaphutha.I-Granite isetshenziselwa ukwakha lo mhlahlandlela ngoba unokusimama okuhle kakhulu kwemishini namandla.Impahla iphinde imelane nokugqwala, okuqinisekisa ubude besikhathi sohlelo lomhlahlandlela.
4. Metrology Equipment
Imishini ye-Metrology isetshenziselwa ukukala ubukhulu nezakhiwo ze-wafer ngesikhathi sokukhiqiza.I-Granite iyinto efanelekile yokwakha le mishini ngoba inokuqina okuphezulu, ukunwebeka okuphansi, kanye nokuguqulwa okuncane ngaphansi komthwalo.Ngaphezu kwalokho, ukuqina kokushisa kwegwadle kuqinisekisa ukuthi okokusebenza kwe-metrology kuhlala kuzinzile futhi kunembile ngokuhamba kwesikhathi.
Sengiphetha, imboni ye-semiconductor incike ekunembeni nasekunembeni, futhi izinto ze-granite zifakazele ukuthi zithembeke kakhulu futhi zizinzile enqubweni yokukhiqiza.Njengoba kunezingxenye eziningi ezibucayi ohlelweni lokudlulisa i-wafer oludinga ukuzinza okuphezulu, ukunemba, nokunwetshwa okushisayo okuphansi, onjiniyela baphendukele ezintweni zegwadle ukuze bahlangabezane nalezi zidingo ezibalulekile.
Isikhathi sokuthumela: Mar-19-2024