Iziphi izingxenye zohlelo lokudluliswa kwe-wafer zokudlulisa zisetshenziswa izinto ze-granite?

Izinto zokwenziwa ze-Granite zisetshenziswa kabanzi embonini ye-semiconductor ngenxa yezimpawu zazo ezinhle kakhulu, njengokuqina okuphezulu, ukwanda okuphansi okushisayo, nokumelana okuphezulu kokugqwala. Lezi zakhiwo zenza i-granite ibe yinto efanelekile yokwakha izingxenye eziphezulu zokunemba ohlelweni lokudluliswa kwe-wafer.

Enqubweni yokukhiqiza i-semiconductor, uhlelo lokudlulisa lwe-wafer ludlala indima ebalulekile ekuthumeleni ama-wafers ezigabeni ezahlukahlukene zenqubo yokukhiqiza. Ukunemba nokunemba kuyizidingo ezibalulekile zalezi zinhlelo njengokuphambuka okuncane kungabeka engcupheni inqubo yonke. Ngakho-ke, izingxenye ohlelweni lokudlulisa olwenzile kufanele zenziwe ngezinto ezisezingeni eliphakeme, futhi uGranite uhlangabezana nalezo zinqubo.

Ezinye izingxenye zohlelo lokudluliswa kwe-wafer ezenziwe ngezinto zokwakha ama-granite zifaka:

1. Itafula le-vacuum chuck

Ithebula le-vacuum chuck lisetshenziselwa ukubamba i-wafer ngesikhathi senqubo, futhi kufanele ibe nendawo ezinzile ukuqinisekisa ukuthi i-wafer ayilimali. I-Granite iyisitatimende esifanelekile sokwenza leli thebula ngoba linendawo eyisicaba, engeyona-porous enikeza ukuqina okuphezulu nokunemba. Ngokwengeziwe, i-granite inenhlanzeko ephansi yokwanda okushisayo, okwenza kube lumelana nezinguquko zokushisa ezingadala izinguquko ezibucayi ebusheni.

2. Isigaba esithwala umoya

Isigaba esithwala umoya sisetshenziselwa ukuthutha i-wafer ngokusebenzisa izigaba ezahlukahlukene zenqubo yokukhiqiza. Isiteji senziwe enjiniyela ukuhlinzeka ngokunyakaza okungenazini, okudinga ukunemba okuphezulu nokuqina. I-Granite isetshenziswa kulolu hlelo lokusebenza ngoba iyitshe eliqinile nelukhuni, futhi limelana ne-deformation futhi ligqoka ngokuhamba kwesikhathi.

3. Imihlahlandlela yokunyakaza eqondile

Imihlahlandlela ye-Linear Motion isetshenziselwa ukuqondisa isigaba esithwala umoya, futhi kufanele ibekwe kahle ukunciphisa amaphutha. IGranite isetshenziselwa ukwakha lo mhlahlandlela ngoba inokuqina okuhle kakhulu kwemishini namandla. Izinto ezibonakalayo nazo zimelana nokugqwala, okuqinisekisa ubude bohlelo lokuqondisa.

4. Imishini yeMetrology

I-Meterology Equipment isetshenziselwa ukukala ubukhulu nezakhiwo ze-wafer ngesikhathi senqubo yokwenza. I-Granite iyisitatimende esifanele sokwakha le mishini ngoba inokuqina okuphezulu, ukwanda okuphansi, nokuguquguquka okuncane ngaphansi komthwalo. Ngaphezu kwalokho, ukuqina kwe-granite's thermal kuqinisekisa ukuthi imishini yeMetrology ihlala iqinile futhi inembile ngokuhamba kwesikhathi.

Ekuphetheni, imboni ye-semiconductor ithembele ngokunemba nokunemba, futhi izinto ze-granite ziye kufakazelwe ukuthi zithembeke kakhulu futhi zizinzile enqubweni yokukhiqiza. Ngezakhi eziningi ezibucayi ohlelweni lokudluliswa kwe-wafer oludinga ukuqina okuphezulu, ukunemba, kanye nokunwebeka okuphansi okushisayo, onjiniyela baphenduke izinto zokwakha amagagasi ukuze bahlangabezane nalezi zidingo ezibucayi.