Izilinganiso zokuhlola izingxenye ze-Granite ngokunemba
Izinga lokunemba kobukhulu
Ngokuvumelana nezinkambiso zemboni ezifanele, ukubekezelela okubalulekile kobukhulu bezingxenye ezinemba zegwadle kudinga ukulawulwa ngaphakathi kwebanga elincane kakhulu. Uma sithatha inkundla yokulinganisa yegwadle njengesibonelo, ukubekezelela ubude nobubanzi bayo kuphakathi kuka-±0.05mm no-±0.2mm, futhi inani elithile lincike kusayizi wengxenye kanye nezidingo zokunemba zesimo sohlelo lokusebenza. Isibonelo, kuplathifomu yokugaya ilensi yokubona enembayo ephezulu, ukubekezelela kwe-dimensional kungase kulawulwe kokuthi ±0.05mm, kuyilapho ukubekezelelana kobukhulu beplathifomu yokuhlola imishini kungaxegiselwa ku-±0.2mm. Ngobukhulu bangaphakathi obufana nendawo yokuvula kanye nobubanzi be-slot, ukunemba kokubekezelelana nakho kuqinile, njengembobo yokukhweza kusisekelo segwadle esisetshenziselwa ukufaka inzwa enembile, ukubekezelela indawo kufanele kulawulwe ku-±0.02mm ukuze kuqinisekiswe ukunemba nokuzinza kokufakwa kwenzwa. .
I-flatness standard
I-flatness iyinkomba ebalulekile yezingxenye zokunemba ze-granite. Ngokwendinganiso kazwelonke/yezinga laseJalimane, ukubekezelela ukunemba kwamabanga ahlukene anemba weplathifomu yegwadle kucaciswe ngokucacile. Ukubekezelela isicaba kweplathifomu yekilasi 000 kubalwa ngokuthi 1×(1 + d/1000)μm (d ubude obuyi-diagonal, iyunithi mm), 2×(1 + d/1000)μm ekilasini 00, 4×(1 + d/1000)μm ekilasini 0, kanye no-8d/m ngesibonelo, 0 × 0 isibonelo, ikilasi +1×0 (0) ngokwesibonelo + 0. Iplathifomu ye-granite yekilasi 00 ene-diagonal engu-1000mm inokubekezelela flatness okungu-2×(1 + 1000/1000)μm = 4μm. Kuzinhlelo zokusebenza ezingokoqobo, ezifana neplathifomu ye-lithography enqubweni yokukhiqiza ama-chips kagesi, ngokuvamile kuyadingeka ukuthi kuhlangatshezwane nezinga leleveli engu-000 noma engu-00 ukuze kuqinisekiswe ukunemba kwendlela yokusabalalisa ukukhanya kunqubo ye-chip lithography futhi kugwenywe ukuhlanekezelwa kwephethini ye-chip okubangelwa iphutha leplathifomu yokuba flat. .
Izinga lokugwedla kobuso
Ubukhulu obungaphezulu bezingxenye zokunemba zegwadle buthinta ngokuqondile ukunemba okufanayo nokusebenza nezinye izingxenye. Ngaphansi kwezimo ezijwayelekile, ubulukhuni obuphezulu be-Ra beplathifomu yegwadle esetshenziselwa izingxenye ze-optical kufanele ifinyelele ku-0.1μm-0.4μm ukuze kuqinisekiswe ukuthi izingxenye ze-optical zingagcina ukusebenza okuhle kokubona ngemva kokufakwa futhi zinciphise ukuhlakazeka kokukhanya okubangelwa izindawo ezingalingani. Kuplathifomu yegwadle evamile esetshenziselwa ukuhlolwa komshini, ubulukhuni bendawo i-Ra bungaxegiswa bube ngu-0.8μm-1.6μm. Ubulukhuni bendawo ngokuvamile butholwa kusetshenziswa okokusebenza okuphrofeshinali okufana nephrofayili, enquma ukuthi inani lokumahhadla kwendawo liyahlangabezana yini nezinga ngokulinganisa ukuchezuka kwencazelo ye-arithmetic yephrofayili engaphezulu ye-microscopic. .
Amazinga okuthola isici sangaphakathi
Ukuze uqinisekise ikhwalithi yangaphakathi yezingxenye zokunemba ze-granite, kuyadingeka ukuhlonza kahle amaphutha azo angaphakathi. Uma usebenzisa ukuhlolwa kwe-ultrasonic, ngokwezindinganiso ezifanele, lapho kutholakala ukuthi kunezimbobo, ukuqhekeka nezinye iziphambeko ezinkulu kunobukhulu obuthile (njengobubanzi obukhulu kuno-2mm), ingxenye ihlulelwa ukuthi ayifaneleki. Ekuhlolweni kwe-X-ray, uma isithombe se-X ray sibonisa izinkinga zangaphakathi eziqhubekayo ezithinta amandla esakhiwo sengxenye, njengokushiyeka komugqa ezinobude obungaphezu kuka-10mm noma ukukhubazeka okunamandla okunendawo engaphezu kuka-50mm², ingxenye nayo ayihlangabezani nezinga lekhwalithi. Ngokusetshenziswa okuqinile kwalawa mazinga, kungagwema ngempumelelo izinkinga ezinkulu njengokuphuka kwezingxenye ezibangelwa ukukhubazeka kwangaphakathi ngesikhathi sokusetshenziswa, futhi kuqinisekise ukuphepha kokusebenza kwemishini kanye nokuzinza kwekhwalithi yomkhiqizo. .
Isakhiwo sesixazululo sokuhlolwa kwezimboni
Ukuhlanganiswa kwemishini yokulinganisa ukunemba okuphezulu
Ukuze unqobe inkinga yokutholwa kwengxenye ye-granite ngokunemba, kuyadingeka ukwethula okokusebenza kokulinganisa okuthuthukisiwe. I-laser interferometer inokunemba okuphezulu kakhulu ngobude nokulinganisa kwe-engeli, futhi ingakala ngokunembile izilinganiso eziyinhloko zezingxenye zegwadle, futhi ukunemba kwayo kokulinganisa kungase kufike kuma-nanometers, okungahlangabezana ngokuphumelelayo nezidingo zokutholwa zokubekezelela kobukhulu obunembayo okuphezulu. Ngesikhathi esifanayo, izinga le-elekthronikhi lingasetshenziswa ukulinganisa ngokushesha nangokunembile ukucaba kwezingxenye ze-granite yesikhulumi, ngokulinganisa amaphuzu amaningi futhi kuhlanganiswe nama-algorithms ochwepheshe, kungadweba iphrofayili ye-flatness enembile, ukunemba kokutholwa okufika ku-0.001mm/m. Ukwengeza, isithwebuli se-3D optical singaskena ngokushesha indawo eyinkimbinkimbi yengxenye ye-granite ukuze sikhiqize imodeli ephelele enezinhlangothi ezintathu, engathola ngokunembile ukuchezuka komumo ngokuqhathanisa nemodeli yokuklama, inikeze ukusekelwa kwedatha okuphelele kokuhlolwa kwekhwalithi yomkhiqizo. .
Ukusetshenziswa kobuchwepheshe bokuhlola obungonakali
Uma kubhekwa ingozi engaba khona yokukhubazeka kwangaphakathi kwegwadle ekusebenzeni kwengxenye, ukuhlola okungabhubhisi kubalulekile. Umtshina we-Ultrasonic flaw ungakhipha i-high-frequency ultrasound, lapho igagasi lomsindo lihlangana nemifantu, izimbobo nezinye iziphambeko ngaphakathi kwe-granite, lizobonisa futhi lihlakaze, ngokuhlaziya isignali yegagasi elibonisiwe, lingahlulela ngokunembile indawo, ubukhulu kanye nokuma kwesici. Ukuze kutholwe amaphutha amancane, ubuchwepheshe bokubona amaphutha e-X ray bunenzuzo kakhulu, bungangena ezintweni ze-granite ukuze kwakhiwe isithombe sesakhiwo sangaphakathi, sibonise ngokucacile amaphutha acashile okunzima ukuwabona ngeso lenyama, ukuze kuqinisekiswe ukuthi ikhwalithi yangaphakathi yengxenye ithembekile. .
Isistimu yesoftware yokuthola okuhlakaniphile
Isistimu ye-software yokuthola okuhlakaniphile enamandla iyihabhu eyinhloko yesisombululo. Uhlelo lungafingqa, luhlaziye futhi lucubungule idatha eqoqwe yizo zonke izinhlobo zemishini yokuhlola ngesikhathi sangempela. Isebenzisa ama-algorithms obuhlakani bokwenziwa, isofthiwe ingakwazi ukuhlonza ngokuzenzakalelayo izici zedatha futhi inqume ukuthi izingxenye zegranite ziyahlangabezana yini namazinga ekhwalithi, ithuthukise kakhulu ukusebenza kahle kokutholwa nokunemba. Isibonelo, ngokuqeqesha inani elikhulu ledatha yokuhlola ngamamodeli okufunda ajulile, isofthiwe ingakwazi ukuhlonza ngokushesha futhi ngokunembile uhlobo nobukhulu bezinkinga ezingaphezulu, igweme ukwahlulela okungalungile okungaba khona okubangelwa ukuhumusha okwenziwa ngesandla. Ngesikhathi esifanayo, uhlelo lwesofthiwe lungakwazi futhi ukukhiqiza umbiko wokuhlola onemininingwane, ukurekhoda idatha yokuhlola kanye nemiphumela yengxenye ngayinye, okulungele amabhizinisi ukuqhuba ukulandelwa kwekhwalithi nokuphatha. .
Izinzuzo ze-ZHHIMG kuzixazululo zokuhlola
Njengomholi wemboni, i-ZHHIMG iqongelele ulwazi olucebile emkhakheni wokuhlolwa kwengxenye yegwadle ngokunemba. Le nkampani inethimba lochwepheshe le-R & D, elihlale lizibophezele ekusungulweni nasekuthuthukiseni ubuchwepheshe bokuhlola, ngokuya ngezidingo ezikhethekile zamakhasimende izixazululo zokuhlola ezenziwe ngezifiso. I-ZHHIMG yethule imishini yokuhlola ethuthukile emhlabeni wonke futhi yasungula uhlelo oluqinile lokulawula ikhwalithi ukuze kuqinisekiswe ukuthi zonke izivivinyo zingafinyelela ezingeni eliphezulu lemboni. Ngokwamasevisi, inkampani inikeza izinsizakalo zokuma okukodwa kusukela ekwakhiweni kwesikimu sokuhlola, ukufakwa kwemishini kanye nokugunyazwa ekuqeqesheni abasebenzi ukuze kuqinisekiswe ukuthi amakhasimende angasebenzisa ngokushelela izixazululo zokuhlola futhi athuthukise amandla okulawula ikhwalithi yomkhiqizo.
Isikhathi sokuthumela: Mar-24-2025