Ingabe Indawo Yakho Yokubhekisela Izinzile Kakhulu Ukuze Ihlangabezane Nezidingo Ze-Nanometer-Scale Metrology?

Emjahweni oqhubekayo obheke izici ezincane kanye nokubekezelelana okuqinile ekukhiqizeni komhlaba wonke—kusukela ekucutshungulweni kwe-semiconductor kuya ezingxenyeni zezindiza—isidingo sendiza yokubhekisela engaguquki nenembile sibaluleke kakhulu. Ipuleti elimnyama elinokunemba okuphezulu lihlala liyisisekelo esibalulekile, esingaxoxiswana ngaso kuzo zonke izilinganiso zobukhulu, elisebenza njenge-"zero point" lapho ikhwalithi iqinisekiswa khona. Kodwa njengoba kunezinketho eziningi kangaka ezitholakalayo, onjiniyela kanye nochwepheshe be-metro bangaqinisekisa kanjani ukuthi bakhetheipuleti elingaphezuluingabe izinzile ngokwanele ukuhlangabezana nezidingo zesimanje ze-sub-micron?

Impendulo itholakala ekuqondeni umehluko obalulekile phakathi kwe-granite evamile kanye nezinto ze-granite ezimnyama eziqondile nezinobukhulu obuphezulu ezikhethiwe futhi zaklanywa ukuze zisetshenziswe ekulinganiseni ubungcweti.

Ukubaluleka kweBlack Granite: Kungani Ubuningi Bubalulekile

Isisekelo sanoma yiliphi ipuleti eliphezulu kakhulu yizinto zokusetshenziswa. Nakuba ukusetshenziswa okuqinile kungavumela ukusetshenziswa kwama-granite anombala okhanyayo noma ngisho nemabula, ukunemba okukhulu kudinga izinto ezinezici ezibonakalayo ezihlukile, okungukuthi i-gabbro emnyama enobukhulu obuphezulu.

I-granite yethu emnyama ye-ZHHIMG®, isibonelo, inesisindo esingavamile esifinyelela ku-3100 kg/m³. Lesi sici sibalulekile, njengoba isisindo esiphezulu sihlobene ngqo nezilinganiso ezimbili zokusebenza ezibalulekile:

1. Ukuqina Nokuqina: Izinto eziqinile zine-Young's Modulus ephezulu, okwenza ipuleti elimnyama elinokunemba okuphezulu limelane kakhulu nokuphambuka nokuguquguquka lapho lisekela imithwalo esindayo (njenge-CMM ezinkulu noma izinto zokusebenza ezisindayo). Lokhu kuqina kuqinisekisa ukuthi indawo egobekile kahle igcina ukubekezelela kwayo ukuba yisicaba okucacisiwe ngokuhamba kwesikhathi, ngisho nangaphansi kwengcindezi enkulu.

2. Ukudambisa Ukudlidliza: Isakhiwo esiyinkimbinkimbi nesiqinile sale nto sinikeza izici zokudambisa ezingcono kakhulu uma kuqhathaniswa nensimbi noma insimbi ephonswe ngensimbi. Lokhu kubalulekile emakamelweni okuhlola anamuhla, lapho ipuleti le-granite kumele limunce ngempumelelo ukudlidliza okuncane okuvela emsindweni wemvelo noma emishinini eseduze, okukuvimbela ekushintsheni izilinganiso ezibucayi.

Ngaphezu kwalokho, le granite emnyama yekhwalithi ephezulu ngokwemvelo ibonisa ukwanda okuphansi kakhulu kokushisa. Ezindaweni zokuhlola ezilawulwa amazinga okushisa, lokhu kunciphisa ushintsho lobukhulu olubangelwa ukushisa okusele okuvela engxenyeni elinganiswayo noma ukushintshashintsha okuncane kokushisa komoya, okuqinisekisa ukuzinza okudingekayo ekulinganisweni kwezinga le-nanometer.

Ubunjiniyela be-Nanometer: Inqubo Yokukhiqiza

Ukufinyelela ukuthamba okudingekayo epuletini elimnyama elinokunemba kwe-granite—ngokuvamile kuze kufike ku-Grade AAA (elilingana ne-DIN 876 Grade 00 noma 0)—kuyiklasi eliyinhloko ekuqedeni izinto eziklanywe ngobunjiniyela. Kuyinqubo encike kwingqalasizinda ekhethekile kanye nokungenelela kwabantu abanekhono eliphezulu.

Sisebenzisa izikhungo ezinkulu, ezilawulwa isimo sezulu, nezihlukanisiwe nokudlidliza, ezinephansi likakhonkolo eliqinisiwe kanye nemisele ezungezile yokulwa nokudlidliza, ukuqinisekisa ukuzinza okuphelele ngesikhathi senqubo yokuqeda. Ukugaya okukhulu kuphathwa yimishini eqashelwa emhlabeni wonke, esebenza kanzima (njengemishini yethu yokugaya yaseTaiwan Nant), ekwazi ukulungiselela amabhlogo amakhulu.

Kodwa-ke, isinyathelo sokugcina nesibalulekile ukugoqa ngesandla ngokucophelela. Lesi sigaba senziwa ochwepheshe abanolwazi oluningi lweminyaka eminingi, abampendulo yabo ethintayo kanye nekhono eliqondile elibavumela ukuthi basuse izinto ezingeni le-sub-micron. Lobu buchwepheshe bomuntu buguqula ipuleti libe yindiza yokubhekisela eqinisekisiwe emhlabeni wonke, eyisicaba ngempela.

Wonke umuntu omnyamaipuleti lobuso be-granite elinembileKuqinisekiswe ngokuqinile kusetshenziswa imishini yokulinganisa elandelekayo, okuhlanganisa ama-interferometer e-laser e-Renishaw kanye namazinga kagesi e-WYLER. Lokhu kuqinisekisa ukuthi ukuthamba okulinganisiwe, ukunemba, kanye nokunemba kokufunda okuphindaphindiwe kuhlangabezana noma kudlula amazinga adinga kakhulu (njenge-ASME, i-DIN, noma i-JIS), kanye nokulandelela emuva ezikhungweni zikazwelonke zokulinganisa.

Izicelo: I-Universal Reference Standard

Ukuqina okuphezulu kanye nokunemba okuqinisekisiwe kwepuleti elingaphezulu le-granite elinokunemba okumnyama kwenza kube yindinganiso yokubhekisela cishe kuyo yonke imboni yobuchwepheshe obuphezulu:

• I-Metrology kanye noLawulo Lwekhwalithi: Isebenza njengesisekelo esiyinhloko sayo yonke imishini yokuhlola ubukhulu, kufaka phakathi ama-CMM, izinhlelo zokulinganisa ividiyo, kanye nama-comparators optical, okunikeza ipulatifomu engenaphutha lokulinganisa nokuhlola.

• Ukuhlanganiswa Okunembile: Kusetshenziswa njengendawo yokubhekisela ekuhlanganisweni nasekuqondisweni okunembile kakhulu kwamathuluzi omshini, amabhentshi okukhanya, kanye nezigaba zokunyakaza eziqondile (kufaka phakathi izinhlelo zokuthwala umoya) zezinhlelo zokusebenza ze-semiconductor kanye nezindiza.

• Amalebhu Okulinganisa: Amapuleti ebanga le-00 abalulekile ekulinganiseni amathuluzi amancane okuhlola, amageyiji okuphakama, kanye namazinga kagesi, asebenza njengereferensi eyinhloko kuhlu lokulinganisa.

Ekuphetheni, ukutshalwa kwezimali epuletini elingaphezulu le-granite elinobungcweti elimnyama kuwukutshalwa kwezimali ekhwalithini eqinisekisiwe. Kuqinisekisa ukunemba okuyisisekelo okudingekayo ukuze kuncintisane emkhakheni wokukhiqiza onembile kakhulu, okuqinisekisa ukuthi izilinganiso zakho azigcini nje ngokuba zinembile kodwa futhi ziyalandeleka futhi zithembekile eminyakeni ezayo.