Kuchungechunge olunembile lokukhiqizwa kwe-semiconductor, uhlelo lokudlulisa i-wafer lufana "nomzila wokuphila womugqa wokukhiqiza ama-chip", futhi ukuzinza nokunemba kwalo kunquma ngqo izinga lokukhiqiza ama-chip. Isizukulwane esisha sezinhlelo zokudlulisa ama-wafer sihlanganisa ngokuguquguqukayo ama-motor aqondile nezisekelo ze-granite, futhi izinzuzo eziyingqayizivele zezinto ze-granite ziyikhodi eyinhloko yokuvula ukudluliselwa kokusebenza okuphezulu.
Isisekelo segranite: Ukwakha "isisekelo esiqinile njengedwala" sokudlulisela okuzinzile
I-granite, njengoba idlule amakhulu ezigidi zeminyaka yokucwengwa kwe-geology, inezici zokwakheka kwamaminerali ezihlanganisiwe nezifanayo. Lesi sici semvelo senza kube yinto eyisisekelo efanelekile yezinhlelo zokudlulisa i-wafer. Endaweni eyinkimbinkimbi yamakamelo okuhlanza e-semiconductor, i-granite, ene-coefficient yayo ephansi kakhulu yokwanda kokushisa (kuphela u-5-7 × 10⁻⁶/℃), ingamelana nokushisa okukhiqizwa ngesikhathi sokusebenza kwemishini kanye nethonya lokushintsha kwezinga lokushisa kwemvelo, iqinisekisa ukuzinza kosayizi wesisekelo futhi igweme ukuphambuka kwendlela yokudlulisela okubangelwa ukuguqulwa kokushisa. Ukusebenza kwayo okuvelele kokudlidliza kokudlidliza kungamunca ngokushesha ukudlidliza komshini okukhiqizwa ngesikhathi sokuqala, ukuvala kanye nokusheshisa kwama-motor aqondile, kanye nokuphazamiseka kwangaphandle okulethwa ukusebenza kweminye imishini eshabhu, okuhlinzeka ngeplatifomu ezinzile "enokunyakaza okungenalutho" kokudlulisa i-wafer.
Okwamanje, ukuzinza kwamakhemikhali kwe-granite kuqinisekisa ukuthi ayigqwali noma ayigqwali ezindaweni zokusebenzela ze-semiconductor lapho ama-reagent e-acid ne-alkali eguquguqukayo khona futhi kudingeka ukuhlanzeka okuphezulu, ngaleyo ndlela kugwenywe umthelela ekunembeni kokudlulisela ngenxa yokuguga kwezinto noma ukumuncwa kokungcola. Izici zobuso obubushelelezi nobuminyene zinganciphisa ukunamathela kothuli ngempumelelo, zihlangabezane nezindinganiso eziqinile ezingenalo uthuli zamakamelo ahlanzekile futhi zisuse ingozi yokungcoliswa kwe-wafer kusuka empandeni.
Umphumela "wokubambisana kwegolide" wama-linear motors kanye ne-granite
Ama-motor aqondile, anezimpawu zokungavumeli ukudluliselwa kwemishini, ukusheshisa okuphezulu kanye nesivinini sokuphendula okuphezulu, ukudluliselwa kwe-wafer endow ngezinzuzo "zokushesha, okunembile nokuzinzile". Isisekelo se-granite sinikeza ipulatifomu yokusekela eqinile nethembekile. Laba bobabili basebenza ndawonye ukuze bafeze ukusebenza okuphakeme. Lapho injini eqondile iqhuba isithwali se-wafer ukuthi sigijime kuthrekhi yesisekelo se-granite, ukuqina okuqinile kanye nokuqina kwesisekelo kuqinisekisa ukudluliselwa okusebenzayo kwamandla okushayela enjini, kugwenywe ukulahleka kwamandla noma ukubambezeleka kokudluliselwa okubangelwa ukuguqulwa kwesisekelo.
Njengoba kuqhutshwa isidingo sokunemba kwe-nanoscale, ama-motor aqondile angafinyelela ukulawulwa kokufuduka kwezinga eliphansi le-micron. Izici zokucubungula okunembile kakhulu kwezisekelo ze-granite (ezinamaphutha okuthamba alawulwa ngaphakathi kwe-±1μm) zihambisana kahle nokulawulwa okunembile kwama-motor aqondile, okuqinisekisa ngokubambisana ukuthi iphutha lokubeka ngesikhathi sokudluliselwa kwe-wafer lingaphansi kwe-±5μm. Kungakhathaliseki ukuthi ukuthutha ngesivinini esikhulu phakathi kwemishini ehlukahlukene yenqubo noma ukupaka okunembile kokudluliselwa kwe-wafer, ukuhlanganiswa kwama-motor aqondile nezisekelo ze-granite kungaqinisekisa "ukuphambuka okungu-zero kanye no-zero jitter" ekudluliselweni kwe-wafer.
Ukuqinisekiswa komkhuba wemboni: Ukuthuthuka okuphindwe kabili ekusebenzeni kahle kanye nezinga lokukhiqiza
Ngemva kokuthuthukisa uhlelo lwayo lokudlulisa ama-wafer, inkampani ehamba phambili emhlabeni wonke ye-semiconductor yamukele isisombululo sesisekelo se-linear motor + granite, esandisa ukusebenza kahle kokudlulisa ama-wafer ngo-40%, sanciphisa izinga lokuvela kwamaphutha njengokushayisana kanye nokunciphisa ngesikhathi senqubo yokudlulisa ngo-85%, futhi sathuthukisa izinga lokukhiqizwa kwama-chips ngo-6%. Ngemuva kwedatha kukhona isiqinisekiso sokuzinza kokudlulisela okunikezwa yisisekelo se-granite kanye nomphumela wesivinini esikhulu nesinembile wokubambisana kwe-linear motor, okunciphisa kakhulu ukulahleka kanye nephutha enqubweni yokudlulisa ama-wafer.
Kusukela ezimpahleni zezinto ezibonakalayo kuya ekukhiqizeni okunembile, kusukela ezinzuzweni zokusebenza kuya ekuqinisekisweni okusebenzayo, inhlanganisela yama-linear motors kanye nezisekelo ze-granite ichaze kabusha amazinga ezinhlelo zokudlulisa i-wafer. Esikhathini esizayo lapho ubuchwepheshe be-semiconductor buqhubekela phambili ezinqubweni ze-3nm kanye ne-2nm, izinto ze-granite ngokuqinisekile zizoqhubeka nokufaka umfutho onamandla ekuthuthukisweni komkhakha ngezinzuzo zazo ezingenakuphikwa.
Isikhathi sokuthunyelwe: Meyi-14-2025