Inzuzo yokukhetha isisekelo se-granite sethebula lokuhlola i-wafer ye-semiconductor.

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Embonini ye-semiconductor, ukuhlolwa kwe-wafer kuyisixhumanisi esibalulekile sokuqinisekisa ikhwalithi nokusebenza kwe-chip, futhi ukunemba nokuzinza kwetafula lokuhlola kudlala indima ebalulekile emiphumeleni yokutholwa. Isisekelo se-granite esinezici zayo ezihlukile, iba inketho efanelekile yethebula lokuhlola i-semiconductor wafer, okulandelayo okuvela ekuhlaziyweni kwakho kwe-multi-dimensional. .

Okokuqala, ubukhulu besiqinisekiso sokunemba
1. I-Ultra-high flatness nokuqondisa: Isisekelo se-granite sicutshungulwa ngobuchwepheshe bokucubungula obuthuthukisiwe, futhi ukucaba kungafinyelela ku-± 0.001mm/m noma ngisho nokunemba okuphezulu, futhi ukuqondisa nakho kuhle kakhulu. Enkambweni yokuhlola i-wafer, indiza enembayo ephezulu inikeza ukusekelwa okuzinzile kwe-wafer futhi iqinisekisa ukuthintana okunembile phakathi kwe-probe yemishini yokuhlola kanye nezihlanganisi ze-solder endaweni ye-wafer. .
2. I-coefficient ephansi kakhulu yokunwetshwa kwe-thermal: ukukhiqizwa kwe-semiconductor kuyazwela ekushintsheni kwezinga lokushisa, futhi i-coefficient yokwanda okushisayo kwe-granite iphansi kakhulu, ngokuvamile i-5×10⁻⁶/℃. Uma inkundla yokuthola isebenza, ngisho noma izinga lokushisa le-ambient lishintshashintsha, usayizi wesisekelo se-granite ushintsha kancane kakhulu. Isibonelo, endaweni yokusebenzela enezinga eliphezulu lokushisa ehlobo, izinga lokushisa leplathifomu yokutholwa kwesisekelo sensimbi evamile lingase libangele ukuma okuhlobene kwe-wafer kanye nezinto zokuhlonza ukuthi zishintshe, kuthinte ukunemba kokutholwa; Inkundla yokuthola isisekelo se-granite ingagcina ukuzinza, iqinisekise ukunemba kwesimo esihlobene se-wafer nemishini yokuthola phakathi nenqubo yokuhlonza, futhi inikeze indawo ezinzile ukuze kutholwe ukunemba okuphezulu. .
Okwesibili, ubukhulu bokuqina
1. Isakhiwo esizinzile nokumelana nokudlidliza: I-Granite ngemva kwezigidi zeminyaka yezinqubo ze-geological, isakhiwo sangaphakathi siminyene futhi siyafana. Endaweni eyinkimbinkimbi yefekthri ye-semiconductor, ukudlidliza okukhiqizwa ukusebenza kwemishini yocingo kanye nabasebenzi abahambahambayo kuncishiswa ngempumelelo isisekelo se-granite. .
2. Ukunemba kokusetshenziswa kwesikhathi eside: uma kuqhathaniswa nezinye izinto, i-granite inobunzima obuphezulu, ukumelana nokugqoka okuqinile, futhi ubunzima be-Mohs bungafinyelela ku-6-7. Isisekelo sesisekelo se-granite asigqokwa kalula phakathi nokulayishwa kwe-wafer okuvamile, ukuthulula nokuhlola. Ngokusho kokusetshenziswa kwangempela kwezibalo zedatha, ukusetshenziswa kwetafula lokuhlola isisekelo se-granite, ukusebenza okuqhubekayo ngemva kwamahora angu-5000, ukunemba nokunemba okuqondile kusengagcinwa ngaphezu kuka-98% wokunemba kokuqala, ukunciphisa okokusebenza ngenxa yokuguga kwesisekelo okubangelwa ukulinganisa okuvamile nokugcinwa kwezikhathi, ukunciphisa izindleko zokusebenza kwebhizinisi, ukuqinisekisa ukuzinza kwesikhathi eside komsebenzi. .

Okwesithathu, ukuhlanzeka nokuphikisana nokuphazamiseka
1. Ukukhiqiza uthuli oluphansi: indawo yokukhiqiza i-semiconductor idinga ukuhlanzeka kakhulu, futhi impahla ye-granite ngokwayo izinzile futhi akulula ukukhiqiza izinhlayiya zothuli. Ngesikhathi sokusebenza kwesiteji sokuhlola, uthuli olukhiqizwa isisekelo luyagwenywa ukuze lungcolise i-wafer, futhi ingozi yesifunda esifushane kanye nesifunda esivulekile esibangelwa izinhlayiya zothuli ziyancipha. Endaweni yokuhlolwa kwe-wafer yendawo yokusebenzela engenalo uthuli, ukugxiliswa kothuli ezizungeze itafula lokuhlola isisekelo se-granite kuhlala kulawulwa ezingeni eliphansi kakhulu, kuhlangabezana nezidingo eziqinile zokuhlanzeka zomkhakha we-semiconductor. .
2. Akukho ukuphazamiseka kazibuthe: okokusebenza kokubona kuyazwela endaweni kazibuthe, futhi igwadle iwumsebenzi ongewona uzibuthe, ongeke uphazamise isignali ye-elekthronikhi yezinto ezitholwayo. Ekusetshenzisweni kokutholwa kwe-electron beam nobunye ubuchwepheshe bokuhlola obudinga indawo ye-electromagnetic ephakeme kakhulu, isisekelo se-granite siqinisekisa ukudluliswa okuzinzile kwesiginali ye-elekthronikhi yezinto ezitholwayo futhi siqinisekisa ukunemba kwemiphumela yokuhlolwa. Isibonelo, uma i-wafer ihlolelwa ukusebenza kukagesi okunemba okuphezulu, isisekelo se-granite esingesona esizibuthe sigwema ukuphazamiseka kokutholwa kwamasignali amanje kanye ne-voltage, ukuze idatha yokutholwa ibonise ngempela izici zikagesi we-wafer.