Izindawo zokusetshenziswa kwenhlangano yegranite yemikhiqizo yedivayisi yokukhiqiza inqubo ye-semiconductor

I-Granite uhlobo lwedwala eliqinile eliye laba yinto ebalulekile embonini yokukhiqiza ama-semiconductor. Izakhiwo zalo ziyivumela ukuthi imelane namazinga okushisa aphezulu, okwenza kube kuhle ukusetshenziswa ezigabeni ezahlukene zezinqubo zokukhiqiza amadivayisi ama-semiconductor. Ngenxa yalokho, ukuhlanganiswa kwe-granite kuthole izindawo eziningi zokusetshenziswa emikhiqizweni yedivayisi yokukhiqiza ama-semiconductor.

Enye yezindlela ezisetshenziswa kakhulu zokuhlanganisa i-granite ukwakhiwa kwezakhiwo zamathuluzi omshini onembile kakhulu. Ukuqina nokuqina kwe-granite kwenza kube nokwenzeka ukukhiqiza amathuluzi anembile nanembile anokuguquguquka okuncane noma angenakho nhlobo. Leli zinga lokunemba liyadingeka ezinqubweni zokukhiqiza ze-semiconductor njengokufakelwa kwe-ion, lapho ugongolo kumele luqondiswe ngokunembile ku-wafer.

Okunye ukusetshenziswa kokuhlanganiswa kwe-granite ekukhiqizweni kwe-semiconductor kusekwakheni imishini ye-metrology. Imishini ye-Metrology ibalulekile ezinqubweni zokukhiqiza ze-semiconductor njengoba ilinganisa futhi iqinisekisa ukunemba kwamadivayisi akhiqizwayo. Ukuqina kobukhulu be-granite, ukwanda kokushisa okuphansi, kanye nezakhiwo ezinhle kakhulu zokunciphisa ukudlidliza kwenza kube yinto ekhethwayo ekwakhiweni kwemishini ye-metrology. Lokhu kufaka phakathi izindawo ezinkulu ze-granite ezisetshenziswa ekuhleleni nasekuhlolweni kwama-wafers.

Amatafula okubona angenye indawo yokusetshenziswa kabanzi kokuhlanganiswa kwe-granite embonini ye-semiconductor. Amatafula okubona asetshenziswa ekuhlolweni kwamadivayisi okubona njenge-waveguides yokuxhumana kwedatha. Ukuthamba kwe-Granite, ukwanda okuphansi kokushisa, ukuqina okuphezulu, kanye nokuqina komshini kwenza ikwazi ukuhlinzeka ngendawo ezinzile kakhulu yokufaka nokubeka ama-optics. Amatafula okubona e-Granite anganikeza ukuqina nokuqina okudingekayo ukuze kwenziwe ukuhlolwa okunembile nokunembile kwamadivayisi okubona.

I-Granite isetshenziswa futhi ekwakhiweni kwama-wafer chuck nezigaba. Ngesikhathi senqubo yokukhiqiza i-semiconductor, ukuhambisana kahle, kanye nokulawula isikhundla kubalulekile. Ama-wafer chuck, abamba ama-wafer endaweni yawo ngesikhathi sokucubungula, kumele agcine ukunemba kwendawo ngenkathi ebekezelela amazinga okushisa aphezulu kanye nezimo ze-vacuum. I-Granite inokuqina okuhle kakhulu kobukhulu phezu kwamazinga okushisa ahlukahlukene futhi ingamelana nezimo ze-vacuum, okwenza ibe yindawo ekahle yokwakha ama-wafer chuck. Izigaba ezisetshenziswa ekuhambeni kwama-wafer kusuka kwenye indawo kuya kwenye zidlula ngokulandelana kokujikeleza kokunyakaza ngesikhathi senqubo yokwenziwa kwe-semiconductor. Ukuhlanganiswa kwe-granite kunikeza ukuzinza nokuqina okudingekayo ukuze kuthwale imijikelezo eqhubekayo nephindaphindayo yokunyakaza.

Ngamafuphi, ukusetshenziswa kwe-granite assembly embonini yokukhiqiza ye-semiconductor kukhulu kakhulu. Izakhiwo zayo ezifana nokuzinza kobukhulu, ukunwetshwa okuphansi kokushisa, ukuqina okuphezulu, kanye nokudlidliza kwenza kube yinto efanelekile yokusetshenziswa ezigabeni ezahlukene zezinqubo zokukhiqiza amadivayisi e-semiconductor. Kusukela ekwakhiweni kwamathuluzi omshini anembile kakhulu kanye nemishini ye-metrology kuya kumatafula optical kanye nezigaba ze-wafer kanye nama-chucks, izimfanelo ze-granite zidlala indima ebalulekile ekuhlinzekeni ukuzinza, ukunemba, kanye nokuphindaphinda okudingekayo ukuze kufezwe ukukhiqizwa kwamadivayisi e-semiconductor asezingeni eliphezulu.