Inkambu yokusetshenziswa kwemodyuli yokunyakaza ye-single axis air float ultra-precision motion esebenzisa isisekelo se-granite.

Ukukhiqizwa kwe-semiconductor: Enqubweni yokukhiqizwa kwe-chip, inqubo ye-photolithography idinga ukudlulisa iphethini yesekethe ngqo ku-wafer. Isisekelo se-granite se-module yokunyakaza ye-single axis floating ultra-precision module singanikeza indawo enembile kakhulu kanye nokusekelwa okuzinzile kwetafula le-wafer emishinini ye-lithography. Isibonelo, i-ASML kanye nabanye abakhiqizi bomshini we-lithography abadumile emhlabeni wonke basebenzisa amamojula okunyakaza omoya we-granite base floating emishinini yabo ephezulu, engalawula ukunemba kokubeka kwe-wafer ezingeni le-nanometer ukuqinisekisa ukunemba kwephethini ye-lithography, ngaleyo ndlela kuthuthukiswe ukuhlanganiswa nokusebenza kwe-chip.
Insimu yokulinganisa ngokunembile: I-CMM iyimishini yokulinganisa ngokunembile evame ukusetshenziswa ekukhiqizweni kwezimboni, esetshenziselwa ukukala usayizi, ukuma kanye nokunemba kwendawo yomsebenzi. Imojula yokunyakaza enembile kakhulu ye-single axis air float esisekelweni se-granite ingasetshenziswa njengeplatifomu yokunyakaza ye-CMM, engenza ukunyakaza okuqondile okuphezulu futhi inikeze umzila wokunyakaza ozinzile weprobe yokulinganisa. Isibonelo, i-CMM ephezulu ye-Hexagon isebenzisa le nhlanganisela ukukala izingxenye ezinkulu neziyinkimbinkimbi ngokunemba kokulinganisa kuze kufike ezingeni le-micron, ihlinzeka ngesiqinisekiso esinamandla sokulawulwa kwekhwalithi yezingxenye ezimbonini zezimoto, zezindiza kanye nezinye izimboni.
Insimu yezindiza: Ekucutshungulweni nasekuhlolweni kwezingxenye zezindiza, kudingeka ukunemba okuphezulu. Isibonelo, ukucutshungulwa kwama-blade enjini yendiza kudinga ukulawulwa okunembile kwendlela yokunyakaza kwethuluzi ukuqinisekisa ukunemba kwephrofayili ye-blade. Isisekelo se-granite se-module yokunyakaza ye-single axis float ultra-precision module singasetshenziswa esikhungweni sokugaya sama-axis amahlanu kanye neminye imishini ukuze kuhlinzekwe ukulawula ukunyakaza okunembile kwethuluzi nokuqinisekisa ukuthi ukunemba kokugaya kwe-blade kungahlangabezana nezidingo zomklamo. Ngesikhathi esifanayo, enqubweni yokuhlanganisa injini ye-aero, kuyadingeka futhi ukusebenzisa imishini yokulinganisa enembile kakhulu ukuthola ukunemba kokuhlanganisa kwezingxenye. I-module yokunyakaza entantayo emoyeni yesisekelo se-granite inganikeza ukwesekwa okuzinzile kanye nokunyakaza okunembile kwemishini yokulinganisa ukuqinisekisa ikhwalithi yokuhlanganisa.
Inkambu yokuhlola okubonakalayo: Enqubweni yokukhiqiza nokuhlola izingxenye ze-optical, kuyadingeka ukwenza ukubeka nokulinganisa okunembile kakhulu kwezingxenye ze-optical. Isibonelo, lapho kukhiqizwa izingxenye ze-optical ezinembile kakhulu njengezibuko namalensi, kuyadingeka ukusebenzisa ama-interferometer neminye imishini ukuthola ukunemba kokuma kobuso. Isisekelo se-granite se-module yokunyakaza okuqondile kwe-single axis air floating ultra-precision singasetshenziswa njengeplatifomu yokunyakaza ye-interferometer, engaqaphela ukunemba kokubeka kwe-sub-micron futhi inikeze ukwesekwa kwedatha okunembile kokuthola izingxenye ze-optical. Ngaphezu kwalokho, emishinini yokucubungula i-laser, kuyadingeka futhi ukusebenzisa iplatifomu yokunyakaza okunembile kakhulu ukulawula indlela yokuskena yomsebe we-laser, isisekelo se-granite se-module yokunyakaza okuntantayo yomoya singahlangabezana nale mfuneko, ukuze kufezwe ukucutshungulwa kwe-laser okunembile kakhulu.