Ukukhiqizwa kwe-semiconductor: Enqubweni yokukhiqiza ama-chip, inqubo ye-photolithography idinga ukudlulisa iphethini yesekethe ngokunembile kusiluli. Isisekelo segwadle semojuli ye-axis eyodwa yomoya entantayo ye-ultra-precision motion module singanikeza ukuma okunembayo okuphezulu nokusekelwa okuzinzile kwetafula le-wafer emishinini ye-lithography. Isibonelo, i-ASML kanye nabanye abakhiqizi bemishini ye-lithography abadumile emhlabeni wonke basebenzisa amamojula anyakazayo we-granite base air antantayo emishinini yabo ephezulu, engalawula ukunemba kokuma kwe-wafer ezingeni le-nanometer ukuze kuqinisekiswe ukunemba kwephethini ye-lithography, ngaleyo ndlela ithuthukise ukuhlanganiswa nokusebenza kwe-chip.
Inkambu yokulinganisa ukunemba: I-CMM iyithuluzi lokulinganisa ukunemba elivame ukusetshenziswa ekukhiqizeni kwezimboni, elisetshenziselwa ukukala usayizi, umumo kanye nokunemba kwendawo yomsebenzi. Imojuli yokunyakaza enembe kakhulu ye-axis air float kusisekelo se-granite ingasetshenziswa njengengxenyekazi enyakazayo ye-CMM, ekwazi ukubona ukunyakaza komugqa okunembe kakhulu futhi inikeze umzila onyakazayo ozinzile we-probe yokulinganisa. Isibonelo, i-CMM ye-Hexagon ephezulu isebenzisa le nhlanganisela ukukala izingxenye ezinkulu neziyinkimbinkimbi ngokunemba kokulinganisa kuze kufike kuzinga le-micron, ihlinzeka isiqinisekiso esiqinile sokulawulwa kwekhwalithi yezingxenye ezimbonini zezimoto, ze-aerospace nezinye.
Inkambu ye-Aerospace: Ekucutshungulweni nasekuhlolweni kwezingxenye ze-aerospace, ukunemba okuphezulu kuyadingeka. Isibonelo, ukwenziwa kwemishini yezinkemba zenjini yendiza kudinga ukulawula okunembile komzila wethuluzi ukuze kuqinisekiswe ukunemba kwephrofayela ye-blade. Isisekelo se-granite se-single axis air float ultra-precision motion module singasetshenziswa esikhungweni semishini ye-axis emihlanu kanye nezinye izinto zokusebenza ukuze kuhlinzekwe ukulawulwa kokunyakaza okunembayo okuphezulu kwethuluzi nokuqinisekisa ukuthi ukunemba komshini we-blade kungahlangabezana nezidingo zokuklama. Ngesikhathi esifanayo, ohlelweni lokuhlanganisa injini ye-aero, kuyadingeka futhi ukusebenzisa imishini yokulinganisa enembile kakhulu ukuze kutholwe ukunemba komhlangano wezingxenye. Imodyuli yokunyakaza entantayo yomoya yesisekelo se-granite inganikeza ukusekela okuzinzile nokunyakaza okunembile kwemishini yokulinganisa ukuze kuqinisekiswe ikhwalithi yomhlangano.
Inkambu yokuhlola i-Optical: Enqubweni yokukhiqiza nokuhlola yezingxenye ze-optical, kuyadingeka ukwenza ukuma okunembayo okuphezulu kanye nokukalwa kwezinto ezibonakalayo. Isibonelo, lapho ukhiqiza izingxenye ze-optical ezinemba okuphezulu njengezibuko namalensi, kuyadingeka ukusebenzisa ama-interferometer nezinye izinto zokusebenza ukuze kutholwe ukunemba komumo ongaphezulu. Isisekelo se-granite semojula ye-axis eyodwa yomoya entantayo ye-ultra-precision motion module ingasetshenziswa njengenkundla yokunyakaza ye-interferometer, engakwazi ukubona ukunemba kokuma kwe-sub-micron futhi inikeze ukusekelwa kwedatha okunembile ukuze kutholwe izingxenye ze-optical. Ngaphezu kwalokho, kumishini yokucubungula i-laser, kuyadingeka futhi ukusebenzisa isiteji sokunyakaza esinembayo esiphezulu ukuze kulawulwe i-trajectory yokuskena ye-laser beam, isisekelo se-granite semodyuli yokunyakaza entantayo emoyeni singahlangabezana nale mfuneko, ukuze kuzuzwe ukucutshungulwa kwe-laser okunembayo okuphezulu.
Isikhathi sokuthumela: Apr-07-2025