Imboni ye-semiconductor yomhlaba wonke okwamanje ihileleke ekufuneni okungapheli kwe-"Angstrom Era," lapho ubukhulu be-transistor bulinganiswa khona ngobubanzi bama-athomu ambalwa nje. Njengoba i-lithography namathuluzi okuhlola eshintshela kulezi zikali ezincane, isidingo sokuzinza kwesakhiwo sishintshe kusukela "ku-macro" saya ku-"nano." Enhliziyweni yalolu guquko kukhona izinto ezindala njengoMhlaba uqobo: i-Precision Granite.
Nakuba abaningi bebheka i-granite njengetshe elilula, uma kuqhathaniswa ne-isigaba sokubeka i-nanopositioningnoma uhlelo lokuhlola i-wafer olusheshayo, luyi-ceramic yobunjiniyela eyinkimbinkimbi. Ukuqonda umehluko phakathi kwamathuluzi ayisisekelo okukala kanye namapulatifomu okunyakaza athuthukile kubalulekile kuma-OEM afuna ukusunduza imingcele yalokho okungenzeka ekwakhiweni kwe-silicon.
Ipuleti Lomphezulu We-Granite CMM vs. Granite: Ukuqonda Ushintsho Lobunjiniyela
Ema-lab amaningi okulawula ikhwalithi,Ipuleti Lomphezulu Wegranitekuyinto etholakala yonke indawo—isibonelo esithembekile nesiqondile sokulinganisa ngesandla. Kodwa-ke, kukhona umbono ovamile ongaqondile wokuthi ipuleti elingaphezulu kanye nesisekelo se-Granite CMM (Coordinate Measuring Machine) kuyashintshana. Ngokombono wobunjiniyela, zimele amazinga amabili ahlukene obunzima.
Ipuleti elingaphezulu lenzelwe ukuzinza okungaguquki. Umsebenzi walo oyinhloko ukuhlala uyisicaba ngaphansi komthwalo ongaguquki. Ngokuphambene nalokho, isisekelo segranite se-CMM noma isigaba sokunemba kumele sibhekane nemithwalo enamandla. Njengoba ibhuloho le-CMM lihamba noma injini eqondile isheshisa isigaba se-wafer kuma-G amaningana, igranite kumele imelane hhayi nje nokugoba, kodwa futhi nokugoba kanye nokuzwakala kwe-harmonic.
Onjiniyela be-ZHHIMG bakhetha ngokukhethekile i-“Black Granite” ukuze basebenzise izinto eziguquguqukayo ngenxa yobuningi bayo obukhulu kanye nesakhiwo sezinhlamvu ezincane. Ngenkathi ipuleti elijwayelekile lobuso lingasebenzisa uhlobo olunezimbobo eziningi, isisekelo se-CMM sidinga i-Young's Modulus ephezulu kakhulu ukuqinisekisa ukuthi “ukufiphala” kokunyakaza kwesivinini esikhulu akuhumushi kube ukukhala kwesakhiwo okungonakalisa idatha yokulinganisa.
Izigaba Zokunemba Ekukhiqizweni Kwe-Semiconductor: Isisekelo Sokukhiqiza
Ekukhiqizweni kwe-semiconductor, i-throughput kanye ne-yield yizindlela ezimbili ezibaluleke kakhulu zokulinganisa. Zombili zincike ngqo ekusebenzeni kwe-izigaba zokunembaKungakhathaliseki ukuthi kuyisigaba se-wafer emshinini we-DUV/EUV lithography noma uhlelo lokubeka ithuluzi le-Automated Optical Inspection (AOI), izinto eziyisisekelo kumele zenze kube lula ukuphindaphindwa kwe-sub-nanometer.
Inselele enkulu kule ndwangu ukushisa. Ama-linear motors nama-actuator akhiqiza amandla okushisa abalulekile. Uma isisekelo sesiteji senziwe nge-aluminium noma insimbi, ukwanda kokushisa okubangelwayo bekuzobangela ukuthi i-wafer isuke ekuqondeni, okuholela "emaphutheni okumboza" awonakalisa wonke ama-chips.
I-coefficient ephansi kakhulu yokwanda kokushisa (i-CTE) ye-Granite iqinisekisa ukuthi noma izinjini zishisa, "imephu" ebonakalayo yesiteji ihlala ingaguquguquki. Ngaphezu kwalokho, i-ZHHIMG inikeza izingxenye ze-granite ezenziwe ngokwezifiso ngezindlela zokuthwala umoya ezihlanganisiwe. Ngenxa yokuthi i-granite ingaxhunywa ibe yi-flatness efana nesibuko, isebenza njengendawo efanelekile yokumelana nama-air bearings, okuvumela izigaba ukuthi "zintante" efilimini encane yomoya engenakho ukungqubuzana kanye ne-zero stiction.
I-Fiziksi Yesisekelo Sesiteji Sokubeka I-Nanopositioning
Uma singena embusweni we-isigaba sokubeka i-nanopositioning, sibhekene nokunyakaza okuncane kunonwele lomuntu ngesilinganiso esingu-10,000. Kuleli zinga, ukudlidliza kuyisitha. Izitezi zezimboni ezijwayelekile ziyadlidliza njalo ngenxa yezinhlelo ze-HVAC, ukuhamba ngezinyawo, kanye nemishini eseduze.
I-Granite isebenza njengesihlungi esikhulu esidlula phansi. Ngenxa yobukhulu bayo obukhulu kanye nomswakama ophezulu wangaphakathi, ngokwemvelo imunca ukudlidliza okuvama kakhulu ngaphambi kokuba kufinyelele ezinzwa ezibucayi noma ku-wafer uqobo. Lokhu "kuhlukaniswa okungenamsebenzi" yisona sizathu esenza abahlinzeki be-lithography abahamba phambili emhlabeni bathembele ku-ZHHIMG ukuhlinzeka ngezisekelo ezisindayo nezizinzile zezigaba zabo ezihambisana ne-vacuum. I-granite yethu iphathwa ngokukhethekile ukuqinisekisa ukuthi ayiphumi negesi, okwenza ifanelekele izindawo ezine-vacuum ephezulu ezidingekayo ezinqubweni ze-electron-beam kanye ne-EUV.
Ukufinyelela Umkhawulo: Inzuzo ye-ZHHIMG
Ukushintsha kusuka ebhulokini elingavuthiwe letshe kuya engxenyeni ye-semiconductor-grade kuwuhambo lokubekezela okukhulu. Ngenkathi ukugaya i-CNC kusisondeza, ibanga lokugcina elithi "Super-Precision" litholakala ngokugoqa ngesandla. Lena inqubo lapho ochwepheshe be-ZHHIMG basebenzisa khona ama-paste abrasive kanye nokunyakaza ngesandla ukuze bachebe izingxenyana ze-micron ngesikhathi.
Okweisigaba sokubeka i-nanopositioning, ukuba yisicaba akuyona yodwa imfuneko; ukulingana kanye nokuma okuqondile kwezindawo zomhlahlandlela kubaluleke kakhulu. Isikhungo sethu sisebenzisa ama-laser tracker kanye namazinga kagesi anezinqumo zemizuzwana engu-0.1 ukuqinisekisa ukuthi i-axis ngayinye iqondaniswe kahle. Leli zinga lobuciko liqinisekisa ukuthi lapho ikhasimende lifaka ama-motor alo aqondile kanye nama-encoder, isisekelo semishini siseduze "nokuphelele" njengoba i-physics ivumela.
Ukuqinisekisa Ikusasa Elihle
Njengoba imboni iqhubekela phambili kuma-node angu-2nm nangale kwalokho, izidingo zokuhlanzeka kwezinto ezibonakalayo kanye nokuqina kobukhulu zizoqhubeka nokuqina. Ukuhlanganiswa kwe-granite nezinye izinto ezithuthukisiwe—njengebhuloho le-carbon fiber noma ama-ceramic vacuum chucks—kuyindawo elandelayo yokulawula ukunyakaza.
I-ZHHIMG isalokhu izibophezele ekubeni ngaphezu nje komhlinzeki; singumlingani osebenzisanayo ochungechungeni lokuhlinzeka ngemishini ye-semiconductor yomhlaba wonke. Ngokuhlinzeka ngezisekelo ezizinzile kakhulu ezidingekayo esizukulwaneni esilandelayo sezigaba zokunemba, sisiza ekwakheni imishini eyakha ikusasa.
Isikhathi sokuthunyelwe: Feb-02-2026