Amaphutha omkhiqizo wezingxenye ze-granite ze-Wafer Processing Equipment

Imishini yokucubungula i-wafer iyingxenye ebalulekile yenqubo yokukhiqiza i-semiconductor. Le mishini yakhiwe yizingxenye ezahlukahlukene, kufaka phakathi izingxenye ze-granite. I-granite iyinto efanelekile yalezi zingxenye ngenxa yokuqina kwayo okuhle kakhulu nokuqina. Kodwa-ke, njenganoma iyiphi enye into, izingxenye ze-granite zithambekele ekuphuphuthekeni okungathinta ukusebenza kanye nokusebenza kahle kwemishini yokucubungula i-wafer. Kulesi sihloko, sizoxoxa ngezinye zeziphambeko ezivamile zezingxenye ze-granite emishinini yokucubungula i-wafer.

1. Imifantu:

Enye yeziphambeko ezivame kakhulu ezingxenyeni ze-granite yimifantu. Le mifantu ingabangelwa yizici ezahlukahlukene, okuhlanganisa ukushintshashintsha kwezinga lokushisa okukhulu, ukucindezeleka komshini, ukuphathwa okungafanele, kanye nokunakekelwa okunganele. Imifantu ingalimaza ubuqotho besakhiwo sezingxenye ze-granite, okwenza zibe sengozini enkulu yokwehluleka. Ngaphezu kwalokho, imifantu ingasebenza njengezindawo ezingaba khona zokugxila ekucindezelekeni, okuholela ekulimaleni okwengeziwe.

2. Ukuqhekeza:

Esinye isici esingase senzeke ezingxenyeni ze-granite ukuqhekeka. Ukuqhekeka kungabangelwa yizigameko ezahlukahlukene njengokushayisana ngengozi, ukuphathwa okungafanele, noma ukuguguleka. Izingxenye ze-granite eziqhekekile zingaba nobuso obuqinile kanye nemiphetho engalingani engalimaza ama-wafer ngesikhathi senqubo yokukhiqiza. Ngaphezu kwalokho, ukuqhekeka kungalimaza ukunemba kobukhulu bengxenye, okuholela ekungasebenzi kahle kwemishini kanye nesikhathi sokungasebenzi komkhiqizo.

3. Ukuguga nokudabuka:

Ukusetshenziswa okuqhubekayo kanye nokuchayeka njalo ezintweni ezihudulayo kungabangela ukuguguleka kwezingxenye ze-granite. Ngokuhamba kwesikhathi, ukuguguleka kungabangela ukwehla kokusebenza kahle kanye nokusebenza kahle kwemishini yokucubungula i-wafer. Ngaphezu kwalokho, kungabangela ukwanda kwezindleko zokulungisa kanye nezindleko zokufaka esikhundleni.

4. Ukungalungi kahle:

Izingxenye zegranite, njengetafula lokucubungula ama-wafer kanye nama-chuck, kumele ziqondaniswe kahle ukuze kugcinwe ukunemba nokuvumelana okudingekayo enkambisweni yokukhiqiza. Kodwa-ke, ukungalungi kahle kungenzeka ngenxa yezizathu ezahlukahlukene, njengokufakwa okungafanele, ukuchayeka ekudlidlizeni, noma ukulimala kwengxenye. Ukungalungi kahle kungaholela ekungalungini kahle ekwenziweni kwama-wafer, okungabangela imikhiqizo enephutha.

5. Ukugqwala:

I-Granite iyinto engasebenzi kahle emelana namakhemikhali amaningi kanye nezinyibilikisi. Kodwa-ke, ukuchayeka isikhathi eside kumakhemikhali anolaka, njenge-acid noma ama-alkali, kungaholela ekugqwaleni kwezingxenye ze-granite. Ukugqwala kungabangela ukugoba kobuso, ukushintsha kombala, noma ukulahlekelwa ukunemba kobukhulu.

Isiphetho:

Izingxenye zegranite zibalulekile ekuzinzeni nasekuthembekeni kwemishini yokucubungula i-wafer. Kodwa-ke, amaphutha anjengokuqhekeka, ukuqhekeka, ukuguguleka, ukungahleleki kahle, kanye nokugqwala kungaphazamisa ukusebenza kahle kwalezi zingxenye. Ukugcinwa kahle, ukuphathwa okufanele, kanye nokuhlolwa njalo kungasiza ekuvimbeleni nasekunciphiseni umthelela walezi ziphazamiso. Ngokubhekana nalezi ziphazamiso ngempumelelo, singaqinisekisa ukuqhubeka kokusebenza kwalezi zingxenye ezibalulekile futhi silondoloze ikhwalithi nokunemba kwemishini yokucubungula i-wafer.