Emkhakheni wokukhiqiza osezingeni eliphezulu kanye nocwaningo lwesayensi olusezingeni eliphezulu, ukunemba kwenkundla yokunyakaza kwengcindezi emile entantayo iyisisetshenziswa esibalulekile sokufeza ukusebenza okunembe kakhulu. Isisekelo se-granite sokunemba siyingxenye eyisisekelo esekela yesikhulumi, futhi ukusebenza kwayo kuhlobene eduze nendawo yokusebenza. Ukuqonda nokuhlangabezana nalezi zidingo zezemvelo akukwazi nje ukuqinisekisa ukusebenza ngokunemba okuphezulu kwesikhulumi, kodwa futhi ingxenye ebalulekile yebhizinisi ukuthuthukisa ukuncintisana kwayo emikhakheni ehlobene, echazwe ngokuningiliziwe ngezansi.
1. Izinga lokushisa: ukulawula okunembile ukuqinisekisa ukuzinza kwe-dimensional
Nakuba igwadle saziwa ngokuzinza, i-coefficient yalo yokunwetshwa kwe-thermal ayiyona iqanda, futhi izinguquko ezincane zezinga lokushisa zisengathinta ukunemba kwayo kobukhulu. Ngokuvamile, i-coefficient yokwandisa ukushisa kwegwadle ngu-5-7 ×10⁻⁶/℃. Esimeni sohlelo lokusebenza seplathifomu yokunyakaza kwe-static pressure entantayo enembile, lolu shintsho oluncane lukhuliswa iplathifomu, okungase kuholele ekuphambukeni kokunemba kokunyakaza. Isibonelo, enqubweni yokukhiqiza i-semiconductor chip, inqubo ye-lithography yokubeka izidingo zokunemba kwezinga le-danami, ukushintshashintsha kwezinga lokushisa elingu-1 ° C, ubude obuseceleni besisekelo se-granite esiyimitha elingu-1 kungase kukhiqize ama-microns angu-5-7 wokunwetshwa komugqa noma ukufinyela, okwanele ukwenza ukuchezuka kwephethini ye-chip lithography, ukunciphisa ukuchezuka. Ngakho-ke, isiteji esintantayo somoya esinembayo esinembayo esinesisekelo sokunemba segwadle, izinga lokushisa elifanele lendawo yokusebenza kufanele lilawulwe ngokuqinile ku-20 ° C ± 1 ° C, amabhizinisi angafaka isistimu yokushisa komoya ephezulu enembayo njalo, aqaphe ngokuqhubekayo futhi alungise ngokunembile izinga lokushisa elizungezile, alondoloze usayizi wokuqina kwesisekelo segwadle, ukuze kuqinisekiswe ukuthi ukusebenza kwendawo yesikhulumi ngokunemba okuphezulu.
2.umswakama: ukulawula okunengqondo, vikela ukusebenza kwesisekelo
Umswakamo nawo unomthelela obalulekile kuzisekelo zegwadle ezinembayo. Endaweni enomswakama ophezulu, i-granite kulula ukumunca umhwamuko wamanzi, futhi kungase kube khona ukufingqa phezulu, okungeke nje kuphazamise ukusebenza okuvamile kwesistimu ye-air flotation, kodwa futhi kuholele ekugugulekeni kwesikhathi eside kwendawo ye-granite, ukunciphisa ukunemba kwayo nokuphila kwenkonzo. Ukuthatha indawo yokusebenzela yokugaya i-optical lens njengesibonelo, uma umswakama ungaphezu kuka-60% RH isikhathi eside, umhwamuko wamanzi okhangiswa phezu kwesisekelo segwadle uzobhubhisa ukufana kwefilimu yokuntanta komoya, okuholela ekwehleni kokunemba kokugaya ilensi kanye nokukhubazeka kwendawo. Ngakho-ke, umswakama ohlobene wendawo yokusebenza udinga ukulawulwa phakathi kuka-40% -60% RH. Amabhizinisi angasebenzisa ama-dehumidifiers, izinzwa zomswakama nezinye izinto zokusebenza ukuze aqaphe futhi alawule ukuswakama ngesikhathi sangempela, adale indawo enomswakamo efanelekile yesisekelo segwadle esinembayo, futhi aqinisekise ukusebenza okuzinzile kweplathifomu yokunyakaza yomoya entantayo enembayo.
3. ukuhlanzeka: lawula ngokuqinile, susa ukuphazamiseka kwezinhlayiyana
Izinhlayiya zothuli "ziyisitha" seplathifomu yokunyakaza yomoya oqinile oqinile enembile, futhi yenza umonakalo omkhulu kusisekelo sokunemba segwadle. Uma izinhlayiya ezincane zingena egebeni lefilimu yegesi phakathi kwesilayidi segesi esintantayo kanye nesisekelo segwadle, zingase zicekele phansi ukufana kwefilimu yegesi, zandise ukungqubuzana, futhi zinwaye ngisho nangaphezulu kwesisekelo, kuthinte kabi ukunemba kokunyakaza kweplatifomu. Kundawo yokusebenzela yemishini enembe kakhulu yezingxenye ze-aerospace, uma izinhlayiya zothuli ezisemoyeni ziwela kusisekelo segwadle, umzila wokunyakaza wethuluzi lomshini ungase uchezuke, kuthinte ukunemba komshini kwezingxenye. Ngakho-ke, indawo yokusebenza kufanele igcinwe ihlanzekile kakhulu futhi ifinyelele izinga lokuhlanzeka lika-10,000 noma ngaphezulu. Amabhizinisi angakwazi ukuhlunga akhiphe izinhlayiya zothuli emoyeni ngokufaka izihlungi zomoya ezisebenza kahle kakhulu (i-HEPA), futhi afune ukuthi abasebenzi bagqoke izingubo ezingenalo uthuli, amakhava ezicathulo, njll., ukuze banciphise uthuli olulethwa abantu, futhi balondoloze indawo yokusebenza enembayo ephezulu yesisekelo segwadle kanye nenkundla yokunemba ye-static pressure air entantayo.
4. Ukudlidliza: Ukuzihlukanisa okuphumelelayo ukudala indawo ebushelelezi
Ukudlidliza kwangaphandle kuzophazamisa kakhulu ukunemba kweplathifomu entantayo yomoya oqinile oqondile, nakuba isisekelo segwadle esinembayo sinamandla athile okunciphisa ukudlidliza, kodwa ukudlidliza kwamandla aphezulu kusengase kwephule umkhawulo wayo webhafa. Ukudlidliza okukhiqizwa ukugcwala kwefekthri kanye nokusebenza kwemishini emikhulu kudluliselwa kusisekelo segwadle emhlabathini, okuzophazamisa ukunemba kokunyakaza kweplathifomu. Ku-CMM ephezulu, ukudlidliza kungase kubangele ukuthintana phakathi kwe-probe yokulinganisa kanye nendawo yokusebenza ukuze kulinganiswe ukuthi kungazinzi, okuholela ekuphambukeni kwedatha yokulinganisa. Ukuze kuxazululwe le nkinga, kuyadingeka ukuthatha izinyathelo ezisebenzayo zokuhlukanisa ukudlidliza, njengokubeka amaphedi okuvezela ahlukanisayo okudlidliza endaweni yokufaka imishini, isisekelo sokuhlukanisa sokudlidliza, noma ukusebenzisa uhlelo olusebenzayo lokudlidliza lokuhlukanisa ukuze kucishwe ukudlidliza kwangaphandle, nokudala indawo yokusebenza ethule futhi ezinzile yesisekelo sokunemba segwadle kanye nesiteji sokunyakaza somoya esintantayo sokucindezela okumile.
Hlangana nezidingo zezemvelo ezingenhla, ukuze unikeze ukudlala okugcwele kuzinzuzo zesisekelo se-granite ngokunemba endaweni yokunemba yeplathifomu entantayo yokucindezela komoya, ukuze kuqinisekiswe ukuthi inkundla inikeza izinsizakalo zokulawula ukunyakaza ezinembayo ezinembayo neziqinile ezimbonini ezihlukahlukene. Uma amabhizinisi akwazi ukunaka le mininingwane endaweni yokukhiqiza, azobamba ithuba lokukhiqiza ngokunemba, ucwaningo lwesayensi neminye imikhakha, athuthukise ukuncintisana kwawo, futhi azuze intuthuko esimeme.
Isikhathi sokuthumela: Apr-10-2025