Ukukhiqizwa kwe-semiconductor
I-Lithography: I-Lithography iyinqubo ebalulekile ekukhiqizweni kwe-semiconductor edinga ukudluliselwa okunembile kwamaphethini wesekethe ayinkimbinkimbi kuma-wafer. Ipulatifomu yokunyakaza yokuzihlukanisa yokudlidliza esebenzayo ye-XYT eyisisekelo se-granite inganikeza ukwesekwa okuzinzile kanye nokubekwa okunembile kwemishini ye-lithography, iqinisekise ukuthi ukunemba kwendawo yetafula le-wafer enkambisweni yokuvezwa kufinyelela ezingeni le-nanometer, inciphise ngempumelelo ukuphambuka kwephethini okubangelwa ukudlidliza kanye nokuguquguquka kokushisa, futhi ithuthukise ukunemba kokukhiqiza kanye nokukhiqiza kwe-chip.
Ukuhlolwa kwe-Wafer: Ngemva kokuqedwa kokukhiqizwa kwe-wafer, idinga ukuhlolwa ngokunemba okuphezulu ukuthola amaphutha amancane namaphutha. Ipulatifomu yokunyakaza yokuzihlukanisa yokudlidliza esebenzayo ye-XYT ingathwala imishini yokuthola, njenge-microscope ye-electron beam, i-atomic force microscope, njll., ukuze kugcinwe ukunyakaza okuzinzile kanye nokuma okunembile ngesikhathi senqubo yokuthola, ukuze imishini yokuthola ikwazi ukuskena ngokunembile ubuso be-wafer, ithuthukise isinqumo sokuthola kanye nokunemba.
Ukukhiqizwa kwezinsimbi zokukhanya
Ukugaya nokupholisha ilensi: Enqubweni yokukhiqiza amalensi optical, kuyadingeka ukugaya nokupholisha amalensi ngokunemba okuphezulu ukuze uthole izakhiwo ezinhle zokukhanya. Ipulatifomu yokunyakaza yokuzihlukanisa yokudlidliza esebenzayo ye-XYT ingalawula ngokunembile indlela yokunyakaza kwamathuluzi okugaya nokupholisha, kuyilapho isisekelo se-granite singahlukanisa ukudlidliza kwangaphandle, sinciphise umthelela wokudlidliza ekunembeni komshini, ukuqinisekisa ukuthi ubuso belensi buthambile futhi buqediwe buhlangabezana nezidingo zomklamo.
Ukuhlanganiswa kwesistimu ye-Optical: Enqubweni yokuhlanganiswa kwesistimu ye-optical, izingxenye ezahlukahlukene ze-optical zidinga ukufakwa ngokunembile endaweni ethile ukuqinisekisa ukusabalala okunembile kokukhanya kanye nekhwalithi yesithombe. Ipulatifomu yokunyakaza yokuhlukaniswa kokudlidliza okusebenzayo kwe-XYT enesisekelo se-granite inganikeza ipulatifomu ezinzile yokufaka nokulungisa izingxenye ze-optical, futhi ifinyelele ukulungelelaniswa okunembile nokuhlanganiswa kwezingxenye ze-optical ngokulawula ukunyakaza okunembile.
izindiza
Ukuhlolwa kwesistimu yokuzulazula engenazintambo: Uhlelo lokuzulazula olungenantambo luyimishini ebalulekile yokuzulazula emkhakheni wezindiza, futhi ukunemba kwalo kuthinta ngqo ukunemba kokuzulazula kanye nokuphepha kokundiza kwezindiza. Enkambisweni yokuhlola uhlelo lokuzulazula olungenantambo, kuyadingeka ukusebenzisa i-turntable enembile kakhulu ukulingisa izimo ezahlukahlukene zokunyakaza kwendiza. Ipulatifomu yokunyakaza yokuhlukanisa ukudlidliza okusebenzayo kwe-XYT ingasetshenziswa njengepulatifomu yokusekela yetafula elijikelezayo. Ngokulawula ukunyakaza okunembile kanye nokusebenza okuhle kokuhlukanisa ukudlidliza, inikeza indawo yokuhamba ezinzile nenembile yokuhlolwa kwesistimu yokuzulazula engenantambo, futhi ithuthukisa ukunemba nokuthembeka kokuhlolwa.
Umshini wokugaya i-blade yenjini ye-Aero: Ukunemba komshini wokugaya i-blade yenjini ye-aero kunomthelela obalulekile ekusebenzeni nasekusebenzeni kahle kwenjini. Ipulatifomu yokunyakaza yokuzihlukanisa yokudlidliza esebenzayo ye-XYT ingasetshenziswa enqubweni yokugaya i-blade, njengesikhungo sokugaya esinama-axis amahlanu, ngokulawula ngokunembile indlela yokunyakaza kwethuluzi nokugcina indawo yokucubungula ezinzile, ukufeza umshini wokugaya onembile kakhulu we-blade, ukuqinisekisa ukuthi ukunemba kwephrofayili ye-blade kanye nekhwalithi yobuso kuhlangabezana nezidingo zomklamo.
Ukuhlolwa kocwaningo lwesayensi
Ucwaningo lwe-nanoscience: Ocwaningweni lwe-nanoscience, kuyadingeka ukusebenzisa nokubuka izinto ze-nano-scale, njengokulungiswa kwezinto ze-nanomaterial kanye nokuhlanganiswa kwamadivayisi e-nano. Isisekelo se-granite se-XYT precision active vibration isolation motion platform singanikeza ukunemba kokubeka indawo kwe-sub-micron noma ngisho ne-nano-level, sinikeze ipulatifomu yokuhlola ezinzile nenembile yocwaningo lwe-nanoscience, futhi sisize ososayensi bahlole kangcono izimfihlakalo zomhlaba we-nano.
Ukuthwebula izithombe nge-biomedical: Emkhakheni we-biomedical, njenge-fluorescence microscopy, i-confocal microscopy kanye namanye amadivayisi okuthwebula izithombe, ukuze kutholakale izithombe ze-bio ezinesinqumo esiphezulu, kudingeka indawo enembile kanye nokuthwebula izithombe okuzinzile kwesampula. Ipulatifomu yokunyakaza yokuzihlukanisa ngokunembile kwe-XYT ingathwala amasampula e-bio, inciphise ukudlidliza kanye nokukhukhuleka kwamasampula ngokulawula ukunyakaza okunembile kanye nokusebenza okuhle kokuhlukaniswa kokudlidliza, ithuthukise ikhwalithi kanye nokunemba kokuthwebula izithombe, futhi isize abacwaningi be-biomedical ukuthi benze ucwaningo olujulile ngamaseli, izicubu kanye nezinye izakhiwo ezincane kakhulu.
Isikhathi sokuthunyelwe: Ephreli-11-2025