Ngaphansi kwezidingo eziqinile zokunemba okuphezulu kanye nokuthembeka okuphezulu embonini ye-semiconductor, yize i-granite ingenye yezinto eziyinhloko, izakhiwo zayo nazo ziletha imikhawulo ethile. Lokhu okulandelayo yizinkinga zayo ezinkulu kanye nezinselele ekusetshenzisweni okusebenzayo:
Okokuqala, izinto zibuthakathaka kakhulu futhi kunzima ukuzicubungula
Ingozi yokuqhekeka: I-Granite empeleni iyitshe lemvelo elinemifantu yemvelo kanye nemingcele yezinhlayiya zamaminerali ngaphakathi, futhi iyinto evamile yokuqhekeka. Ekusebenzeni ngokunemba okukhulu (njengokugaya okulinganiselwe kanye nokucubungula ubuso obugobile okuyinkimbinkimbi), uma amandla engalingani noma amapharamitha okucubungula engafanele, izinkinga ezifana nokuqhekeka kanye nokusabalala kwe-microcrack zivame ukwenzeka, okuholela ekuqhekekeni kwengxenye yokusebenza.
Ukusebenza kahle kokucubungula okuphansi: Ukuze kugwenywe ukuphuka okubuthakathaka, kudingeka izinqubo ezikhethekile njengokugaya ngesivinini esiphansi ngamasondo okugaya idayimane kanye nokupholisha kwe-magnetorheological. Umjikelezo wokucubungula mude ngo-30% kuya ku-50% kunowezinto zensimbi, futhi izindleko zokutshalwa kwezimali kwemishini ziphakeme (isibonelo, intengo yesikhungo sokugaya esinama-axis amahlanu idlula ama-yuan ayizigidi eziyi-10).
Imikhawulo yesakhiwo esiyinkimbinkimbi: Kunzima ukukhiqiza izakhiwo ezilula eziyize ngokusebenzisa ukwakheka, ukwakheka nezinye izinqubo. Isetshenziswa kakhulu ezimweni ezilula zejometri njengezingcwecwe nezisekelo, futhi ukusetshenziswa kwayo kunqunyelwe emishinini edinga ukwesekwa okungajwayelekile noma ukuhlanganiswa kwamapayipi angaphakathi.
Okwesibili, ukuminyana okuphezulu kuholela emthwalweni osindayo emishinini
Kunzima ukuphatha nokufaka: Ubuningi be-granite bungaba ngu-2.6-3.0 g/cm³, futhi isisindo sayo siphindwe kabili kunesensimbi ephonswe ngaphansi komthamo ofanayo. Isibonelo, isisindo sesisekelo se-granite somshini we-photolithography singafinyelela amathani angu-5 kuya kwangu-10, okudinga imishini yokuphakamisa ezinikele kanye nezisekelo ezingashaqeki, okwandisa izindleko zokwakha ifektri kanye nokufakwa kwemishini.
Ukubambezeleka kwempendulo okuguquguqukayo: Ukungasheshi okuphezulu kunciphisa ukusheshisa kwezingxenye ezihambayo zemishini (njengamarobhothi okudlulisa i-wafer). Ezimweni lapho kudingeka khona ukuqala nokuma okusheshayo (njengemishini yokuhlola ngesivinini esikhulu), kungathinta isigqi sokukhiqiza futhi kunciphise ukusebenza kahle.
Okwesithathu, izindleko zokulungisa nokuphindaphinda ziphezulu
Kunzima ukulungisa amaphutha: Uma kwenzeka ukuguguleka kwendawo noma umonakalo wokushayisana ngesikhathi sokusetshenziswa, kudingeka kubuyiselwe efektri ukuze kulungiswe ngemishini yokugaya yobungcweti, engenakusingathwa ngokushesha endaweni. Ngokuphambene nalokho, izingxenye zensimbi zingalungiswa ngokushesha ngezindlela ezifana nokushisela amabala kanye nokumbozwa nge-laser, okuholela ekutheni isikhathi sokungasebenzi sibe sifushane.
Umjikelezo wokuphindaphinda komklamo mude: Umehluko emithanjeni ye-granite yemvelo ungabangela ukuguquguquka okuncane ezimpahleni zezinto (njenge-thermal expansion coefficient kanye ne-damping ratio) zama-batches ahlukene. Uma umklamo wemishini ushintsha, izakhiwo zezinto zidinga ukuhlanganiswa kabusha, futhi umjikelezo wokuqinisekisa ucwaningo nentuthuko mude kakhulu.
Iv. Izinsiza Ezilinganiselwe kanye Nezinselele Zemvelo
Itshe lemvelo alivuseleleki: I-granite esezingeni eliphezulu (njenge-"Jinan Green" kanye ne-"Sesame Black" esetshenziswa kuma-semiconductor) ithembele emithanjeni ethile, inezindawo zokugcina ezilinganiselwe futhi ukumbiwa kwayo kunqunyelwe yizinqubomgomo zokuvikela imvelo. Ngokwanda kwemboni yama-semiconductor, kungaba khona ingozi yokutholakala kwezinto zokusetshenziswa ezingazinzile.
Izinkinga zokucubungula ukungcola: Ngesikhathi sokusika nokugaya, kukhiqizwa uthuli olukhulu lwe-granite (oluqukethe i-silicon dioxide). Uma lungaphathwa kahle, lungabangela i-silicosis. Ngaphezu kwalokho, amanzi angcolile adinga ukwelashwa nge-sedimentation ngaphambi kokuba akhishwe, okwandisa ukutshalwa kwezimali ekuvikeleni imvelo.
Okuhlanu. Ukuhambisana okwanele nezinqubo ezintsha
Imikhawulo yendawo yokuhlanza: Ezinye izinqubo ze-semiconductor (njengokumbozwa kwe-vacuum kanye ne-electron beam lithography) zidinga ukugcina isimo se-vacuum esiphezulu ngaphakathi kwemishini. Kodwa-ke, ama-micro-pores ebusweni be-granite angamunca ama-molecule egesi, akhishwa kancane kancane futhi athinte ukuzinza kwezinga le-vacuum. Ngakho-ke, ukwelashwa okwengeziwe kokuminyana kwendawo (njengokufakwa kwe-resin) kuyadingeka.
Izinkinga zokuhambisana kwe-electromagnetic: I-Granite iyinto yokuvikela. Ezimweni lapho kudingeka khona ukukhishwa kukagesi ozinzile noma ukuvikela kwe-electromagnetic (njengezinkundla zokufaka i-electrostatic adsorption), izembozo zensimbi noma amafilimu okuhambisa amanzi kudingeka ahlanganiswe, okwandisa ubunzima besakhiwo kanye nezindleko.
Isu lokuphendula embonini
Naphezu kokushiyeka okukhulunywe ngakho ngenhla, imboni ye-semiconductor ikhokhele ngokwengxenye ukushiyeka kwe-granite ngokusungula izinto ezintsha kwezobuchwepheshe:
Umklamo wesakhiwo esihlanganisiwe: Wamukela inhlanganisela "yesisekelo segranite + uhlaka lwensimbi", kucatshangelwa kokubili ukuqina kanye nokukhanya (isibonelo, umenzi othile womshini we-photolithography ufaka isakhiwo se-honeycomb se-aluminium alloy esisekelweni segranite, enciphisa isisindo ngo-40%).
Izinto zokwenziwa ezihlukile: Thuthukisa izinhlanganisela ze-ceramic matrix (njenge-silicon carbide ceramics) kanye namatshe okwenziwa asekelwe ku-epoxy resin ukuze alingise ukuzinza kokushisa kanye nokumelana nokudlidliza kwe-granite, ngenkathi kuthuthukiswa ukuguquguquka kokucubungula.
Ubuchwepheshe bokucubungula obuhlakaniphile: Ngokwethula ama-algorithms e-AI ukuze kuthuthukiswe indlela yokucubungula, ukulingisa ukucindezeleka ukuze kubikezelwe izingozi zokuqhekeka, kanye nokuhlanganisa ukutholwa kwe-inthanethi ukuze kulungiswe amapharamitha ngesikhathi sangempela, izinga lokucubungula izinsalela lincishisiwe kusuka ku-5% kuya ngaphansi kwe-1%.
Isifinyezo
Ukushiyeka kwe-granite embonini ye-semiconductor empeleni kuvela emdlalweni phakathi kwezakhiwo zayo zemvelo kanye nezidingo zezimboni. Ngokuthuthuka kobuchwepheshe kanye nokuthuthukiswa kwezinto ezisetshenziswayo, izimo zokusetshenziswa kwayo zingase zinciphe kancane kancane zibe "izingxenye zokubhekisela eziyinhloko ezingenakuguqulwa" (njengezinqola zokuqondisa ze-hydrostatic zemishini ye-photolithography kanye namapulatifomu okulinganisa okunembile kakhulu), ngenkathi kancane kancane zinikeza indawo yezinto zobunjiniyela eziguquguqukayo ezingxenyeni zesakhiwo ezingabalulekile. Esikhathini esizayo, indlela yokulinganisela ukusebenza, izindleko kanye nokusimama kuzoba yindaba imboni eqhubeka iyihlola.
Isikhathi sokuthunyelwe: Meyi-24-2025