Yini i-granite isetshenziswa emishini yokucubungula e-wafer?

I-Granite iyinto ethandwayo embonini yezokucubungula ye-wafer ngenxa yezakhiwo zayo ezikhethekile zemishini nokuqina. Kuyitshe lemvelo elimanzi aqhekekile kusuka emakhethini emhlabeni wonke futhi lisetshenziselwe amakhulu eminyaka ngezinhloso ezahlukahlukene zokwakha, kufaka phakathi ukukhiqizwa kwemishini ye-semiconductor. Kulesi sihloko, sizoxoxa ngezakhiwo ze-granite kanye nezicelo zalo ezahlukahlukene emishini yokucubungula.

Izakhiwo zeGranite

IGranite yidwala elingenalo elihlanganiswe nge-mica, feldspar, ne-quartz. Kuyaziwa ngamandla ayo ahlukile, ubulukhuni, nokuqina, okwenza kube yinto efanelekile yezicelo ezidinga ukunemba okuphezulu nokunemba. I-Granite ine-coeffient ephansi yokwanda okushisayo, okusho ukuthi ayikhuli noma inkontileka ngenxa yezinguquko zokushisa, okwenza kuzinze kakhulu. Ngokwengeziwe, i-granite imelana nokugqwala namakhemikhali, okwenza kube yinto efanelekile yokusetshenziswa ezindaweni ezinokhahlo.

Izicelo zama-granite ezintweni zokusebenza ezisebenzayo

I-Granite iyinto esetshenziswa kabanzi embonini yezokucubungula ye-wafer ngenxa yenhlanganisela yayo eyingqayizivele yezakhiwo. Lokhu okulandelayo kungenye yezicelo ze-granite emishini yokucubungula e-wafer:

1. Amathuluzi weMetrology

IGranite isetshenziswa kakhulu ekwenziweni kwamathuluzi weMetrology, njengokuxhumanisa imishini yokulinganisa (CMMS) kanye nezinhlelo zokulinganisa. Lawa mathuluzi adinga indawo ezinzile ezingamelana nokunyakaza nokushisa. Ukuqina okuphezulu nokwanda okushisayo okushisayo kwe-granite kwenza kube yinto efanelekile yezinhlelo zokusebenza ezinjalo.

2. I-Chucks

I-Chucks ye-Wafer isetshenziselwa ukubamba ama-wafers ngesikhathi senqubo yokukhiqiza. Lawa ama-chucks adinga indawo eyisicaba futhi ezinzile ukuvimba i-wafer kusuka ekushayweni noma ekugobeni. IGranite ihlinzeka indawo eyisicaba eqinile futhi emelana nokubhala, okwenza kube yinto enhle kakhulu yama-chucks.

3. Amathuluzi we-Chemical Mechanical Polishing (CMP)

Amathuluzi we-CMP asetshenziselwa ukuPoland Wafers ngesikhathi sokukhiqiza. Lawa mathuluzi adinga ipulatifomu ezinzile engamelana nokunyakaza nokushisa. Ukuqina okuhle kakhulu kanye nokunwebeka okuphansi kwe-granite kwenza kube yinto efanelekile yamathuluzi we-CMP.

4. Imishini yokuhlola ye-Wafer

Imishini yokuhlola ye-Wafer isetshenziselwa ukuhlola ama-wafers ukuze amaphutha. Lawa mathuluzi adinga indawo ezinzile futhi eyisicaba ukuqinisekisa ukukalwa okunembile. I-Granite ihlinzeka indawo eqinile futhi eyisicaba emelana ne-warping, okwenza kube yinto efanelekile yemishini yokuhlola ende.

Ukugcina

Ekuphetheni, i-Granite iyinto esetshenziswa kabanzi embonini yezokucubungula e-wafer ngenxa yezakhiwo zayo ezikhethekile zemishini nokuqina. Isetshenziswa kakhulu ekwenziweni kwamathuluzi weMetrology, ama-Chucks, amathuluzi we-CMP, kanye nemishini yokuhlola ye-Wafer. Inhlanganisela eyingqayizivele yezakhiwo yenza kube yinto efanelekile yezicelo ezidinga ukunemba okuphezulu nokunemba. Ngezinzuzo zayo eziningi, i-granite ihlala iyikhetho elithandwayo lemishini yokucubungula ende, futhi ukusetshenziswa kwayo kungenzeka kuqhubeke ukukhula ngokuzayo.