Iyini iGranite esetshenziswa emishinini yokucubungula ama-wafer?

I-Granite iyinto ethandwayo embonini yokucubungula ama-wafer ngenxa yezakhiwo zayo ezihlukile zemishini nokuqina. Kuyitshe lemvelo elimbiwa ezinkwalini emhlabeni wonke futhi sekungamakhulu eminyaka lisetshenziselwa izinjongo ezihlukahlukene zokwakha, kuhlanganise nokukhiqizwa kwemishini ye-semiconductor. Kulesi sihloko, sizoxoxa ngezakhiwo ze-granite kanye nezicelo zayo ezihlukahlukene kumishini yokucubungula i-wafer.

Izakhiwo zeGranite

I-Granite idwala elivuthayo elakhiwa i-mica, i-feldspar, ne-quartz. Yaziwa ngamandla ayo akhethekile, ubulukhuni, nokuqina, okuyenza ibe into efanelekile yohlelo lokusebenza oludinga ukunemba okuphezulu nokunemba. I-Granite ine-coefficient ephansi yokunwetshwa kwe-thermal, okusho ukuthi ayikhuli noma ayinciphisi ngenxa yokushintsha kwezinga lokushisa, okuyenza izinze kakhulu. Ukwengeza, i-granite imelana nokugqwala namakhemikhali, okwenza ibe yimpahla efanelekile ukuthi isetshenziswe ezindaweni ezinokhahlo.

Izicelo zeGranite kusisetshenziswa sokucubungula i-wafer

I-Granite iyinto esetshenziswa kakhulu embonini yokucubungula ama-wafer ngenxa yenhlanganisela yayo eyingqayizivele yezakhiwo. Okulandelayo ezinye zezicelo ze-granite kumishini yokucubungula ama-wafer:

1. Amathuluzi e-Metrology

I-Granite ivame ukusetshenziswa ekukhiqizeni amathuluzi e-metrology, njengemishini yokulinganisa yokuxhumanisa (ama-CMM) namasistimu okulinganisa okubona. Lawa mathuluzi adinga izindawo ezizinzile ezingamelana nokudlidliza nokushisa. Ukuqina okuphezulu kanye nokunwetshwa okushisayo okuphansi kwe-granite kwenza kube into efanelekile yezinhlelo ezinjalo.

2. I-Wafer Chucks

Ama-wafer chucks asetshenziselwa ukubamba ama-wafers ngesikhathi senqubo yokukhiqiza. Lawa ma-chucks adinga indawo eyisicaba futhi ezinzile ukuvimbela iwafa ukuthi ingajiki noma igobe. I-Granite inikeza indawo eyisicaba ezinze kakhulu futhi imelana nokungqubuzana, iyenze ibe yinto enhle kakhulu yama-wafer chucks.

3. Amathuluzi E-Chemical Mechanical polishing (CMP).

Amathuluzi e-CMP asetshenziselwa ukupholisha ama-wafers ngesikhathi senqubo yokukhiqiza. Lawa mathuluzi adinga inkundla ezinzile engamelana nokudlidliza nokushisa. Ukuqina okuhle kakhulu nokunwetshwa okushisayo okuphansi kwegwadle kuyenza into efanelekile yamathuluzi e-CMP.

4. Izinsiza Zokuhlola I-wafer

Imishini yokuhlola i-wafer isetshenziselwa ukuhlola ama-wafers ukuze kutholakale amaphutha namaphutha. Lawa mathuluzi adinga indawo ezinzile neyisicaba ukuze kuqinisekiswe izilinganiso ezinembile. I-Granite inikeza indawo ezinzile futhi eyisicaba ekwazi ukumelana nokungqubuzana, iyenze ibe into efanelekile yezinto zokuhlola eziyisicwecwana.

Isiphetho

Sengiphetha, i-granite iyinto esetshenziswa kakhulu embonini yokucubungula ama-wafer ngenxa yezakhiwo zayo ezihlukile zemishini nokuqina. Isetshenziswa kakhulu ekwenzeni amathuluzi e-metrology, ama-wafer chucks, amathuluzi e-CMP, kanye nemishini yokuhlola i-wafer. Inhlanganisela eyingqayizivele yezakhiwo iyenza ibe yinto ekahle yezinhlelo zokusebenza ezidinga ukunemba okuphezulu nokunemba. Ngezinzuzo zayo eziningi, i-granite isalokhu iyinketho ethandwayo yemishini yokucubungula i-wafer, futhi ukusetshenziswa kwayo cishe kuzoqhubeka nokukhula esikhathini esizayo.