Ziyini izingxenye zegranite ze-Wafer Processing Equipment?

Imishini yokucubungula i-wafer isetshenziswa enkambisweni yokukhiqiza i-semiconductor ukuguqula ama-wafer e-silicon abe amasekethe ahlanganisiwe. Ihlanganisa uhla lwemishini eyinkimbinkimbi namathuluzi asetshenziswa ukwenza imisebenzi eminingana ebalulekile, okuhlanganisa ukuhlanza i-wafer, ukuqopha, ukubeka, kanye nokuhlola.

Izingxenye zegranite ziyizingxenye ezibalulekile zemishini yokucubungula i-wafer. Lezi zingxenye zenziwe ngegranite yemvelo, okuyidwala eliyi-igneous elakhiwe yi-quartz, i-feldspar, ne-mica. Igranite ilungele ukucubungula i-wafer ngenxa yezakhiwo zayo ezihlukile zemishini, ukushisa, kanye namakhemikhali.

Izakhiwo zemishini:

I-granite iyinto eqinile futhi ebanzi emelana nokuguguleka nokuguquka. Inesilinganiso esiphakeme samandla nesisindo, okusho ukuthi ingamelana nemithwalo esindayo ngaphandle kokuqhekeka noma ukuphuka. Lesi sici senza kube ukukhetha okuhle kakhulu kwezingxenye ezinembayo ephezulu ezidinga ukunemba okukhulu.

Izakhiwo zokushisa:

I-Granite ine-coefficient ephansi yokwanda kokushisa, okusho ukuthi ayikhuli noma ayinciphisi kakhulu uma ibhekene nokushintsha kwezinga lokushisa. Lesi sici senza kube yinto efanelekile yokusetshenziswa emishinini yokucubungula i-wafer, lapho ukulawulwa kwezinga lokushisa kubalulekile khona.

Izakhiwo zamakhemikhali:

I-granite imelana kakhulu nokugqwala kwamakhemikhali, okwenza ibe yindawo ekahle yokusetshenziswa ezindaweni zamakhemikhali ezinzima. Ayisebenzi kuma-asidi amaningi, izisekelo, noma izinyibilikisi, okwenza kube ukukhetha okuhle kakhulu kwenqubo yokusika amakhemikhali esetshenziswa ekucubungulweni kwe-wafer.

Izingxenye ze-granite ziyingxenye ebalulekile yemishini yokucubungula i-wafer. Zisetshenziswa ezinqubweni eziningana ezibalulekile, okuhlanganisa ukuhlanza i-wafer, ukuqopha, kanye nokubeka. Zihlinzeka ngeplatifomu eqinile nehlala isikhathi eside yemishini, okuqinisekisa imiphumela enembile nethembekile.

Ngamafuphi, imishini yokucubungula i-wafer ibalulekile ekukhiqizweni kwamasekethe ahlanganisiwe, futhi izingxenye ze-granite zidlala indima ebalulekile ekusebenzeni kwayo. Lezi zingxenye zenziwe nge-granite yemvelo, enikeza izakhiwo ezihlukile zemishini, ezishisayo, nezamakhemikhali ezifanele kakhulu ekucutshungulweni kwe-wafer. Izingxenye ze-granite zinikeza ipulatifomu eqinile neqinile yemishini, eqinisekisa imiphumela enembile nethembekile.