Buyini ubuchwepheshe bokucubungula izingxenye ze-granite kumishini ye-semiconductor?

Ngokukhula kobuchwepheshe, ukusetshenziswa kwezingxenye ze-granite kumishini ye-semiconductor sekuye kwathandwa kakhulu.I-Granite iyinketho ethandwayo yokusetshenziswa kubuchwepheshe bokucubungula imishini ye-semiconductor ngenxa yezinzuzo zayo eziningi.I-Granite ingenye yezinto eziqinile futhi ezihlala isikhathi eside ezitholakalayo okwenza ilungele ukusetshenziswa embonini yokukhiqiza i-semiconductor.Iwumqhubi omuhle kakhulu we-thermal futhi ine-coefficient ephansi kakhulu yokwandisa okushisayo okuyenza ifanelekele ukusetshenziswa ezinhlelweni zokushisa okuphezulu.

Ubuchwepheshe bokucubungula izingxenye ze-granite kumishini ye-semiconductor bubandakanya amasu nezinqubo eziningi.Izinyathelo ezibalulekile ukupholisha, ukucwiliswa, nokuhlanza indawo engaphezulu yegwadle.Uhlobo lobuchwepheshe bokucubungula olusetshenzisiwe luzoncika ekusetshenzisweni kanye nohlobo lwegwadle elisetshenziswayo.

Ukupholisha kuyisici esibalulekile sokucubungula izingxenye ze-granite kumishini ye-semiconductor.Ukupholisha ubuso be-granite ngezinga eliphakeme lokushelela kusiza ukuqinisekisa ukuthi i-wafer ayilinyazwa ngesikhathi sokucubungula.Lokhu kunciphisa amathuba okungcola ngezinhlayiya noma imihuzuko ebusweni bewafa.Ukupholisha kungafezwa ngezindlela ezahlukahlukene njengokupholisha ngomshini, ukupholisha ngamakhemikhali, nokupholisha nge-electrochemical, phakathi kokunye.

I-Etching ingesinye isici esibalulekile sokucubungula izingxenye ze-granite kumishini ye-semiconductor.I-Etching isetshenziselwa ukudala amaphethini adingekayo ebusweni bengxenye ye-granite.Amaphethini asetshenziswa ekukhiqizeni nasekucubunguleni ama-wafers we-semiconductor.Kunezindlela eziningana zokwenza ukufakwa kwe-etching, okuhlanganisa ukufakwa kwe-plasma, ukucwiliswa kwamakhemikhali amanzi, kanye nokufakwa kwamakhemikhali okomile, phakathi kokunye.Uhlobo lwenqubo yokufaka esetshenzisiwe luzoncika ezintweni kanye nephethini oyifunayo.

Ukuhlanza i-granite surface nakho kubalulekile.Inqubo yokuhlanza iyadingeka ukuze kukhishwe noma yikuphi ukungcola okungaphezulu, njengezinhlayiya nokunye ukungcola okungase kuphazamise inqubo yokukhiqiza i-semiconductor.Ukuhlanza kungenziwa kusetshenziswa izindlela ezahlukahlukene ezinjengokuhlanza i-ultrasonic, ukuhlanza amakhemikhali, noma ukuhlanza i-plasma, phakathi kokunye.

Sengiphetha, ubuchwepheshe bokucubungula izingxenye ze-granite kumishini ye-semiconductor budlala indima ebalulekile enqubweni yokukhiqiza i-semiconductor.Ukusetshenziswa kwezingxenye ze-granite kusiza ukuthuthukisa ikhwalithi nokuthembeka komkhiqizo wokugcina.Ubuchwepheshe bokucubungula bubandakanya ukupholisha, ukucwiliswa, nokuhlanza indawo engaphezulu yegwadle.Kunezindlela ezihlukahlukene ezitholakalayo zesinyathelo ngasinye, futhi uhlobo lobuchwepheshe bokucubungula olusetshenzisiwe luzoncika ezintweni kanye nephethini oyifunayo.Ngokusebenzisa ubuchwepheshe obufanele bokucubungula, inqubo yokukhiqiza i-semiconductor ingenziwa isebenze kahle, ithembeke, futhi ibe nezindleko.