Namuhla, ngentuthuko esheshayo yemboni ye-semiconductor, ukuhlolwa kwe-IC, njengesixhumanisi esibalulekile sokuqinisekisa ukusebenza kwama-chip, ukunemba kwawo kanye nokuqina kuthinta ngqo izinga lokukhiqiza kwama-chip kanye nokuncintisana kwemboni. Njengoba inqubo yokukhiqiza ama-chip iqhubeka nokuqhubekela phambili kuma-node angu-3nm, 2nm kanye naphezulu kakhulu, izidingo zezingxenye eziyinhloko emishinini yokuhlola i-IC ziya ngokuya ziba nzima. Izisekelo ze-granite, ngezakhiwo zazo ezihlukile zezinto ezibonakalayo kanye nezinzuzo zokusebenza, sezibe "umlingani wegolide" obalulekile wemishini yokuhlola i-IC. Yimuphi umqondo wobuchwepheshe ongemuva kwalokhu?
I. "Ukungakwazi Ukubhekana" Nezizinda Zendabuko
Ngesikhathi senqubo yokuhlola i-IC, imishini idinga ukubona ngokunembile ukusebenza kukagesi kwama-chip pin, ubuqotho besiginali, njll. ku-nanoscale. Kodwa-ke, izisekelo zensimbi zendabuko (njengensimbi ephonswe kanye nensimbi) ziye zaveza izinkinga eziningi ekusetshenzisweni okungokoqobo.
Ngakolunye uhlangothi, i-coefficient yokwanda kokushisa kwezinto zensimbi iphakeme kakhulu, ngokuvamile ingaphezu kuka-10×10⁻⁶/℃. Ukushisa okukhiqizwa ngesikhathi sokusebenza kwemishini yokuhlola i-IC noma ngisho nezinguquko ezincane ekushiseni okuzungezile kungabangela ukwanda okukhulu kokushisa kanye nokufinyela kwesisekelo sensimbi. Isibonelo, isisekelo sensimbi esibunjiwe esingamamitha angu-1 ubude singakhula futhi sifinyele ngamaphesenti afinyelela ku-100μm lapho izinga lokushisa lishintsha ngo-10℃. Izinguquko ezinjalo zobukhulu zanele ukuhlanganisa kabi i-test probe nama-chip pin, okuholela ekuthinteni okubi futhi kamuva kubangele ukuphambuka kwedatha yokuhlola.
Ngakolunye uhlangothi, ukusebenza kokunciphisa kwesisekelo sensimbi kubi, okwenza kube nzima ukusebenzisa ngokushesha amandla okudlidliza akhiqizwa ukusebenza kwemishini. Esimweni sokuhlolwa kwesignali okuvama kakhulu, ukujikijela okuncane okuqhubekayo kuzoletha umsindo omkhulu, okwandisa iphutha lokuhlolwa kobuqotho besignali ngaphezu kuka-30%. Ngaphezu kwalokho, izinto zensimbi zinobuthakathaka obukhulu bemagnethi futhi zivame ukuhlangana nezibonakaliso ze-electromagnetic zemishini yokuhlola, okuholela ekulahlekelweni kwamandla kagesi kanye nemiphumela ye-hysteresis, okuphazamisa ukunemba kokulinganisa okunembile.
Ii. "Amandla Aqinile" Ezisekelo Zegranite
Ukuqina kokushisa okuphezulu, okubeka isisekelo sokulinganisa okunembile
I-Granite yakhiwa yinhlanganisela eqinile yamakristalu amaminerali njenge-quartz ne-feldspar ngokusebenzisa izibopho ze-ionic neze-covalent. I-coefficient yayo yokwanda kokushisa iphansi kakhulu, ingu-0.6-5×10⁻⁶/℃ kuphela, okucishe kube yi-1/2-1/20 yezinto zensimbi. Ngisho noma izinga lokushisa lishintsha ngo-10℃, ukwanda nokuncipha kwesisekelo se-granite esingamamitha angu-1 ubude kungaphansi kuka-50nm, okucishe kufinyelele "ku-zero deformation". Okwamanje, ukuhanjiswa kokushisa kwe-granite kungu-2-3 W/(m · K) kuphela, okungaphansi kwe-1/20 yezinsimbi. Ingavimbela ngempumelelo ukuhanjiswa kokushisa kwemishini, igcine izinga lokushisa lobuso besisekelo lifana, futhi iqinisekise ukuthi i-test probe kanye ne-chip zihlala zigcina indawo ehambisanayo.
2. Ukucindezela kokudlidliza okunamandla kakhulu kudala indawo yokuhlola ezinzile
Amaphutha ahlukile ekristalu kanye nesakhiwo esishelelayo somngcele wokusanhlamvu ngaphakathi kwegranite kuyinika amandla okusabalala kwamandla aqinile, ngesilinganiso sokudambisa esifinyelela ku-0.3-0.5, okungaphezu kokuphindwe kasithupha kunesisekelo sensimbi. Idatha yokuhlola ikhombisa ukuthi ngaphansi kokuvusa ukudlidliza okungu-100Hz, isikhathi sokunciphisa ukudlidliza kwesisekelo segranite singamasekhondi angu-0.1 kuphela, kanti esesisekelo sensimbi ephonswe yinsimbi singamasekhondi angu-0.8. Lokhu kusho ukuthi isisekelo segranite singacindezela ngokushesha ukudlidliza okubangelwa ukuqala nokuvala kwemishini, imithelela yangaphandle, njll., futhi silawule ukuphakama kokudlidliza kwepulatifomu yokuhlola ngaphakathi kwe-±1μm, okuhlinzeka ngesiqinisekiso esizinzile sokuma kwama-probe e-nanoscale.
3. Izakhiwo zemvelo zokulwa nogesi, eziqeda ukuphazamiseka kukagesi
I-Granite iyinto edayimanethi enokumelana okunamandla okungaphezulu kuka--10 ⁻⁵. Ama-electron angaphakathi akhona ngamabili ngaphakathi kwezibopho zamakhemikhali futhi cishe awakaze ahlukaniswe yizinkundla zangaphandle zamandla okungaphezulu. Endaweni enamandla okungaphezulu kuka-10mT, amandla ensimu yamandla okungaphezulu abangelwa ebusweni be-granite angaphansi kuka-0.001mT, kuyilapho lawo angaphezulu kwensimbi ephonswe phezulu angaphezu kuka-8mT. Lesi sici semvelo sokulwa namandla okungaphezulu singadala indawo yokulinganisa emsulwa yemishini yokuhlola i-IC, siyivikele ekuphazamisekeni kwangaphandle kwe-electromagnetic njengezimoto ze-workshop kanye nezimpawu ze-RF. Ifaneleka kakhulu ezimweni zokuhlola ezizwela kakhulu umsindo we-electromagnetic, njenge-quantum chips kanye ne-ADCs/Dacs enembile kakhulu.
Okwesithathu, ukusetshenziswa okusebenzayo kufinyelele imiphumela emangalisayo
Imikhuba yamabhizinisi amaningi e-semiconductor ibonise ngokugcwele inani lezisekelo ze-granite. Ngemva kokuba umkhiqizi wemishini yokuhlola i-semiconductor odumile emhlabeni wonke amukele isisekelo se-granite epulatifomu yakhe yokuhlola ama-chip e-5G ephezulu, ithole imiphumela emangalisayo: ukunemba kokubekwa kwekhadi le-probe kukhuphuke kusuka ku-±5μm kuya ku-±1μm, ukuphambuka okujwayelekile kwedatha yokuhlola kwehle ngo-70%, kanti izinga lokwahlulela kabi lokuhlolwa okukodwa lehle kakhulu kusuka ku-0.5% kuya ku-0.03%. Okwamanje, umphumela wokucindezela ukudlidliza uyamangalisa. Imishini ingaqala ukuhlolwa ngaphandle kokulinda ukuthi ukudlidliza kubole, ifinyeze umjikelezo wokuhlola owodwa ngo-20% futhi ikhulise amandla okukhiqiza wonyaka ngama-wafer angaphezu kwezigidi ezintathu. Ngaphezu kwalokho, isisekelo se-granite sinokuphila kweminyaka engaphezu kwe-10 futhi asidingi ukulungiswa njalo. Uma kuqhathaniswa nezisekelo zensimbi, izindleko zaso zizonke zincishiswe ngaphezu kuka-50%.
Okwesine, ukuzivumelanisa nemikhuba yezimboni futhi uhole ekuthuthukiseni ubuchwepheshe bokuhlola
Ngokuthuthuka kobuchwepheshe bokupakisha obuthuthukisiwe (njengeChiplet) kanye nokukhula kwamasimu asafufusa njenge-quantum computing chips, izidingo zokusebenza kwedivayisi ekuhlolweni kwe-IC zizoqhubeka nokukhula. Izisekelo ze-granite nazo zihlala zisungula futhi zithuthukisa. Ngokusebenzisa ukwelashwa kokumboza ubuso ukuze kuthuthukiswe ukumelana nokuguguleka noma ngokuhlanganiswa ne-piezoelectric ceramics ukuze kufezwe isinxephezelo sokudlidliza okusebenzayo kanye nezinye izimpumelelo zobuchwepheshe, ziya esiqondisweni esinembile nesihlakaniphile. Esikhathini esizayo, isisekelo se-granite sizoqhubeka nokuvikela ukusungulwa kobuchwepheshe kwemboni ye-semiconductor kanye nokuthuthukiswa kwekhwalithi ephezulu "kwe-Chinese chips" ngokusebenza kwayo okuvelele.
Ukukhetha isisekelo se-granite kusho ukukhetha isisombululo sokuhlola i-IC esinembile, esizinzile nesisebenza kahle. Kungakhathaliseki ukuthi ukuhlolwa kwe-chip yenqubo ethuthukisiwe yamanje noma ukuhlola kwesikhathi esizayo kobuchwepheshe obusezingeni eliphezulu, isisekelo se-granite sizodlala indima engenakuphindwa futhi ebalulekile.
Isikhathi sokuthunyelwe: Meyi-15-2025