Ezweni eliguquguqukayo lemishini enembile kakhulu—lapho izinhlelo zokubona komshini zicubungula izigidi zamaphuzu edatha ngomzuzwana kanye nama-motor aqondile eshesha ngesivinini se-air bearings—isici esibaluleke kakhulu sihlala siqinile ngokwejiyometri. Yonke imishini ethuthukisiwe, kusukela kumishini yokuhlola i-wafer kuya kubasiki be-laser abanefomethi enkulu, kumele ilandelele umsuka wayo emuva emgqeni nendiza eqinisekisiwe. Lesi sidingo esiyisisekelo yingakho amathuluzi akhethekile e-metrology, ikakhulukazi i-granite straight ruler enezindawo ezimbili ezinembile, imithetho ye-granite linear, kanyeimithetho efanayo yendiza yegranite, kusalokhu kuyizindinganiso ezibalulekile ekukhiqizeni ubuchwepheshe obuphezulu.
Lawa mathuluzi awawona nje amatshe acwebezelayo; ayisibonelo esibonakalayo sezindinganiso zomhlaba wonke, enikeza inkomba engaguquki lapho kuchazwa khona, kuqinisekiswa, futhi kunxeshezelwe khona i-geometry yomshini wesimanje.
I-physics yeqiniso elilinganiselwe
Ukuthembela okuqhubekayo ku-granite enkathini ye-nanometer kugxile kakhulu kwi-physics yezinto ezibonakalayo, lapho izinto zobunjiniyela zendabuko njengensimbi noma insimbi ephonswe zihluleka ukuhlangabezana nezindinganiso zokuzinza.
Isitha esiyinhloko sokunemba ukukhukhuleka kokushisa. Izinsimbi zibonisa i-Coefficient of Thermal Expansion (CTE) ephezulu kakhulu, okusho ukuthi ukushintshashintsha kwezinga lokushisa okuncane kubangela izinguquko zosayizi ezilinganisekayo. Ngokuphambene nalokho, i-granite emnyama enembile ekhethekile ine-CTE ephansi kakhulu kanye ne-inertia ephezulu yokushisa. Lesi sici sivumela amathuluzi e-granite ukuthi azinze ngokumelene nokushintshashintsha kwezinga lokushisa, okunikeza umugqa wokubhekisela noma indiza ebikezelwayo futhi engathinteki kalula emsindweni wemvelo.
Ngale kwezinga lokushisa, ukudambisa ngomshini kubalulekile. I-Granite inamandla aphezulu okudambisa ngaphakathi, okuvumela ukuthi imunce ngokushesha amandla omshini futhi isuse ukudlidliza. Irula lensimbi, uma liphazamisekile, livame ukuzwakala, lisakaze iphutha ohlelweni olulinganiswayo. Nokho, irula eliqondile le-granite lihlala ngokushesha, liqinisekisa ukuthi izilinganiso zibonisa i-geometry yangempela yento eqondiwe, hhayi ukudlidliza kwethuluzi lokulinganisa ngokwalo. Lokhu kubaluleke kakhulu lapho kubhekene nezinhlelo zokuhamba isikhathi eside noma ukulungiswa kokukhanya okuphezulu.
Ukuchaza Ukulingana: Umbusi Oqondile We-Granite onezindawo ezimbili eziqondile
Isidingo sejiyometri esivame kakhulu nesiyisisekelo ekwakhiweni komshini ukuqondisa. Zonke iziteshi zokuqondisa, uhlelo lwenqola, kanye nesigaba sokuhumusha zincike emgqeni oqondile ngokuphelele wokuhamba. Irula eliqondile le-granite elinezindawo ezimbili eziqondile liyihashi elisebenzayo lale nqubo, elihlinzeka ngomphetho oqondile oqinisekisiwe futhi, okubaluleke kakhulu, indiza yokubhekisela ehambisanayo.
Ukuba nezindawo ezimbili eziphikisanayo ezinembile kakhulu kuvumela irula ukuthi lingasetshenziswa hhayi nje kuphela ukuqinisekisa ukunemba ngokumelene nomthombo wokukhanya noma izinga le-elekthronikhi eceleni komkhawulo wokusebenza ophezulu, kodwa futhi nokwenza ukuhlolwa okuyinkimbinkimbi kokufana kanye nokusonta emibhedeni yomshini. Isibonelo, lapho kusethwa izinto ezinkulu zokuhlanganisa noma ozimele bomshini omude, ubuso obubili obuhambisanayo buvumela uchwepheshe ukuthi aqinisekise ukuthi imigqa emibili yokufakelwa ehlukene ihambisana nomunye nomunye kanye nendiza eyinhloko yokubhekisela (njengepuleti lobuso). Lokhu kusebenza okuningi kwenza kube lula izinyathelo zokuqondanisa ezibalulekile, ukuqinisekisa ukuthi umshini wakhiwe ngesikwele futhi uyiqiniso kusukela esisekelweni kuya phezulu.
Ubuso balaba babusi kumele buhlangabezane nezindinganiso eziqinile kakhulu, ezivame ukuqinisekiswa ukuthi zibekezelelana ngama-micron noma izingxenyana zawo, zifuna izinga lokuphela kobuso elingatholakala kuphela ngezinqubo zokulawula ezilawulwa kakhulu.
Ukuguquguquka Kokulinganisa: Imithetho Eqondile Ye-Granite
Igama elithi imithetho eqondile ye-granite livame ukusebenza njengesigaba esibanzi samathuluzi aklanyelwe ukunikeza ireferensi eqondile eqinisekisiwe ebangeni elikhulu. Le mithetho ibalulekile emisebenzini emikhulu yezimboni, njenge:
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Amaphutha Okumapha: Kusetshenziswa kanye nama-interferometer e-laser noma ama-auto-collimator ukumapha iphutha lokuqondile endleleni yokuhamba ye-axis yomshini. Ukulingana komthetho we-granite kunikeza isisekelo esingaguquki esidingekayo kulezi zilinganiso eziguquguqukayo ezibucayi kakhulu.
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Ukuqondaniswa Kokuhlanganiswa: Okusebenza njenge-jig yesikhashana, eqinisekisiwe ukuqinisekisa ukuthi izingxenye ezinkulu (njengezinsika zamabhuloho noma izingalo ze-gantry) ziqondaniswe kahle ngaphambi kokuba ziboshwe unomphela.
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Ukulinganiswa Kwamathuluzi Ebanga Eliphansi: Ukunikeza ireferensi eyinhloko lapho kulinganiswa khona ama-straightedge noma iziqondiso zebanga eliphansi, ezisebenzayo.
Ukuphila isikhathi eside kanye nokuzinza okungokwemvelo kwe-granite kusho ukuthi uma umthetho we-granite linear usuqinisekisiwe, ubuqotho bayo bejometri bugcinwa isikhathi eside kakhulu kunobamathuluzi ensimbi alinganayo, okunciphisa imvamisa kanye nezindleko zokulinganisa kabusha.
Ukusungula Indiza Ephelele: Imithetho Ehambisanayo Yendiza Yegranite
Imithetho ehambisanayo yendiza yegranite iklanyelwe ngqo ukubhekana nesidingo sebhulokhi eliqinisekisiwe elinobuso obubili obuhambisanayo nobuyisicaba obusebenzayo. Ngenkathi amarula aqondile egxila ekuqondeni, imithetho ehambisanayo igxila ekufaneni kokuphakama kanye nokusicaba endaweni yabo yokusebenza.
Le mithetho ibalulekile ku:
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Ukukala kanye Nokuhlukaniswa Kwezikhala: Kusetshenziswa njengezihlukanisi noma izisekelo ezinembile lapho ukufana kokuphakama kanye nokufana phakathi kwamaphuzu amabili aphikisanayo kumele kube okuphelele, njengalapho kufakwa izingxenye ze-optical noma kulinganiswa amageyiji okuphakama.
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Ukuhlola Ukuthambekela Kwetafula Nokuhlela: Kusetshenziswa kumapuleti obuso ukuqinisekisa ukuthi izindawo ezahlukene zepuleti zigcina ukuphakama okufanayo uma kuqhathaniswa.
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Ukuqapha Okunembile: Kusetshenziswa emisebenzini yokuhlanganisa lapho ibanga eliqondile phakathi kwezici ezimbili ezifanayo kumele ligcinwe ku-sub-micron tolerances, kuncike ekulinganeni okuqinisekisiwe komthetho phakathi kobuso bawo obubili obukhulu.
Ukukhiqizwa okuphumelelayo kwemithetho efanayo yendiza ye-granite kudinga ukulawulwa okukhulu kwenqubo yokugaya nokuhlanganisa, ukuqinisekisa ukuthi ubuso obubili abugcini nje ngokuba nokuphambuka okuncane kodwa futhi bulingana ngokuphelele kuzo zonke izindawo ebusweni babo.
Izinga Lekhwalithi Yomhlaba Wonke
Igunya ngemuva kwala mathuluzi abukeka elula lisesitifiketini sawo. Abakhiqizi abasebenza esicongweni semboni yokunemba kumele banamathele futhi badlule amazinga amaningi okulinganisa amazinga omhlaba wonke (njenge-DIN, i-ASME, i-JIS, kanye ne-GB). Lokhu kuzinikela ekuhambisaneni nezindinganiso eziningi kuyisiqinisekiso esiqondile kumakhasimende omhlaba wonke—kusukela kubakhiqizi bezimoto baseJalimane kuya ezinkampanini zezindiza zaseMelika—ukuthi iqiniso lejiyometri elichazwa yi-granite straight ruler enezindawo ezimbili zokunemba lingaqinisekiswa kuyo yonke indawo.
Ngaphezu kwalokho, le nqubo yokuqinisekisa idinga isiko lekhwalithi engaguquki. Lokhu kusho ukuthi ukunemba kokugcina kwengxenye ngayinye akusikho nje umphumela wemishini yokusika ethuthukisiwe, kodwa kungukuthinta kokugcina okunikezwa ochwepheshe abanolwazi olukhulu lokugoqa izandla. Laba badwebi, abavame ukuba nesipiliyoni seminyaka engaphezu kwamashumi amathathu, basebenzisa ikhono labo lokuthinta ukususa izinto ezingeni le-single-micron, beletha i-granite ku-geometry yayo yokugcina eqinisekisiwe. Leli khono lomuntu, elihlanganiswe nokuqinisekiswa yizinhlelo zokulinganisa ezingezona ezithintana ezithuthukisiwe njenge-laser interferometers, yilokho okunikeza la mathuluzi e-granite igunya lawo eliphelele nelingaphikwa ezweni lokunemba okukhulu.
Ukuzinza okulula nokungaguquki kwetshe, okupheleliswe yizindinganiso eziqinile ze-metrology yesimanje, kusalokhu kuyinsika ebalulekile ezweni elidlulayo neliguquguqukayo lokukhiqizwa kwama-nanometer.
Isikhathi sokuthunyelwe: Disemba-08-2025