Emakamelweni athule kakhulu emhlabeni—izimboni zokukhiqiza ze-semiconductor—kulwiwa impi engacacile ngokumelene nesitha esingabonakali: ukudlidliza. Njengoba imboni yomhlaba wonke yama-microelectronics isondela emikhawulweni yesango le-logic engu-2nm nangaphezulu, ukubekezelela ukungazinzi kwemishini sekuphelile. Ngaphakathi kwalezi zindawo ezicindezelekile, ezilawulwa kakhulu, ukusebenza kwethuluzi le-lithography noma i-metrology elibiza izigidi zamaRandi kunamathele kakhulu endaweni elimi kuyo. Yingakho isidingo se-i-granite engenazidlidlizi ye-fabingqalasizinda ishintshe kusukela ekucacisweni kokunethezeka yaba yisisekelo sesidingo sokwenza ngcono isivuno.
Izinhlelo zokuhlukanisa ukudlidliza zendabuko zivame ukugxila kuma-air bearings asebenzayo noma ukudambisa okuyinkimbinkimbi kwe-elekthronikhi. Kodwa-ke, izingqondo zobunjiniyela eziyinkimbinkimbi kakhulu eYurophu naseNyakatho Melika ziyaqaphela ukuthi izinhlelo ezisebenzayo zisebenza kahle kuphela njengokuqina okungasebenzi kwesisekelo sazo. I-granite yemvelo, ikakhulukazi uma icutshungulwa ibe yi-semiconductor grade granite surface plate standard, inikeza ubuningi bama-molecule obungaphakathi izinto zokwenziwa ezilwela ukubuphinda. Isakhiwo sekristalu se-gabbro ne-granite deposits ekhethiwe ye-ZHHIMG sisebenza njengesihlungi semvelo esiphansi, sidonsa amandla e-micro-acoustic aphindaphindayo aphezulu ngaphambi kokuba siguqulelwe ekufudukeni kwethuluzi.
Uma sixoxa ngeipuleti lobuso le-granite lebanga le-semiconductor, sibhekisela ezingeni lokunemba elidlula i-metrology ejwayelekile yezimboni. Eshabhu elijwayelekile, ipuleti leBanga 00 linganele ukuhlola izingxenye zemishini. Esimweni se-semiconductor, onjiniyela be-ZHHIMG kumele bacabangele ukunemba kwevolumu, i-hygroscopy yendawo, kanye nokuqina kokusanhlamvu kwesikhathi eside. Noma yikuphi ukushintsha okuncane kakhulu etsheni eminyakeni emihlanu kungaholela ekulahlekelweni okukhulu kokugxila kusikena se-EUV (Extreme Ultraviolet). Ngakho-ke, ukucubungula kwethu kuhilela isikhathi sokukhululeka ekucindezelekeni, okuvumela itshe ukuthi lifinyelele esimweni sokulingana kwejiyoloji ngaphambi kokuqala kokunemba kokugcina.
Ukubaluleka kwei-granite engenazidlidlizi ye-fabUkusetshenziswa kukhuliswa kakhulu yizidingo ezikhulayo zokusebenzisa i-wafer processing yesimanje. Ama-motor anejubane eliphezulu, ashukumisa izigaba ze-wafer ngokusheshisa okumangalisayo, akhiqiza amandla abalulekile asebenzayo. Ngaphandle kwesisekelo esikhulu, esingasebenzi, nesinciphisa ukudlidliza, la mandla adala ukunyakaza okusele okudinga "isikhathi sokuxazulula" phakathi kokulinganisa. Ngokusebenzisa isisombululo se-granite esinesisindo esikhulu se-ZHHIMG, abaqhubi be-fab banganciphisa kakhulu lesi sikhathi sokuxazulula, bahumushe ngqo kuma-wafer amaningi ngehora kanye nezindleko eziphansi zobunikazi.
Izici zemvelo ngaphakathi kwendwangu nazo zidlala indima ebalulekile ekukhetheni izinto. Igumbi lokuhlanza liyindawo ezwela kakhulu lapho ukushintshashintsha kokushisa, noma ngabe kuncane kangakanani, kungabangela ukuthi izinto zande noma zinciphe. I-ZHHIMG'sipuleti lobuso le-granite lebanga le-semiconductorImikhiqizo ikhethwa ngenxa ye-coefficient yayo ephansi kakhulu yokwanda kokushisa (i-CTE). Uma ihlanganiswa nobuchwepheshe bethu besiteshi sokupholisa esihlanganisiwe, lezi zisekelo ze-granite zinikeza ipulatifomu engaguquki yokushisa egcina ukuqina kwayo kungakhathaliseki ukushisa okukhiqizwa yizingxenye ze-elekthronikhi ezingenhla kwayo.
Uma sibheka imboni ebanzi, ukushintshela ku-300mm kanye nosayizi we-wafer ongaba ngu-450mm kudinga izingxenye zesakhiwo ezinkulu nezizinzile. Lesi silinganiso sinikeza inselele yobunjiniyela eyingqayizivele: ukugcina ukuthamba okuphelele endaweni enkulu ngenkathi kuqinisekiswa ukuthi itshe lihlala "lingenawo amandla okudlidliza." I-ZHHIMG ibhekane nalokhu ngokutshala imali emishinini yokugaya nokufaka i-CNC eyenziwe ngokwezifiso, enefomethi enkulu engafinyelela ukubekezelelana kwezinga le-micron kumamitha amaningana etshe. Lokhu kuqinisekisa ukuthi njengoba imishini yendwangu ikhula ngobukhulu, ukuzinza kwesisekelo akunciphi.
Ngale kwehadiwe, ifilosofi ye-ZHHIMG isekelwe ekubonakaleni kobuchwepheshe kanye nobunjiniyela bokubambisana. Siyaqonda ukuthi ku-OEM (Umkhiqizi Wemishini Yokuqala) e-United States noma e-European Union, ukuthembeka kochungechunge lokuhlinzeka kubaluleke njengokuqina kwetshe. Imibhalo yethu yokulawula ikhwalithi inikeza "isitifiketi sokuzalwa" esiphelele sayo yonke ingxenye yei-granite engenazidlidlizi ye-fabukulethwa, okuchaza ngokuningiliziwe imvelaphi yetshe, ukwakheka kwamaminerali, kanye nemiphumela yokuhlolwa kwe-ultrasonic. Leli zinga lokuqina liqinisekisa ukuthi lapho kufakwa isisekelo se-ZHHIMG, siba yingxenye ehlala njalo nethembekile yefa le-fab.
Njengoba ubuhlakani bokwenziwa kanye nekhompyutha esebenza kahle kakhulu kuqhuba igagasi elisha lokutshalwa kwezimali kwe-semiconductor, ukufuna indawo "engashintshi ngokuphelele" kuyaqhubeka. I-ZHHIMG isazinikele kulokhu kuphishekela, ilungisa ubuciko bokulinganisa amatshe ukuze ibhekane nezinselele zezakhiwo ezincane zesikhathi esizayo. Sikholelwa ukuthi ikusasa lobuchwepheshe lakhiwe esisekelweni esiqinile, futhi siyaziqhenya ngokunikeza izixazululo zepuleti le-granite elizinzile kakhulu, elisezingeni le-semiconductor kubakhi besikhathi sedijithali.
Ukuhlanganiswa kwetshe lokucacisa le-ZHHIMG endaweni ethile kungaphezu kokukhetha kwesakhiwo—kuyisibopho emazingeni aphezulu kakhulu e-metrology engokwenyama. Njengoba imboni ibheka eminyakeni eyishumi ezayo yokusungula izinto ezintsha, ukuba khona kwe-granite enembile okuthule nokungantengi kuzohlala kuyiqhawe elithule lazo zonke isivuno se-wafer esiphumelelayo.
Isikhathi sokuthunyelwe: Mashi-05-2026