Izinhlelo zokunyakaza ezinembile kakhulu ziyisisekelo ekukhiqizweni kobuchwepheshe besimanje, ikakhulukazi ku-semiconductor lithography, ukuhlolwa kwe-wafer, ukuqondanisa okubonakalayo, kanye ne-nanometer-scale metrology. Kusemongweni walezi zinhlelo kukhona inselele ebalulekile yobunjiniyela: ukufeza ukunyakaza okubushelelezi, okungashukumi, nokuphindaphindeka kakhulu ngaphandle kwephutha elibangelwa ukuthintana ngomshini.

Ubuchwepheshe bokuthwala umoya, uma buhlanganiswe nokuzinza okuphezuluizakhiwo ze-granite, inikeza esinye sezixazululo ezithuthuke kakhulu kule nselele. Uhlelo lokuthwala umoya lwe-granite luthatha indawo yokuxhumana okuvamile kokugoqa noma ukushelela ngomshini ngefilimu encane yomoya ocindezelwe, okuvumela ukunyakaza kokungqubuzana okucishe kube yi-zero kanye nokunemba kwejometri okumangalisayo.

Ezindaweni zokukhiqiza ezithuthukisiwe, izinkampani ezifana ne-ZHHIMG zihlanganisa izisekelo ze-granite ezixinene kakhulu nezingxenye zomoya ezithwala umoya eziklanywe ngokunemba ukuze kufezwe izinhlelo zokunyakaza ezikwazi ukulawula ukuma kwezinga le-sub-micron ngisho nele-nanometer.

1. Isimiso Esiyisisekelo Sobuchwepheshe Bokuthwala Umoya

Ama-air bearings asebenza ngesimiso sokuhlukaniswa kwamandla oketshezi. Esikhundleni sokuvumela izindawo ezimbili eziqinile ukuthi zithintane, kungeniswa ungqimba olulawulwayo lomoya ocindezelwe phakathi kwazo.

1.1 Ukwakheka Kwefilimu Yomoya

Uhlelo olujwayelekile lokuthwala umoya luqukethe:

• Isisekelo se-granite esimile
• Inqola noma isiteji esihambayo
• Ama-nozzle omoya aqondile noma imidiya enezimbobo
• Uhlelo lokuhambisa umoya olulawulwayo

Umoya ocindezelwe ungeniswa ngama-micro-orifice noma izinto zobumba ezinezimbobo, okwenza ifilimu encane ngokuvamile esukela kuma-micrometer amabili kuya kwangu-20 ubukhulu.

Le filimu yomoya isekela umthwalo futhi iqeda ukuthintana okuqondile komshini.

1.2 Ochwepheshe Bokuxhumana Abangewona Ochwepheshe

Ngokungafani nama-ball bearings noma ama-linear guide, ama-air bearings asebenza ngendlela lapho:

• I-coefficient yokushayisana isondela ku-zero
• Ukuguga kuyasuswa ngokwemfundiso
• Akukho ukunyakaza kokushelela kwenduku

Lokhu kwenza ama-air bearings abe afaneleka kakhulu ezinhlelweni zokubeka izinto ngendlela enembile kakhulu lapho i-mechanical hysteresis ingamukeleki khona.

1.3 Ukuziphatha Kokugeleza Kwe-Laminar

Ukusebenza kwama-air bearings kuncike kakhulu ekuzinzeni kokugeleza kwe-laminar. I-Turbulence yethula:

• Ukushintshashintsha kwengcindezi
• Ukungazinzi kwesikhundla
• Umsindo okhuphukile ezinhlelweni zokulinganisa

Ngakho-ke, ukwakheka kokuthwala umoya ngokunemba kudinga ukulungiswa kwe-computational fluid dynamics (CFD) ukuqinisekisa ukusatshalaliswa kokugeleza okuzinzile endaweni yokuthwala.

2. Indima yeGranite Ezinhlelweni Zokuthwala Umoya

I-granite akuyona nje into yokusekela isakhiwo; iyingxenye esebenzayo yesistimu yokunyakaza.

2.1 Ukuzinza Kwesakhiwo

I-granite emnyama enobukhulu obuphezulu inikeza:

• I-modulus ephezulu yokuqina kokuqina
• Ubuqotho besikhathi eside
• Ukumelana nokuguqulwa ngaphansi komthwalo

Lezi zakhiwo zibalulekile ngoba ama-air bearings athembele ekugcineni ukuphakama kwegebe elifanayo kuyo yonke indawo yokuhamba.

2.2 Ukuzinza Kokushisa Nokulawula Ukukhukhuleka

Ukushelela kokushisa kungenye yemithombo yamaphutha evelele ezinhlelweni zokunyakaza ngokunemba.

I-Granite ine:

• I-coefficient yokwandisa ukushisa ephansi (~4–7 × 10⁻⁶ /°C)
• I-inertia ephezulu yokushisa
• Ukusabalala kwe-gradient yokushisa okuhamba kancane

Lokhu kunciphisa:

• Ukuthambekela kwesiteji ngenxa yokushisa okungalingani
• Ukukhukhuleka kwe-Z-axis ekulinganisweni kwesikhathi eside
• Amaphutha okuqondanisa ezinhlelweni zokubona

2.3 Ukudambisa Ukudlidliza

Ukudambisa kwemvelo kwe-Granite kunciphisa ukudluliselwa kokudlidliza okuvama kakhulu okuvela emithonjeni yangaphandle efana nalokhu:

• Ukudlidliza kwephansi
• Imishini yokulungisa eseduze
• Izinhlelo zokuphatha umoya

Lokhu kubalulekile ekugcineni ukuzinza kwesimo ekusetshenzisweni kwesilinganiso se-nanometer.

3. Ukwakhiwa Kwesistimu Yamapulatifomu Okuthwala Umoya eGranite

Uhlelo olujwayelekile lokuthwala umoya lwe-granite luhlanganisa izinhlelo ezingaphansi kwemishini, umoya, kanye nokulawula.

3.1 Isakhiwo Semishini

Izingxenye ezibalulekile:

• Ipulatifomu yesisekelo se-granite
• Imizila yokunyakaza eqondile-phansi
• Ama-air bearing pads (uhlobo lwe-ceramic olunezimbobo noma uhlobo lwe-orifice)
• Ukuhlanganiswa kwesiteji okuhambayo

Ukuthamba kwesisekelo segranite kuvame ukulawulwa kumazinga e-micron noma e-sub-micron kuye ngesigaba sesicelo.

3.2 Uhlelo Lokulawula Umoya

Uhlelo lokunikeza umoya luhlanganisa:

• I-compressor yomoya enomfutho ophezulu
• Abalawuli bokucacisa
• Izithibelo zokugeleza
• Amayunithi okuhlunga (ukususwa kwamafutha, umswakama, izinhlayiya)

Ngisho nokungcola okuncane kungathinta kakhulu ukuqina kwamabhere.

3.3 Izinhlelo Zokuphendula Nokulawula

Izinhlelo ezisezingeni eliphezulu ziyahlanganisa:

• Ama-interferometer e-laser
• Ama-encoder aqondile
• Izinzwa zokuhambisa amandla

Lezi zinhlelo zivumela ukulawulwa kokunyakaza kwe-closed-loop ngesisombululo se-nanometer-scale.

4. I-Metology kanye Nokusebenza Okunembile

Izinhlelo zokuthwala umoya zihlolwa ngokusekelwe kumapharamitha amaningana abalulekile okukala.

4.1 Ukuqonda Nokuthamba

Amaphutha okuqonda avame ukuvela ku:

• Ukuphambuka kwesisekelo se-granite
• Ukwehluka kobukhulu befilimu yomoya
• Ukungalingani kokusatshalaliswa komthwalo

Izinhlelo ezisezingeni eliphezulu zingafeza:

• Ukuqondile kwe-sub-micron phezu kokuhamba ngesilinganiso samamitha
• Ukuphindaphindwa kwezinga le-nanometer ezindaweni ezilawulwayo

4.2 Ukunemba Kokubeka

Ukunemba kokubeka kuncike ku:

• Isixazululo se-encoder
• Ukuqina kweluphu yokulawula
• Ukuqina kwefilimu yomoya

Ngokungafani nezinhlelo zemishini, ama-air bearings awaqedi ngokuphelele ukushayisana.

4.3 Ukuqina Okuguquguqukayo

Ukuqina okuguquguqukayo kuchaza indlela uhlelo olusabela ngayo emandleni angaphandle.

Umbukiso wama-air bearings:

• Ukuqina okuphezulu kuma-frequency aphansi
• Ukuqina okuncishisiwe kumaza aphezulu ngenxa yokucindezelwa komoya

Lokhu kushintshana kulawulwa ngokuklama uhlelo kanye nokwenza ngcono ukulayisha kusengaphambili.

5. Izicelo Zezimboni

Izinhlelo zokuthwala umoya ze-granite zisetshenziswa kabanzi emikhakheni yokukhiqiza ethuthukile.

5.1 Imboni Yezikhombisi-ndlela

Izicelo zifaka:

• Izigaba zokuhlolwa kwe-wafer
• Izinhlelo zokuqondanisa i-Lithography
• Ukubeka imaski yesithombe

Lezi zinhlelo zidinga ukuphindaphindwa kwezinga le-nanometer.

5.2 I-Precision Optics

Kusetshenziswa ku:

• Izinhlelo zokulungisa amalensi
• Ukubekwa kwe-laser beam
• Ukusethwa kokulinganisa okuphakathi kwe-interferometric

5.3 I-Metrology Edidiyelwe

Amapulatifomu e-granite athwala umoya asetshenziswa ku:

• Izinhlelo ze-CMM ezisezingeni eliphezulu
• Imishini yokulinganisa ye-Optical coordinate
• Izinhlelo zokuhlola ezinama-sensor amaningi

5.4 Ukukhiqiza Okuthuthukisiwe

Kufaka phakathi:

• Izinhlelo zomshini omncane
• Amapulatifomu okucubungula i-laser ye-Femtosecond
• Izinhlelo zokulinganisa ukukhiqiza ezengeziwe

6. Izinselele Zokuhlanganiswa Kwezinto Ezibonakalayo

Ukuklama uhlelo lokuthwala umoya lwe-granite kuhilela ukuncintisana okuningi kobunjiniyela.

6.1 Izidingo Zokubanda Komphezulu

Ama-air bearings adinga ukusatshalaliswa kwesikhala somoya esifanayo kakhulu. Noma yikuphi ukuphambuka kokusicaba kwe-granite kuthinta ngqo:

• Ukusatshalaliswa komthwalo
• Ukunyakaza okubushelelezi
• Ukunemba kwesimo

6.2 Ukuzwela Kokunikezwa Komoya

Ukusebenza kwesistimu kuyazwela ku:

• Ukuqina kwengcindezi
• Ukufana kokugeleza
• Amazinga okungcola

Ngisho nezinhlayiya ezincane kakhulu zingaphazamisa ukuhamba komoya.

6.3 Ukuxhumanisa Okushisa Nemishini

Ukwanda kwe-granite kanye nezingxenye zesakhiwo ngokushisa kumele kuhambisane ngokucophelela ukuze kuvinjelwe:

• Ukuthambekela kwesiteji
• Ukuzulazula kwe-Z-axis
• Ukuhlanekezela kwejiyometri

7. Izinqubo Zokukhiqiza Nokulinganisa

Izinhlelo zokuthwala umoya ze-granite ezisebenza kahle kakhulu zidinga izindawo zokukhiqiza ezilawulwayo.

Izigaba zenqubo ezijwayelekile zifaka:

1. Umshini wokugaya i-granite onzima
2. Imijikelezo yokuzinza kokushisa
3. Ukugaya nokuhlanganisa kahle
4. Ukuhlanganiswa kokuthwala umoya
5. Ukuqinisekiswa kwe-Metrology
6. Ukulungiswa kokulinganisa nge-laser

Abakhiqizi abathuthukile njenge-ZHHIMG basebenza ezindaweni ezilawulwayo ezinokuqina kwezinga lokushisa ngokuvamile ngaphakathi kuka-±1°C ukuqinisekisa ukunemba kwejometri okuphindaphindwayo.

8. Izinzuzo Ngaphezu Kwezinhlelo Zokuthwala Zemishini

Ama-air bearings asusa imikhawulo eminingi eyisisekelo yezinhlelo zemishini.

Isiphetho

Izinhlelo zokuthwala umoya ze-granite zimelela esinye sezixazululo ezithuthuke kakhulu zokulawula ukunyakaza okunembile kakhulu ekukhiqizeni kwesimanje. Ngokuhlanganisa ukuzinza kwesakhiwo se-granite enobuningi obukhulu nezici ezingenakho ukungqubuzana zokuhlukaniswa kwefilimu yomoya, lezi zinhlelo zifinyelela amazinga akhethekile okunemba, ukuphindaphindeka, kanye nokuzinza kwesikhathi eside.

Njengoba izimboni zobunjiniyela be-semiconductor kanye nokunemba ziqhubeka nokuqhubekela phambili ekubekezeleleni i-nanometer ngisho ne-sub-nanometer tolerances, amapulatifomu okuthwala umoya we-granite azohlala ewubuchwepheshe obuyinhloko obuvumela izinhlelo ze-metrology kanye nezokukhiqiza zesizukulwane esilandelayo.