Ukukhiqizwa kwezingxenye zesakhiwo ezinembe kakhulu kudinga okungaphezu kwemishini ye-CNC ethuthukisiwe. Ngaphandle kokuhlukaniswa okuqinile nokudlidliza kwe-ambient kanye nezimboni, ukufeza ukubekezelelana kwe-geometric kwe-sub-micron akunakwenzeka. Yonke imoto edlulayo, i-overhead crane eseduze, kanye ne-climate control compressor kungenisa amagagasi e-micro-seismic angonakalisa ukugoqa kanye nokulinganiswa kwezisekelo ze-granite ezinembile, ama-air bearings, kanye nezingxenye ze-ceramic.
Ukuze kuncishiswe lokhu, izikhungo zezimboni kumele ziphathe indawo yokukhiqiza njengengxenye ehlanganisiwe yohlelo lwe-metrology.
I-Physics of Foundation Rigidization
Izitezi zekhonkrithi ezijwayelekile zezimboni ngokuvamile zinobukhulu obungu-150 mm kuya ku-300 mm. Nakuba zanele ukuthunyelwa okujwayelekile kanye nokuhlanganiswa okunzima, azanele nhlobo ekukhiqizweni kwezinga le-nanometer. Ngaphansi kwemithwalo enamandla, izitezi ezijwayelekile zisebenza njenge-diaphragm, zidlulisela ukudlidliza kwezitezi okuvamise ukuba ngaphansi ngqo ezintweni zokusebenza.
Ukuze kuqedwe le vector yamaphutha, izindawo zokukhiqiza ezithuthukisiwe zisebenzisa isu lengqalasizinda elinezigaba eziningi:
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Izisekelo Zezempi Ezinobukhulu Obuphakeme: Ukuthela ukhonkolo oqinisiwe kuze kube ukujula okungenani okungu-1000 mm kunikeza i-inertial block enkulu. Lokhu kuqina kuthulisa amaza anemvamisa ephansi (1 - 10 Hz) ngaphambi kokuba afike emshinini.
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Imisele Yokuhlukaniswa Kwe-Perimeter: Ukusika imisele yokuhlukanisa ukudlidliza ezungeze izindawo zokukhiqiza—ngobukhulu obuqondile njengobubanzi obungu-500 mm kanye nokujula okungu-2000 mm—kuhlukanisa ngokoqobo indawo yokukhiqiza enembile kusuka kwenye indawo. Le misele igcwele izinto ezikhethekile ezibamba amandla ukuze kuncishiswe amaza okushisa aseceleni.
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Ukuthulisa I-Acoustic kanye Nemishini: Ama-crane angaphezulu kanye nama-gantry hoists angumthombo omkhulu womsindo ophansi kanye nokudlidliza kwesakhiwo. Ukusebenzisa izinhlelo zokuhamba ezihamba phambili ezifakwe i-acoustic ezenziwe ngokwezifiso, ezisebenza buthule kuvimbela amaza okucindezela kwe-acoustic ekuphazamiseni amazinga e-elekthronikhi abucayi kanye nama-interferometer e-laser ngesikhathi semijikelezo yokulinganisa.
Ukuvumelanisa Kwemvelo: Izinga Lokushisa Nomswakama
Ukwanda kokushisa kungumnikeli omkhulu kunabo bonke ephutheni lejometri kui-granite enembilekanye nokukhiqizwa kwe-ceramic. Ukushintsha kwezinga lokushisa elingu-0.5 ℃ kuphela kungabangela ukuthi umbhede we-granite ongu-5000 mm uguquguquke ngaphezu kokubekezelelana okuvumelekile.
Ukuze kufezwe ukunemba okuhambisanayo, indawo yokucubungula kanye nokuhlanganisa kumele ilandele imingcele eqinile:
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Ukuvalwa Kwemvelo Okuphelele: Ukukhiqiza kufanele kwenzeke ngaphakathi kwamagumbi okuhlanza amakhulu, avaliwe (isb., 10,000㎡) lapho izinga lokushisa livalelwe ku-20℃ ± 0.2℃ futhi umswakama ohlobene ulawulwa ngokuqinile.
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Ukuphathwa Kwesivinini Somoya: Izinhlelo zokuhamba komoya ezithambile kumele zakhiwe ukuze kugwenywe ukukhishwa komoya okuqondile, okushesha kakhulu ezindaweni ze-granite, okuvimbela ukwehla kokushisa kwendawo.
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Ukulingisa Igumbi Lokuhlanza Ama-Semiconductor: Ukuhlanganiswa kokugcina kwama-granite gantries amaningi, izigaba ze-linear motor, kanye nama-air bearings anemba kakhulu kudinga izindawo ezikhethekile, ezingenalo uthuli ezilingisa i-semiconductor fab yomsebenzisi wokugcina. Lokhu kuqinisekisa ukuthi akukho ukungcola kwezinhlayiya okuphazamisa izikhala ezithwala umoya, ezivame ukuba phakathi kuka-5μm no-15μm.
Isifinyezo
Ukukhiqizwa okunembe kakhulu akunakwenzeka endaweni ejwayelekile yezimboni. Ukuqina kwephansi lefektri, ukuhlukaniswa kwesakhiwo kwezisekelo, kanye nokulawulwa okuphelele kwe-thermodynamics yegumbi elihlanzekile kwakha isisekelo samandla e-metrological. Ukutshala imali ezisekelweni ezinkulu ze-inertial kanye nokuhlukaniswa kwe-perimeter kuyindlela eqinisekisiwe yokuqinisekisa ukuthi ukukhiqizwa kwe-sub-micron kuhlala kuzinzile, kuyaphindaphindeka, futhi kuyalandeleka.
Isikhathi sokuthunyelwe: Juni-15-2026