I-Granite iyinto eqinile futhi eqinile evame ukusetshenziswa embonini yokwakha. Kodwa-ke, inezici ezenza ibe usizo ekukhiqizweni kwe-semiconductor, ikakhulukazi ekwakhiweni nasekucutshungulweni kwamasekethe ahlanganisiwe. Izingxenye ze-granite, njengetafula le-granite namabhulokhi e-granite, zisetshenziswa kabanzi ngenxa yokuqina kwazo, ukuba yisicaba, kanye ne-coefficient yokukhulisa ukushisa ephansi.
Enye yezindlela eziyinhloko zokusebenzisa izingxenye ze-granite ekukhiqizeni i-semiconductor isenqubweni yokukhiqiza. Ama-silicon wafer, izakhi eziyisisekelo zamasekethe ahlanganisiwe, adinga ukwenziwa ngokunemba okuphezulu nokunemba. Noma yikuphi ukuphambuka noma ukunyakaza phakathi nenqubo kungaholela ezifweni ezingathinta ikhwalithi nokusebenza kwamasekethe ahlanganisiwe. Amatafula e-granite, ngokuqina kwawo okuphezulu kanye nokuba yisicaba, ahlinzeka ngeplatifomu enhle yemishini yokucubungula ama-wafer. Aphinde amelane nokwanda kokushisa kanye nokufinyela okubangelwa ukushisa nokupholisa okudingekayo enqubweni.
Amabhulokhi e-granite nawo asetshenziswa ekucubungulweni kwe-semiconductor ukuze kuqiniswe ukushisa kwawo. Ngesikhathi sezinqubo zokuqopha noma zokufaka, amagesi ashisayo noma ama-plasma asetshenziswa ukuguqula ubuso be-silicon wafer. Izinga lokushisa le-wafer lidinga ukulawulwa ukuqinisekisa ukuthi inqubo yenziwa kahle nangokunembile. Amabhulokhi e-granite, ane-coefficient yawo yokukhulisa ukushisa ephansi, asiza ekuqiniseni izinga lokushisa le-wafer, kunciphisa ingozi yokushintshashintsha kwezinga lokushisa okungathinta ikhwalithi yezinto ezicutshunguliwe.
Ngaphandle kwezinqubo zokwenziwa nokucubungula, izingxenye ze-granite nazo zisetshenziswa ezigabeni ze-metrology kanye nokuhlolwa kokukhiqizwa kwe-semiconductor. Ukulinganiswa kwe-metrology kwenziwa ukuqinisekisa ukuthi usayizi, ukuma, kanye nendawo yezakhiwo eziku-wafer kungaphakathi kwezidingo ezidingekayo. Amabhulokhi e-granite asetshenziswa njengezindinganiso zokubhekisela kulezi zilinganiso ngenxa yokuqina kwawo kanye nokunemba kwawo. Asetshenziswa futhi ezigabeni zokuhlola, lapho ikhwalithi yamasekethe ahlanganisiwe ihlolwa ngaphansi kokukhulisa okuphezulu.
Sekukonke, ukusetshenziswa kwezingxenye ze-granite ekukhiqizweni kwe-semiconductor kukhule eminyakeni yamuva nje. Isidingo sokunemba okuphezulu, ukunemba, kanye nokuzinza ekwakhiweni nasekucutshungulweni kwezifunda ezihlanganisiwe siye saqhuba ukwamukelwa kwalezi zinto ngabakhiqizi be-semiconductor. Izakhiwo ezihlukile ze-granite, njengokuqina kwayo, ukuzinza, kanye ne-coefficient yokwanda kokushisa okuphansi, zenza kube ukukhetha okuhle kakhulu kokusetshenziswa kulezi zinqubo. Ngokuthuthuka okuqhubekayo kanye nokuthuthukiswa kobuchwepheshe be-semiconductor, ukusetshenziswa kwezingxenye ze-granite kulindeleke ukuthi kukhule kakhulu esikhathini esizayo.
Isikhathi sokuthunyelwe: Disemba-05-2023
