Ungazisebenzisa kanjani izingxenye ze-granite ngenqubo yokukhiqiza i-semiconductor?

I-Granite iyinto eqinile futhi eqinile evame ukusetshenziswa embonini yezokwakha.Kodwa-ke, iphinde ibe nezakhiwo ezenza isebenziseke ekukhiqizeni ama-semiconductor, ikakhulukazi ekwakhiweni nasekucutshungulweni kwamasekhethi ahlanganisiwe.Izingxenye ze-granite, ezifana namathebula e-granite namabhulokhi e-granite, zisetshenziswa kabanzi ukuze zizinze, zibe flat, kanye ne-coefficient ephansi yokwandisa okushisayo.

Enye yezindlela eziyinhloko ezisetshenziswa ngayo izingxenye ze-granite ekukhiqizeni i-semiconductor kusenqubweni yokwenziwa.Ama-wafer e-silicon, amabhlokhi wokwakha ayisisekelo wamasekethe ahlanganisiwe, adinga ukwakhiwa ngokunemba okuphezulu nokunemba.Noma yikuphi ukuhlanekezela noma ukunyakaza phakathi nenqubo kungaholela ekushiyekeni okungase kuthinte ikhwalithi nokusebenza kwamasekethe ahlanganisiwe.Amatafula e-Granite, ngokuzinza kwawo okuphezulu kanye nokucaba, ahlinzeka ngenkundla enhle yemishini yokucubungula i-wafer.Ziyakwazi futhi ukumelana nokwanda nokuncipha kwezinga lokushisa okubangelwa ukushisa nokupholisa okudingekayo kule nqubo.

Amabhlogo e-granite nawo asetshenziswa ekucubunguleni i-semiconductor ukuze azinze ekushiseni kwawo.Phakathi nezinqubo zokufaka noma zokubeka, amagesi ashisayo noma ama-plasma asetshenziselwa ukuguqula ingaphezulu le-wafer ye-silicon.Izinga lokushisa le-wafer lidinga ukulawulwa ukuze kuqinisekiswe ukuthi inqubo yenziwa kahle futhi ngokunembile.Amabhulokhi e-granite, ane-coefficient yawo ephansi yokwandisa ukushisa okushisayo, asiza ukuzinzisa izinga lokushisa le-wafer, enciphisa ubungozi bokuguquguquka kwezinga lokushisa okungathinta ikhwalithi yezinto ezicutshunguliwe.

Ngaphandle kwezinqubo zokwenziwa nokucubungula, izingxenye ze-granite nazo zisetshenziswa ezigabeni ze-metrology kanye nokuhlolwa kokukhiqizwa kwe-semiconductor.Izilinganiso ze-Metrology zenziwa ukuqinisekisa ukuthi usayizi, ukwakheka, kanye nokuma kwezakhiwo ku-wafer kungaphakathi kwemininingwane edingekayo.Amabhulokhi e-granite asetshenziswa njengamazinga okubhekisela kulezi zilinganiso ngenxa yokuzinza kwawo kobukhulu nokunemba.Zibuye zisetshenziswe ezigabeni zokuhlola, lapho ikhwalithi yamasekethe ahlanganisiwe ihlolwe ngaphansi kokukhulisa okuphezulu.

Sekukonke, ukusetshenziswa kwezingxenye ze-granite ekukhiqizeni ama-semiconductor kunyukile eminyakeni yamuva.Isidingo sokunemba okuphezulu, ukunemba, nokuzinza ekwakhiweni nasekucutshungulweni kwamasekhethi adidiyelwe siye saqhuba ukwamukelwa kwalezi zinto ezisetshenziswa abakhiqizi be-semiconductor.Izici eziyingqayizivele zegwadle, njengokuqina kwayo, ukuzinza, kanye ne-coefficient ephansi yokwandisa ukushisa okushisayo, kuyenza ibe ukukhetha okuhle kakhulu ukusetshenziswa kulezi zinqubo.Ngokuthuthuka okuqhubekayo kanye nokuthuthukiswa kobuchwepheshe be-semiconductor, ukusetshenziswa kwezingxenye ze-granite kulindeleke ukuthi kukhule ngokuqhubekayo esikhathini esizayo.