Imboni ye-semiconductor yomhlaba wonke okwamanje idlula enkathini yokunemba okungakaze kubonwe ngaphambili. Njengoba ubukhulu bezici kuma-silicon wafers buncipha bubheke kuma-node angu-2nm no-1nm, umkhawulo wamaphutha ku-metrology kanye nokuhlolwa usuphelile. Ngaphakathi kwalesi simo esibucayi kakhulu, ngisho nezinhlelo ze-optical kanye ne-electron-beam ezithuthuke kakhulu zithembeke kuphela njengamapulatifomu ezihlala kuwo. Leli qiniso libangele ushintsho olukhulu embonini yonke: ukuthembela okwandayo kui-granite engeyona i-magnetic yokuhlola i-wafernjengezinto eziyisisekelo zezindawo zokuhlola ezisebenza kahle kakhulu.
Sekungamashumi eminyaka, i-granite yemvelo ibilokhu “iyindinganiso yegolide” yobunjiniyela bokunemba ngenxa yokudambisa kwayo okumangalisayo kokudlidliza kanye ne-coefficient ephansi yokwanda kokushisa. Kodwa-ke, esimweni sokuhlolwa kwe-wafer yesimanje, akuwona wonke ama-granite adalwe ngokulinganayo. Ukuba khona kwezinto ezifakiwe zensimbi noma amaminerali amagnetic etsheni lezinga elijwayelekile kungadala ukuphazamiseka kwendawo yamagnetic field. Ezinhlelweni ezisebenzisa imisebe yama-electron noma izinzwa ezibucayi zamagnetic, ukuphazamiseka okunjalo kuyinhlekelele, okuholela ekuphambukeni kwemisebe kanye nokungalungi kokulinganisa okuphazamisa yonke inqubo yokulawula ikhwalithi.
I-ZHHIMG ichithe iminyaka ihlaziya inqubo yokukhetha ukuze ithole ukwakheka kwe-geological okunamandla aphansi kakhulu okubangelwa amandla kazibuthe. Ngokuhlinzeka ngeqinisoi-granite engeyona i-magnetic yokuhlola i-wafer, senza abakhiqizi bemishini bakwazi ukudlula imingcele yesisombululo ngaphandle “komsindo” we-phantom ohlasela izinto ezincane. Lo mqondo wobuchwepheshe yiwona ohlukanisa ithuluzi lokuhlola elijwayelekile ne-metrology suite yezinga lomhlaba ekwazi ukusekela ukuphindaphindwa kwe-sub-nanometer.
Okuhambisana nezidingo zikagesi kukhona isidingo esingenakuxoxiswana ngaso sokuhlanzeka kwemvelo. Ku-Fab yesimanje, ipulatifomu kumele yenze okungaphezu nje kokuhlala ithule; kumele ihlale “ingabonakali” emvelweni. Yilapho umqondo we-ipulatifomu yegranite ehambisana negumbi lokuhlanzakuba yinto ebalulekile. Izinto zezimboni zendabuko zivame ukwehluleka ezindaweni ezihlanzekile noma ezihlanzekile ngenxa yokukhishwa kwegesi—ukukhishwa kwamagesi avalelekile noma amakhemikhali e-organic aguquguqukayo angangcolisa ama-optics noma ahlale phezu kwe-wafer, okubangela “amaphutha amakhulu” abulalayo.
Ifilosofi yobunjiniyela be-ZHHIMG iphatha ubuso be-granite njengengxenye esebenza kahle kakhulu kunokuba ibe yibhulokhi yamatshe engaguquki. Ukucubungula kwethu okukhethekile kuqinisekisa ukuthi yonke intoipulatifomu yegranite ehambisana negumbi lokuhlanzaidlula kunqubo yokuhlanza nokuvala eqinile eyenzelwe ukuqeda ukuchitheka kwezinhlayiya ezincane. Leli zinga lobuqotho bezinto libalulekile kumathuluzi okudweba nokuhlola asebenza ezindlini zokuhlanza ze-Class 1 noma ze-ISO 3, lapho ngisho nenhlayiya eyodwa elahlekile ingaholela ezinkulungwaneni zamaRandi ekulahlekelweni kwesivuno.
Ngaphandle kwezakhiwo ezibonakalayo zetshe ngokwalo, ukuhlanganiswa kwe-granite ekwakhiweni komshini okubanzi kudinga ukuqonda okujulile kwezindlela zokwakha. Ama-OEM ahamba phambili aseYurophu naseMelika asemiconductor awasafuni abaphakeli abalula; afuna abalingani ababambisanayo abaqonda ukucindezeleka kokushisa nokomshini kokuphathwa kwe-wafer okusheshayo okungu-24/7. Ubuchwepheshe be-ZHHIMG ekuhlanganiseni ngokunemba kanye nokufakwa ngokwezifiso kuvumela ukuhlanganiswa okungenamthungo kwezigaba ezithwala umoya kanye nama-motor aqondile ngqo esisekelweni se-granite, okudala uhlelo oluhlanganisiwe olunciphisa amaphutha okuhlanganisa.
Njengoba sibheke ikusasa lomkhakha, indima yesisekelo sesakhiwo izokhula ngokubaluleka. Ngokufika kwe-High-NA EUV lithography kanye nokwelulwa kwe-3D NAND, ubukhulu kanye nokuqina kwe-i-granite engeyona i-magnetic yokuhlola i-waferAmapulatifomu kumele athuthuke ukuze abhekane nokusheshisa okuphezulu kanye nemithwalo yokushisa eyinkimbinkimbi kakhulu. I-ZHHIMG ihamba phambili kulokhu kuthuthuka, itshala imali kumathuluzi okukala athuthukile ukuqinisekisa ukuthi i-flat kanye ne-parallelism ziyavumelana nokubekezelelana okwakucatshangwa ukuthi akunakwenzeka eminyakeni eyishumi edlule.
Ukuzibophezela ekwenzeni kahle e-ZHHIMG kuqhutshwa ukuqonda ukuthi emhlabeni we-semiconductor, ukuzinza kuyisandulela sokusungula izinto ezintsha. Ukusebenza kahle kakhuluipulatifomu yegranite ehambisana negumbi lokuhlanzakungaphezu kokuthenga; kuwukutshalwa kwezimali ekuthembekeni kwesikhathi eside komugqa wokukhiqiza. Ngokususa ukuphazamiseka kwamagnetic kanye nokungcoliswa kwezinhlayiya emthonjeni, i-ZHHIMG inikeza indawo ethule, ehlanzekile, nezinzile edingwa ama-chip akusasa.
Ezinhlanganweni ezilwela ukwenza ngcono izinga lokuhlola kwazo nokunciphisa izindleko eziphelele zobunikazi bezimpahla zazo ze-metrology, ukukhetha izinto eziyisisekelo kuyisinqumo esibaluleke kakhulu esigabeni sokuklama. I-ZHHIMG iyaqhubeka nokusekela abaholi bomhlaba wonke ngokuletha izingxenye zamatshe ezihlangabezana nezindinganiso zomhlaba wonke eziqinile zokuhlanzeka nokunemba.
Ezweni elichazwa yi-microscopic, ukuzinza okukhulu kwe-granite ye-ZHHIMG kusalokhu kungumgcini othule wesikhathi sedijithali. Simema onjiniyela bezinqubo nabaklami bemishini ukuthi bahlole ukuthi isayensi yethu yezinto ezibonakalayo ekhethekile ingachaza kanjani kabusha imingcele yalokho okungafezwa yizinhlelo zabo zokuhlola.
Isikhathi sokuthunyelwe: Mashi-05-2026